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    • 6. 发明授权
    • Multiple nozzle evaporator for vacuum thermal evaporation
    • 用于真空热蒸发的多个喷嘴蒸发器
    • US07976636B2
    • 2011-07-12
    • US12899767
    • 2010-10-07
    • Seong-Moon KimKwang-Ho JeongMyung-Woon ChoiHyung-Won Park
    • Seong-Moon KimKwang-Ho JeongMyung-Woon ChoiHyung-Won Park
    • C23C16/00
    • C23C14/243
    • Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular post-shaped crucible with an open top face; and a nozzle having a body portion having a rectangular post-like shape with a height smaller than that of the crucible and assembled to an upper portion of the crucible, and a plurality of evaporation tubes penetrating through the body portion between top and bottom faces of the body portion. The evaporation tubes are divided into four groups of which evaporation tubes are inclined toward respective four corners of a top face of the nozzle unit. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material, and preventing condensation of the evaporated material at a spouting portion.
    • 公开了一种多喷嘴蒸发器,其中蒸发器中要蒸发的材料可以以提高的材料使用效率沉积在基板上,从而形成大面积均匀的薄膜。 蒸发器包括具有开放顶面的矩形后形坩埚; 以及具有主体部分的主体部分,其主体部分具有比坩埚的高度小的坩埚的高度的矩形形状,并且组装到坩埚的上部;以及多个蒸发管,穿过主体部分在顶面和底面之间 身体部位。 蒸发管被分成四组,其中蒸发管朝向喷嘴单元的顶面的相应四个角倾斜。 由于倾斜的蒸发管,蒸发的材料喷射到基板的周边区域,从而提高了要沉积的薄膜的均匀性和蒸发材料的使用效率,并且防止了蒸发材料在喷射部分处的冷凝。
    • 8. 发明申请
    • MULTIPLE NOZZLE EVAPORATOR FOR VACUUM THERMAL EVAPORATION
    • 用于真空蒸发的多喷嘴蒸发器
    • US20110023783A1
    • 2011-02-03
    • US12899767
    • 2010-10-07
    • Seong-Moon KimKwang-Ho JeongMyung-Woon ChoiHyung-Won Park
    • Seong-Moon KimKwang-Ho JeongMyung-Woon ChoiHyung-Won Park
    • C23C16/00
    • C23C14/243
    • Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular post-shaped crucible with an open top face; and a nozzle having a body portion having a rectangular post-like shape with a height smaller than that of the crucible and assembled to an upper portion of the crucible, and a plurality of evaporation tubes penetrating through the body portion between top and bottom faces of the body portion. The evaporation tubes are divided into four groups of which evaporation tubes are inclined toward respective four corners of a top face of the nozzle unit. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material, and preventing condensation of the evaporated material at a spouting portion.
    • 公开了一种多喷嘴蒸发器,其中蒸发器中要蒸发的材料可以以提高的材料使用效率沉积在基板上,从而形成大面积均匀的薄膜。 蒸发器包括具有开放顶面的矩形后形坩埚; 以及具有主体部分的主体部分,其主体部分具有比坩埚的高度小的坩埚的高度的矩形形状,并且组装到坩埚的上部;以及多个蒸发管,穿过主体部分在顶面和底面之间 身体部位。 蒸发管被分成四组,其中蒸发管朝向喷嘴单元的顶面的相应四个角倾斜。 由于倾斜的蒸发管,蒸发的材料喷射到基板的周边区域,从而提高了要沉积的薄膜的均匀性和蒸发材料的使用效率,并且防止了蒸发材料在喷射部分处的冷凝。