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    • 3. 发明授权
    • Holding tray for substrate, substrate alignment system using the same and method thereof
    • 用于基板的保持托盘,使用其的基板对准系统及其方法
    • US08166641B2
    • 2012-05-01
    • US11325575
    • 2006-01-05
    • Sang-Jin HanKwan-Seop SongHee-Cheol KangSeok-Heon Jeong
    • Sang-Jin HanKwan-Seop SongHee-Cheol KangSeok-Heon Jeong
    • H01L21/68
    • H01L21/68728H01L21/68735H01L21/68778Y10S414/136Y10S414/141Y10T29/53265
    • Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process.The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame.The holding tray for substrate according to the present invention, the substrate alignment system using the same, and the method thereof are useful to accomplish high-precision alignment and conduct a stable deposition process due to the stable vertical arrangement of the substrate during the deposition process.
    • 公开了一种保持托盘,使用其的基板对准系统及其方法。 更具体地,本发明涉及一种能够实现高精度对准并进行稳定沉积的基板用保持托盘。 保持装置包括在基板的至少一侧,以在真空过程中将基板竖直保持并支撑在保持托盘的平坦表面上以保持和支撑基板。 根据本发明的保持托盘,使用其的基板对准系统及其方法包括其上形成沉积物的基板,形成为接收基板的框架,形成为接收框架的托盘,并且至少 一个保持装置被形成为将基板保持在框架上。 根据本发明的基板用保持托盘,使用其的基板对准系统及其方法可用于实现高精度对准并且由于在沉积工艺期间基板的稳定垂直排列而进行稳定的沉积工艺 。
    • 4. 发明授权
    • Apparatus for preparing hydrazo-dicarbonamide using urea as starting material
    • 使用尿素作为起始原料制备二氢萘二甲酰胺的装置
    • US07422727B2
    • 2008-09-09
    • US11747596
    • 2007-05-11
    • Chun-hyuk LeeSang-Jin Han
    • Chun-hyuk LeeSang-Jin Han
    • B01J8/04B01J8/00B01J10/00C07C281/00
    • C07C281/06
    • The present invention relates to a method and apparatus for preparing hydrazodicarbonamide using urea as starting material economically and environmentally desirably. The apparatus includes a pyrolysis furnace to obtain biuret and ammonia by pyrolyzing urea; a recrystallization reactor to purify the biuret obtained from the pyrolysis furnace; a first reactor to obtain an metal monohalobiuret salt by reacting the biuret with metal hypohalogen compound or with halogen and base; a second reactor to synthesize the hydrazodicarbonamide by reacting the monohalobiuret metal salt with ammonia; and an ammonia evaporator to separate the excess ammonia from hydrazodicarbonamide and to supply the separated ammonia to an ammonia concentrator.
    • 本发明涉及一种以经济和环保方式使用尿素作为原料制备肼基二酰胺的方法和装置。 该装置包括热解炉,通过热解尿素获得缩二脲和氨; 用于纯化从热解炉获得的缩二脲的再结晶反应器; 通过使缩二脲与金属低卤化合物或与卤素和碱反应获得金属单卤代硼酸盐的第一反应器; 第二反应器,通过使单卤代硼烷金属盐与氨反应合成肼二酰胺; 和氨蒸发器,以将过量的氨与肼基二酰胺分离,并将分离的氨供应到氨浓缩器。