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    • 1. 发明授权
    • Combined interferometer/ellipsometer for measuring small spacings
    • 用于测量小间距的组合式干涉仪/椭偏仪
    • US5793480A
    • 1998-08-11
    • US719003
    • 1996-09-24
    • Christopher A. LaceyKenneth H. WomackCarlos DuranEd RossSemyon Nodelman
    • Christopher A. LaceyKenneth H. WomackCarlos DuranEd RossSemyon Nodelman
    • G01N21/21G01B9/02
    • G01N21/211
    • An apparatus and method for measuring the space between a transparent member such as a substrate, and reflective member such as a slider. The apparatus includes a first optical system which detects a first light beam that is reflected from the substrate and the slider. The reflected light is separated into four separate beams. The intensities of the beams are detected and utilized to determine a first stokes parameter, a second stokes parameter, a third stokes parameter and a fourth stokes parameter of the reflected light. The stokes parameters are used to compute the real index of refraction n, extinction coefficient k and the thickness of the space. The four stokes parameters account for any depolarized light that is reflected from the slider. The first optical system may have a photodetector which detects an image of the slider. The image provides multiple data points that can be used to calculate n, k and the thickness of the air gap without a retract routine. The apparatus may also have a second optical system which detects a second light beam reflected from the substrate and the slider. The second optical system can be used to dynamically measure a thickness of the space. In the combined system the first optical system may accurately measure the n and k of a slider area while the second optical system dynamically measures the thickness of the air gap.
    • 用于测量诸如基板的透明构件之间的空间以及诸如滑块的反射构件之间的空间的装置和方法。 该装置包括第一光学系统,其检测从基板和滑块反射的第一光束。 反射光分成四个独立的光束。 检测并利用光束的强度来确定反射光的第一斯托克斯参数,第二斯托克斯参数,第三斯托克斯参数和第四斯托克斯参数。 斯托克斯参数用于计算实际折射率n,消光系数k和空间厚度。 四个斯托克斯参数表示从滑块反射的任何去极化光。 第一光学系统可以具有检测滑块的图像的光电检测器。 图像提供了多个数据点,可用于计算n,k和气隙的厚度,而无需缩回程序。 该装置还可以具有检测从基板和滑块反射的第二光束的第二光学系统。 第二光学系统可用于动态测量空间的厚度。 在组合系统中,第一光学系统可以精确地测量滑块区域的n和k,而第二光学系统动态地测量气隙的厚度。