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    • 4. 发明授权
    • Method of and apparatus for measuring energy gap of semiconductor
    • 测量半导体能隙的方法和装置
    • US5406505A
    • 1995-04-11
    • US994593
    • 1992-12-15
    • Seong-Jun KangBo-Woo KimYil-Sung Bae
    • Seong-Jun KangBo-Woo KimYil-Sung Bae
    • G01N21/35G01N21/62
    • G01N21/3563
    • A method and apparatus is disclosed for measuring an energy gap of a semiconductor material. The method contains the steps of analyzing a character of a reference semiconductor sample and setting an energy gap pixel value, estimating a transfer function between the pixel value, positioning the sample properly and imaging the spectrum to obtain a live image, storing the live image and scanning the respective pixel values along an x-axis of the image, sequentially comparing the respective pixel value and the energy gap pixel value, reading an x-coordinate of the pixel and converting the wavelength of the pixel to estimate the energy gap. The apparatus optically measures the energy gap and comprises a light source irradiating a light beam, a lens for focusing the light beam, a polychromator for irradiating the spectrum of light of the light beam to the sample, optical filters for evaluating a spectrum band of the polychromator into wavelength values, an image acquisition apparatus, an image signal processor, an energy gap detecting and displaying apparatus, and a computer for executing operation and control functions necessary to measure the energy gap by use of the image signal processor and the energy gap detecting and displaying apparatus.
    • 公开了一种用于测量半导体材料的能隙的方法和装置。 该方法包括以下步骤:分析参考半导体样本的字符并设置能隙像素值,估计像素值之间的传递函数,适当地定位样本并成像光谱以获得实时图像,存储实时图像;以及 沿着图像的x轴扫描各个像素值,顺序地比较各个像素值和能隙像素值,读取像素的x坐标并转换像素的波长以估计能隙。 该设备光学测量能隙并包括照射光束的光源,用于聚焦光束的透镜,用于将光束的光束照射到样品的多色分光器,用于评估光束的光谱带的光学滤光器 多色分光子变为波长值,图像采集装置,图像信号处理器,能隙检测和显示装置,以及用于执行通过使用图像信号处理器和能隙检测来测量能隙所需的操作和控制功能的计算机 和显示装置。