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    • 5. 发明授权
    • Semiconductor device having no cracks in one or more layers underlying a metal line layer
    • 在金属线层下面的一个或多个层中没有裂纹的半导体器件
    • US07847403B2
    • 2010-12-07
    • US11806562
    • 2007-06-01
    • Sang Hyun YiYoung Nam Kim
    • Sang Hyun YiYoung Nam Kim
    • H01L23/48
    • H01L23/528H01L2924/0002H01L2924/00
    • A semiconductor device and a method of manufacturing the same which yields high reliability and a high manufacturing yield. The semiconductor device includes a metal line layer having a plurality of metal line patterns spaced apart from each other, and at least one underlying layer under the metal line layer, wherein the space between two adjacent metal line patterns has a sufficient width to prevent a crack from occurring in one or more of the underlying layers. The cracking of an underlying layer may also be prevented by providing a slit in a direction parallel to the space between two adjacent metal line patterns at a sufficient distance from the space between the two adjacent metal line patterns.
    • 一种半导体器件及其制造方法,其产生高可靠性和高制造成品率。 半导体器件包括具有彼此间隔开的多个金属线图案的金属线层和金属线层下面的至少一个下层,其中两个相邻金属线图案之间的空间具有足够的宽度以防止裂纹 发生在一个或多个下层。 也可以通过在与两个相邻的金属线图案之间的空间足够的距离处在与两个相邻的金属线图案之间的空间平行的方向上设置狭缝来防止下层的破裂。