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1. 发明申请

US20160084922A1 MAGNETIC FIELD SENSOR 有权
标题翻译：磁场传感器
公开(公告)号：US20160084922A1
公开(公告)日：2016-03-24
申请号：US14662891
申请日：2015-03-19
申请人： SAGATEK CO.,LTD.
发明人： Kuei-Ann WEN , Tai-Wei CHIANG
IPC分类号： G01R33/028 , G01R33/02
CPC分类号： G01R33/0286 , G01R33/0206
摘要： A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.
摘要翻译：磁场传感器，包括悬挂质量块，一组Y方向位移传感器，一组Z方向位移传感器和电源; 其中质量块，Y方向位移传感器和Z方向位移传感器分别包括多个金属层和两个金属层之间的介电层。在质量块中，对应于Y方向位移传感器的区域和对应于Z方向位移传感器的区域分别包括通过通孔连接的至少两个金属层。 Y方向位移传感器包括两个电极，每个电极包括通过通孔连接的至少两个金属层; Z方向位移传感器包括两个电极，每个电极包括通过通孔连接的至少两个金属层; 并且电源提供在X或Y方向上选择性地流过质量块的电流。

2. 发明申请

US20160084921A1 RESONANT MAGNETIC FIELD SENSOR 有权
标题翻译：谐振磁场传感器
公开(公告)号：US20160084921A1
公开(公告)日：2016-03-24
申请号：US14662786
申请日：2015-03-19
申请人： SAGATEK CO.,LTD.
发明人： Kuei-Ann WEN , Chia-Feng CHANG
IPC分类号： G01R33/028
CPC分类号： G01R33/028 , G01R33/0286 , G01R33/038
摘要： Disclosed is a resonant magnetic field sensor, comprising a detector structure including a mass block and displacement detection electrodes; capacitance to voltage converter and amplifier to convert detection signals of the detection electrodes into voltage signals, as output signals of the magnetic field sensor; and a vibration driving circuit to provide the output signals to the mass block in the form of a current, to drive the mass block to vibrate. The vibration driving circuit may be a comparator.
摘要翻译：公开了一种谐振磁场传感器，包括：检测器结构，包括质量块和位移检测电极; 电容电压转换器和放大器，将检测电极的检测信号转换为电压信号，作为磁场传感器的输出信号; 以及振动驱动电路，以电流的形式向质量块提供输出信号，以驱动质量块振动。振动驱动电路可以是比较器。

3. 发明申请

US20160084871A1 DUAL-FUNCTIONAL RESONANT MAGNETIC FIELD SENSOR 审中-公开
标题翻译：双功能谐振磁场传感器
公开(公告)号：US20160084871A1
公开(公告)日：2016-03-24
申请号：US14698392
申请日：2015-04-28
申请人： SAGATEK CO.,LTD.
发明人： Kuei Ann WEN , Chia Feng CHANG
IPC分类号： G01P15/105
CPC分类号： G01P15/097 , G01P15/125 , G01P2015/0814 , G01R33/0286
摘要： Disclosed is a dual-functional resonant based magnetic field sensor that functions as magnetic field sensor and accelerometer, respectively, comprising a sensor structure including a mass block and motion sensor electrodes, capacitance to voltage converter and amplifier to convert sensing signals of the sensor electrodes into voltage, as output signals of the magnetic field sensor, a driving circuit to provide the output signals to the mass block in the form of current, to drive the mass block to vibrate, and a selection circuit to select measurement of magnetic field or acceleration. The driving circuit may be a comparator. The selection circuit may be replaced by a filter to select frequency bands of the output signals of the converter, for simultaneously providing signals representing magnetic field and acceleration, respectively.
摘要翻译：公开了一种基于双功能谐振的磁场传感器，其分别用作磁场传感器和加速度计，其包括传感器结构，其包括质量块和运动传感器电极，电容到电压转换器和放大器，以将传感器电极的感测信号转换成电压作为磁场传感器的输出信号，以电流形式向质量块提供输出信号的驱动电路，以驱动质量块振动，以及选择电路以选择磁场或加速度的测量。驱动电路可以是比较器。选择电路可以由滤波器代替以选择转换器的输出信号的频带，以分别同时提供表示磁场和加速度的信号。

4. 发明申请

US20140082954A1 Multilayered Liquid Capacitive Micro Inclinometer 有权
标题翻译：多层液体电容式微型倾角仪
公开(公告)号：US20140082954A1
公开(公告)日：2014-03-27
申请号：US14039018
申请日：2013-09-27
申请人： Sagatek Co., Ltd.
发明人： Jung-Hsiang Chen , Cheng-Szu Chen , Bo-Ting Chen
IPC分类号： G01C9/20
CPC分类号： G01C9/20
摘要： The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.
摘要翻译：本发明涉及一种液体多层电容式微型倾斜仪，其包括至少两对差动电极，每对差示电极对位于同一平面内; 至少一个公共电极，其中一部分位于每对差动电极的平面内。差分电极和公共电极设置在其中填充浸渍液体的密封室中。差分电极的形状形成圆形平面的扇形。倾斜计还可以集成读取电路。本发明还公开了本发明的倾斜仪的制备方法。

5. 发明授权

US09506777B2 Micro-electromechanical apparatus having signal attenuation-proof function, and manufacturing method and signal attenuation-proof method thereof 有权
标题翻译：具有信号衰减功能的微机电装置及其制造方法和信号衰减防护方法
公开(公告)号：US09506777B2
公开(公告)日：2016-11-29
申请号：US14885656
申请日：2015-10-16
申请人： Sagatek Co., Ltd.
发明人： Kelvin Yi-Tse Lai , Jung-Hsiang Chen , Cheng-Szu Chen , Shu-Yi Weng
IPC分类号： G01D5/24 , B81B7/00 , B81C1/00
CPC分类号： G01D5/24 , B81B7/008 , B81B2201/0235 , B81B2201/033 , B81B2207/012 , B81C1/00698
摘要： A micro-electromechanical apparatus having a signal attenuation-proof function, and a manufacturing method and a signal attenuation-proof method thereof are disclosed. The micro-electromechanical apparatus includes a substrate, an insulation layer, and a sensing unit. The substrate has a doped region in which a majority of conductive carriers have the same polarity as an electronic signal. The insulation layer is located on the substrate, and the sensing unit is located above the insulation layer and forms the electronic signal when sensing a force.
摘要翻译：公开了一种具有信号衰减防御功能的微机电装置及其制造方法和信号衰减防止方法。微机电装置包括基板，绝缘层和感测单元。衬底具有掺杂区域，其中绝大多数导电载体具有与电子信号相同的极性。绝缘层位于基板上，感测单元位于绝缘层上方，并在感测到力时形成电子信号。

6. 发明申请

US20160041009A1 MICRO-ELECTROMECHANICAL APPARATUS HAVING SIGNAL ATTENUATION-PROOF FUNCTION, AND MANUFACTURING METHOD AND SIGNAL ATTENUATION-PROOF METHOD THEREOF 有权
标题翻译：具有信号衰减功能的微机电装置及其制造方法及其信号衰减验证方法
公开(公告)号：US20160041009A1
公开(公告)日：2016-02-11
申请号：US14885656
申请日：2015-10-16
申请人： Sagatek Co., Ltd.
发明人： Kelvin Yi-Tse LAI , Jung-Hsiang CHEN , Cheng-Szu CHEN , Shu-Yi WENG
IPC分类号： G01D5/24 , B81C1/00 , B81B7/02
CPC分类号： G01D5/24 , B81B7/008 , B81B2201/0235 , B81B2201/033 , B81B2207/012 , B81C1/00698
摘要： A micro-electromechanical apparatus having a signal attenuation-proof function, and a manufacturing method and a signal attenuation-proof method thereof are disclosed. The micro-electromechanical apparatus includes a substrate, an insulation layer, and a sensing unit. The substrate has a doped region in which a majority of conductive carriers have the same polarity as an electronic signal. The insulation layer is located on the substrate, and the sensing unit is located above the insulation layer and forms the electronic signal when sensing a force.
摘要翻译：公开了一种具有信号衰减防御功能的微机电装置及其制造方法和信号衰减防止方法。微机电装置包括基板，绝缘层和感测单元。衬底具有掺杂区域，其中绝大多数导电载体具有与电子信号相同的极性。绝缘层位于基板上，感测单元位于绝缘层上方，并在感测到力时形成电子信号。

7. 发明申请

US20140082953A1 Liquid Capacitive Micro Inclinometer 有权
标题翻译：液体电容微倾角仪
公开(公告)号：US20140082953A1
公开(公告)日：2014-03-27
申请号：US14038909
申请日：2013-09-27
申请人： Sagatek Co., Ltd.
发明人： Jung-Hsiang Chen , Cheng-Szu Chen , Bo-Ting Chen
IPC分类号： G01C9/20 , G01C25/00
CPC分类号： G01C9/20 , G01C25/00 , Y10T29/49155
摘要： The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.
摘要翻译：液体电容式微型倾斜仪技术领域本发明涉及一种液体电容微型倾斜仪，其包括一对差分电极和公共电极，全部在密封室中形成在同一平面内。浸入液体被填充在密封室中。差分电极的形状形成圆形平面的扇形。倾斜计还可以集成读取电路。本发明还公开了本发明的倾斜仪的制备方法。

8. 发明授权

US09689933B2 Magnetic field sensor 有权
公开(公告)号：US09689933B2
公开(公告)日：2017-06-27
申请号：US14662891
申请日：2015-03-19
申请人： SAGATEK CO., LTD.
发明人： Kuei-Ann Wen , Tai-Wei Chiang
IPC分类号： G01R27/26 , G01R33/00 , G01R33/02 , G01R33/028 , G01P15/135 , G01P15/03
CPC分类号： G01R33/0286 , G01R33/0206
摘要： A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.

9. 发明授权

US09086276B2 Multilayered liquid capacitive micro inclinometer 有权
标题翻译：多层液体电容式微型倾斜仪
公开(公告)号：US09086276B2
公开(公告)日：2015-07-21
申请号：US14039018
申请日：2013-09-27
申请人： Sagatek Co., Ltd.
发明人： Jung-Hsiang Chen , Cheng-Szu Chen , Bo-Ting Chen
IPC分类号： G01C9/06 , G01C9/20
CPC分类号： G01C9/20
摘要： The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.
摘要翻译：本发明涉及一种液体多层电容式微型倾斜仪，其包括至少两对差动电极，每对差示电极对位于同一平面内; 至少一个公共电极，其中一部分位于每对差动电极的平面内。差分电极和公共电极设置在其中填充浸渍液体的密封室中。差分电极的形状形成圆形平面的扇形。倾斜计还可以集成读取电路。本发明还公开了本发明的倾斜仪的制备方法。

10. 发明授权

US09074885B2 Liquid capacitive micro inclinometer 有权
标题翻译：液体电容微倾角仪
公开(公告)号：US09074885B2
公开(公告)日：2015-07-07
申请号：US14038909
申请日：2013-09-27
申请人： Sagatek Co., Ltd.
发明人： Jung-Hsiang Chen , Cheng-Szu Chen , Bo-Ting Chen
IPC分类号： G01C9/20 , G01C25/00
CPC分类号： G01C9/20 , G01C25/00 , Y10T29/49155
摘要： The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.
摘要翻译：液体电容式微型倾斜仪技术领域本发明涉及一种液体电容微型倾斜仪，其包括一对差分电极和公共电极，全部在密封室中形成在同一平面内。浸入液体被填充在密封室中。差分电极的形状形成圆形平面的扇形。倾斜计还可以集成读取电路。本发明还公开了本发明的倾斜仪的制备方法。

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