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1. 发明授权

US07977207B2 MEMS device and fabrication method of the same 有权
标题翻译： MEMS器件及其制造方法相同
公开(公告)号：US07977207B2
公开(公告)日：2011-07-12
申请号：US12856308
申请日：2010-08-13
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H02N1/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

2. 发明授权

US07341888B2 Balance filter packaging chip having balun mounted therein and manufacturing method thereof 有权
标题翻译：具有平衡 - 不平衡转换器的平衡过滤器包装芯片及其制造方法
公开(公告)号：US07341888B2
公开(公告)日：2008-03-11
申请号：US11435986
申请日：2006-05-18
申请人： Kuang-woo Nam , Yun-kwon Park , In-sang Song , Jea-shik Shin , Seok-mo Chang , Seok-chul Yun
发明人： Kuang-woo Nam , Yun-kwon Park , In-sang Song , Jea-shik Shin , Seok-mo Chang , Seok-chul Yun
IPC分类号： H01L23/02
CPC分类号： H03H9/0547
摘要： A balance filter packaging chip having a balun mounted therein and a manufacturing method thereof are provided. The balance filter packaging chip includes a device substrate; a balance filter mounted on the device substrate; a bonding layer stacked on a certain area of the device substrate; a packaging substrate having a cavity formed over the balance filter, and combined with the device substrate by the bonding layer; a balun located on a certain area over the packaging substrate; and an insulator layer for passivating the balun. Accordingly, the present invention can reduce an element size and simplify a manufacturing process.
摘要翻译：提供一种其中安装有平衡 - 不平衡转换器的平衡滤波器封装芯片及其制造方法。平衡滤波器封装芯片包括器件基板; 安装在装置基板上的平衡过滤器; 层叠在所述器件基板的特定区域上的接合层; 封装基板，其具有形成在所述平衡滤波器上方的空腔，并且通过所述接合层与所述器件基板结合; 位于包装衬底上的某个区域上的平衡 - 不平衡转换器; 以及用于钝化平衡 - 不平衡变换器的绝缘体层。因此，本发明可以减小元件尺寸并简化制造工艺。

3. 发明授权

US07800280B2 MEMS device and fabrication method of the same 有权
标题翻译： MEMS器件及其制造方法相同
公开(公告)号：US07800280B2
公开(公告)日：2010-09-21
申请号：US11873008
申请日：2007-10-16
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H02N1/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

4. 发明申请

US20080179988A1 MEMS DEVICE AND FABRICATION METHOD OF THE SAME 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20080179988A1
公开(公告)日：2008-07-31
申请号：US11873008
申请日：2007-10-16
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H02N1/00 , H01L21/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

5. 发明申请

US20070024396A1 Integrated filter including FBAR and saw resonator and fabrication method therefor 有权
标题翻译：集成滤波器，包括FBAR和锯片谐振器及其制造方法
公开(公告)号：US20070024396A1
公开(公告)日：2007-02-01
申请号：US11448707
申请日：2006-06-08
申请人： Kuang-woo Nam , Kook-hyun Sunwoo , In-sang Song , Sang-wook Kwon , Duck-hwan Kim , Chul-soo Kim , Sang-chul Sul , Yun-kwon Park , Hae-seok Park , Jea-shik Shin , Dong-ha Shim , Young-tack Hong , Jong-seok Kim , Seok-mo Chang , Seok-Chul Yun
发明人： Kuang-woo Nam , Kook-hyun Sunwoo , In-sang Song , Sang-wook Kwon , Duck-hwan Kim , Chul-soo Kim , Sang-chul Sul , Yun-kwon Park , Hae-seok Park , Jea-shik Shin , Dong-ha Shim , Young-tack Hong , Jong-seok Kim , Seok-mo Chang , Seok-Chul Yun
IPC分类号： H03H9/56
CPC分类号： H03H9/588 , H03H3/02 , H03H9/02228 , H03H2003/0071
摘要： An integrated filter including a film bulk acoustic resonator (FBAR) and a surface acoustic wave (SAW) resonator and a method of fabricating the integrated filter. The integrated filter includes: a substrate; a first electrode positioned in a predetermined first area on an upper surface of the substrate; a first piezoelectric layer positioned on the first electrode; a second electrode positioned on the first piezoelectric layer; a second piezoelectric layer positioned in a predetermined second area on the upper surface of the substrate; and at least one inter-digital transducer (IDT) electrode positioned on the second piezoelectric layer. The IDT electrode includes: a first IDT electrode formed in a comb structure on the second piezoelectric layer; and a second IDT electrode formed in a comb structure on the second piezoelectric layer so as to mesh with the first IDT electrode. The first and second piezoelectric layers are formed of an identical material. Thus, an integrated filter which operates in various frequency bands can be made compact.
摘要翻译：一种包括膜体声波谐振器（FBAR）和表面声波（SAW）谐振器的集成滤波器以及一体化滤波器的制造方法。集成滤波器包括：基板; 位于所述基板的上表面上的预定第一区域中的第一电极; 位于所述第一电极上的第一压电层; 位于所述第一压电层上的第二电极; 位于所述基板的上表面上的预定的第二区域中的第二压电层; 和位于第二压电层上的至少一个数字间换能器（IDT）电极。 IDT电极包括：在第二压电层上形成为梳状结构的第一IDT电极; 以及在第二压电层上形成为梳状结构的第二IDT电极，以便与第一IDT电极啮合。第一和第二压电层由相同的材料形成。因此，可以使在各种频带中工作的集成滤波器紧凑。

6. 发明申请

US20070024390A1 Vertical comb actuator radio frequency micro-electro-mechanical system switch 有权
标题翻译：立式梳子执行器射频微机电系统开关
公开(公告)号：US20070024390A1
公开(公告)日：2007-02-01
申请号：US11417242
申请日：2006-05-04
申请人： Young-tack Hong , Seok-chul Yun , Seok-mo Chang , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Sang-hun Lee , Jun-o Kim , In-sang Song
发明人： Young-tack Hong , Seok-chul Yun , Seok-mo Chang , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Sang-hun Lee , Jun-o Kim , In-sang Song
IPC分类号： H01P1/10
CPC分类号： H01H59/0009
摘要： A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.
摘要翻译：立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，所述致动器位于所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。因此，可以防止致动器粘附到基板。此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

7. 发明申请

US20100304517A1 MEMS DEVICE AND FABRICATION METHOD OF THE SAME 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20100304517A1
公开(公告)日：2010-12-02
申请号：US12856308
申请日：2010-08-13
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H01L21/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

8. 发明申请

US20090153881A1 METHOD AND APPARATUS FOR MEASURING 3-DIMENSIONAL POSITION AND ORIENTATION OF REFLECTIVE MIRROR PACKAGE 审中-公开
标题翻译：用于测量反射镜的三维位置和方向的方法和装置
公开(公告)号：US20090153881A1
公开(公告)日：2009-06-18
申请号：US12137673
申请日：2008-06-12
申请人： Yong-chul CHO , Seok-mo CHANG
发明人： Yong-chul CHO , Seok-mo CHANG
IPC分类号： G01B11/00
CPC分类号： G01B11/0608 , G01B11/272
摘要： Provided are a method and an apparatus for measuring a 3-dimensional (3D) position and an orientation of an object. The apparatus includes: a height measurement unit including a first light source and a first image sensor receiving light that is emitted from the first light source to the object and reflected from the object; a position measurement unit including a second light source, and a second image sensor receiving light that is emitted from the second light source to the object and reflected from the object; a tilt angle measurement unit including a third light source and a third image sensor receiving light that is emitted from the third light source to the object and reflected from the object; and a controlling unit selectively powering on or off the first, second, and third light sensors, and calculating a height variation, a position variation and tilt angles of the object by using images that are respectively formed on the first, second, and third image sensors.
摘要翻译：提供了一种用于测量物体的三维（3D）位置和取向的方法和装置。该装置包括：高度测量单元，包括第一光源和第一图像传感器，其接收从第一光源发射到物体并从物体反射的光; 位置测量单元，包括第二光源，以及第二图像传感器，其接收从所述第二光源发射到所述物体并从所述物体反射的光; 倾斜角测量单元，包括第三光源和第三图像传感器，其接收从所述第三光源发射到所述物体并从所述物体反射的光; 以及控制单元，其选择性地接通或关闭所述第一，第二和第三光传感器，并且通过使用分别形成在所述第一，第二和第三图像上的图像来计算所述物体的高度变化，位置变化和倾斜角度传感器。

9. 发明授权

US07411660B2 Laser straight ruler and method for measuring distance and projecting line using the straight ruler 失效
标题翻译：激光直尺和使用直尺测量距离和投影线的方法
公开(公告)号：US07411660B2
公开(公告)日：2008-08-12
申请号：US11477631
申请日：2006-06-30
申请人： Young-chul Cho , Seok-mo Chang
发明人： Young-chul Cho , Seok-mo Chang
IPC分类号： G01C3/08
CPC分类号： G01C3/10 , G01C3/08 , G01C15/004 , G01S17/48
摘要： A laser straight ruler having a main body and a beam scanner installed on the main body. A laser beam is scanned to form a beam spot on an object. A position sensing device receives a laser beam reflected by the object and senses a position of the beam spot. A signal processing unit drives the beam scanner and processes a signal of the position sensing device. A display displays a change in a distance between the main body and the object and data including a measured distance value from the signal processing unit. An input portion inputs data including adjustment of a scanning width of the beam spot and sets start and end positions of the measured distance. A straight distance of the object is measured or the beam spot having a scanning width corresponding to a measured distance or a predetermined distance is projected to the object.
摘要翻译：具有主体和安装在主体上的光束扫描仪的激光直尺。扫描激光束以在物体上形成束斑。位置检测装置接收由物体反射的激光束并感测束斑的位置。信号处理单元驱动光束扫描器并处理位置检测装置的信号。显示器显示主体和对象之间的距离的变化以及包括来自信号处理单元的测量距离值的数据。输入部分输入包括调整光斑的扫描宽度的数据，并设置测量距离的开始和结束位置。测量物体的直线距离，或者将具有对应于测量距离或预定距离的扫描宽度的束斑投射到物体。

10. 发明授权

US08624369B2 Balance filter packaging chip having balun mounted therein and manufacturing method thereof 有权
标题翻译：具有平衡 - 不平衡转换器的平衡过滤器包装芯片及其制造方法
公开(公告)号：US08624369B2
公开(公告)日：2014-01-07
申请号：US11844084
申请日：2007-08-23
申请人： Kuang-woo Nam , Yun-kwon Park , In-sang Song , Jea-shik Shin , Seok-mo Chang , Seok-chul Yun
发明人： Kuang-woo Nam , Yun-kwon Park , In-sang Song , Jea-shik Shin , Seok-mo Chang , Seok-chul Yun
IPC分类号： H01L23/02
CPC分类号： H03H9/0547
摘要： A balance filter packaging chip having a balun mounted therein and a manufacturing method thereof are provided. The balance filter packaging chip includes a device substrate; a balance filter mounted on the device substrate; a bonding layer stacked on a certain area of the device substrate; a packaging substrate having a cavity formed over the balance filter, and combined with the device substrate by the bonding layer; a balun located on a certain area over the packaging substrate; and an insulator layer for passivating the balun. Accordingly, the present invention can reduce an element size and simplify a manufacturing process.
摘要翻译：提供一种其中安装有平衡 - 不平衡转换器的平衡滤波器封装芯片及其制造方法。平衡滤波器封装芯片包括器件基板; 安装在装置基板上的平衡过滤器; 层叠在所述器件基板的特定区域上的接合层; 封装基板，其具有形成在所述平衡滤波器上方的空腔，并且通过所述接合层与所述器件基板结合; 位于包装衬底上的某个区域上的平衡 - 不平衡转换器; 以及用于钝化平衡 - 不平衡变换器的绝缘体层。因此，本发明可以减小元件尺寸并简化制造工艺。

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