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    • 3. 发明授权
    • Method of forming semiconductor device having planarized wiring with
good thermal resistance
    • 形成具有良好热阻的平坦化布线的半导体器件的方法
    • US5705426A
    • 1998-01-06
    • US757501
    • 1996-11-27
    • Satoshi Hibino
    • Satoshi Hibino
    • H01L21/28H01L21/3205H01L21/768H01L23/52H01L23/522H01L23/532H01L29/43
    • H01L23/53223H01L2924/0002
    • A method of forming conductive wiring on a semiconductor substrate. A plurality of contact holes having different sizes are formed in an insulating film formed on the substrate. A first barrier metal layer is formed on the insulating film, and a tungsten layer is uniformly formed on the first barrier metal layer. The tungsten layer is etched back to form plug-shaped tungsten regions in small contact holes and tapered tungsten regions in large contact holes. The central area of the first barrier metal layer in the large contact hole is exposed. A second barrier metal layer is formed covering the plug-shaped tungsten region and the tapered tungsten region and the exposed first barrier metal layer and sandwiching the plug-shaped and tapered tungsten regions between the first and second barrier metal layers, preventing punch-through of Al atoms from an Al layer to be thereafter formed, into the substrate, even when the first barrier metal layer is damaged during etch-back.
    • 一种在半导体衬底上形成导电布线的方法。 在形成在基板上的绝缘膜中形成具有不同尺寸的多个接触孔。 在绝缘膜上形成第一阻挡金属层,在第一阻挡金属层上均匀地形成钨层。 钨层被回蚀刻以在大的接触孔中的小接触孔和锥形钨区形成塞状钨区。 暴露大接触孔中的第一阻挡金属层的中心区域。 形成第二阻挡金属层,覆盖插塞状钨区域和锥形钨区域以及暴露的第一阻挡金属层,并且将第一和第二阻挡金属层之间的塞状和锥形钨区域夹在中间,防止穿孔 即使当第一阻挡金属层在回蚀时被损坏时,即将形成Al Al的Al原子进入衬底。
    • 4. 发明申请
    • Magnetic sensor and manufacturing method therefor
    • 磁传感器及其制造方法
    • US20050063106A1
    • 2005-03-24
    • US10936748
    • 2004-09-09
    • Satoshi Hibino
    • Satoshi Hibino
    • G11B5/127G11B5/33G11B5/39
    • B82Y25/00B82Y10/00G11B5/3932G11B2005/3996
    • A magnetic sensor comprises a spin-valve type magnetoresistive element arranged on a substrate, wherein a bias magnetic layer made of a permanent magnet film is connected with both ends of the magnetoresistive element so as to detect the magnitude of a magnetic field. The bias magnetic layer is formed on an embedded layer made of a non-magnetic material, which comprises a thick first layer and a thin second layer that are sequentially formed and laminated together. The bias magnetic layer is composed of a CoCrPt alloy, and the thickness thereof ranges from 800 Å to 900 Å; the embedded layer is composed of Cr or a Cr alloy; the thickness of the first layer ranges from 2 nm to 10 nm. Thus, it is possible to freely set the combination of the coercive force and residual magnetism in the bias magnetic layer without changing the composition of a target.
    • 磁传感器包括布置在基板上的自旋阀型磁阻元件,其中由永磁体膜制成的偏磁层与磁阻元件的两端连接,以便检测磁场的大小。 偏置磁性层形成在由非磁性材料制成的嵌入层上,该非磁性材料包括依次形成并层叠在一起的厚的第一层和薄的第二层。 偏磁层由CoCrPt合金构成,其厚度范围为800〜900; 嵌入层由Cr或Cr合金组成; 第一层的厚度为2nm至10nm。 因此,可以在不改变目标的组成的情况下自由地设定偏磁层中的矫顽力和剩余磁性的组合。
    • 6. 发明授权
    • Wiring-forming method
    • 接线形成方法
    • US5776827A
    • 1998-07-07
    • US643044
    • 1996-05-02
    • Satoshi HibinoTetsuya Kuwajima
    • Satoshi HibinoTetsuya Kuwajima
    • H01L21/285H01L21/3213H01L21/768H01L21/44
    • H01L21/76865H01L21/2855H01L21/28556H01L21/32135H01L21/76843H01L21/76877
    • An insulating layer 6 is formed covering a lower level wiring layer 5. Contact hole 11 registered with the lower level wiring 5 is then formed in the insulating layer 6. An adhesion layer 12 is sputtered on the lower level wiring layer 5 and a whole surface of the third level insulating layer 6. Then, a blanket tungsten layer 13 is deposited on the adhesion layer 12. The whole surface of the blanket tungsten layer 13 is etched back until a small hollow gap is formed at the upper end portion of the contact hole 11, to leave the blanket tungsten layer 13 only in the inside of the contact hole 11. Thereafter, an Al alloy layer is reflow-sputtered on the whole surface of the insulating layer 6 and the inside of the contact holes at a comparatively low temperature to form an upper level wiring layer 15. The surface unevenness produced in etch-back process can be planarized. A wiring having a good coverage, a good quality of layer, and a flat surface can be formed.
    • 形成覆盖下层布线层5的绝缘层6.然后,在绝缘层6中形成与下层布线5配准的接触孔11.粘合层12溅射在下层布线层5上,整个表面 然后,在粘合层12上沉积一层覆盖钨层13.将覆盖钨层13的整个表面进行回蚀刻,直到在触点的上端部形成小的中空间隙 孔11,仅在接触孔11的内部留下覆盖层钨层13.之后,在绝缘层6的整个表面和接触孔的内部以相对低的速度回流溅射Al合金层 温度以形成上层布线层15.可以平面化回蚀处理中产生的表面凹凸。 可以形成具有良好覆盖率,良好质量的层和平坦表面的布线。
    • 8. 发明授权
    • Semiconductor device having planarized wiring with good thermal
resistance
    • 具有平坦化的具有良好热阻的布线的半导体器件
    • US5637924A
    • 1997-06-10
    • US494265
    • 1995-06-23
    • Satoshi Hibino
    • Satoshi Hibino
    • H01L21/28H01L21/3205H01L21/768H01L23/52H01L23/522H01L23/532H01L29/43H01L23/48H01L29/40
    • H01L23/53223H01L2924/0002
    • A plurality of contact holes having different sizes are formed in an insulating film formed on the substrate. A first barrier metal layer is formed on the insulating film, and a tungsten layer is uniformly formed on the first barrier metal layer. The tungsten layer is etched back to form plug-shaped tungsten regions in small contact holes and sloped tungsten regions in large contact holes. The central area of the first barrier metal layer in the large contact hole is exposed. A second barrier metal layer is formed covering the plug-shaped tungsten region and the tapered tungsten region and the exposed first barrier metal layer and sandwiching the plug-shaped and sloped tungsten regions between the first and second barrier metal layers, preventing pinch-through of Al atoms from an Al layer to be thereafter formed, into the substrate, even when the first barrier metal layer is damaged during etch-back.
    • 在形成在基板上的绝缘膜中形成具有不同尺寸的多个接触孔。 在绝缘膜上形成第一阻挡金属层,在第一阻挡金属层上均匀地形成钨层。 钨层被回蚀以在小接触孔和大接触孔中的倾斜钨区形成塞状钨区。 暴露大接触孔中的第一阻挡金属层的中心区域。 形成第二阻挡金属层,其覆盖塞状钨区域和锥形钨区域以及暴露的第一阻挡金属层,并且将第一和第二阻挡金属层之间的塞状和倾斜的钨区夹在第一和第二阻挡金属层之间, 即使当第一阻挡金属层在回蚀时被损坏时,即将形成Al Al的Al原子进入衬底。
    • 10. 发明申请
    • Magnetic sensor and manufacturing method therefor
    • 磁传感器及其制造方法
    • US20080138509A1
    • 2008-06-12
    • US11878608
    • 2007-07-25
    • Satoshi Hibino
    • Satoshi Hibino
    • B05D5/12C23C14/34
    • B82Y25/00B82Y10/00G11B5/3932G11B2005/3996
    • A magnetic sensor comprises a spin-valve type magnetoresistive element arranged on a substrate, wherein a bias magnetic layer made of a permanent magnet film is connected with both ends of the magnetoresistive element so as to detect the magnitude of a magnetic field. The bias magnetic layer is formed on an embedded layer made of a non-magnetic material, which comprises a thick first layer and a thin second layer that are sequentially formed and laminated together. The bias magnetic layer is composed of a CoCrPt alloy, and the thickness thereof ranges from 800 Å to 900 Å; the embedded layer is composed of Cr or a Cr alloy; the thickness of the first layer ranges from 2 nm to 10 nm. Thus, it is possible to freely set the combination of the coercive force and residual magnetism in the bias magnetic layer without changing the composition of a target.
    • 磁传感器包括布置在基板上的自旋阀型磁阻元件,其中由永磁体膜制成的偏磁层与磁阻元件的两端连接,以便检测磁场的大小。 偏置磁性层形成在由非磁性材料制成的嵌入层上,该非磁性材料包括依次形成并层叠在一起的厚的第一层和薄的第二层。 偏磁层由CoCrPt合金构成,其厚度范围为800〜900; 嵌入层由Cr或Cr合金组成; 第一层的厚度为2nm至10nm。 因此,可以在不改变目标的组成的情况下自由地设定偏磁层中的矫顽力和剩余磁性的组合。