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1. 发明授权

US10310010B2 Probe apparatus and probe method 有权
公开(公告)号：US10310010B2
公开(公告)日：2019-06-04
申请号：US14957459
申请日：2015-12-02
申请人： TOKYO ELECTRON LIMITED , SEIWA OPTICAL CO., LTD.
发明人： Muneaki Tamura , Shinji Akaike , Kenta Saiki , Kazuhiko Koshimizu , Isao Okazaki , Mitsuya Kawatsuki , Kiyoshi Tsuda
IPC分类号： G01R31/02 , G01R31/28 , G01R1/067 , G01R35/00
摘要： A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.

2. 发明申请

US20160161553A1 PROBE APPARATUS AND PROBE METHOD 审中-公开
标题翻译：探测器和探头方法
公开(公告)号：US20160161553A1
公开(公告)日：2016-06-09
申请号：US14957459
申请日：2015-12-02
申请人： TOKYO ELECTRON LIMITED , SEIWA OPTICAL CO., LTD.
发明人： Muneaki TAMURA , Shinji AKAIKE , Kenta SAIKI , Kazuhiko KOSHIMIZU , Isao OKAZAKI , Mitsuya KAWATSUKI , Kiyoshi TSUDA
IPC分类号： G01R31/28
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.
摘要翻译：探针装置包括台，第一和第二成像装置，第一和第二成像光学单元和投影光学单元。舞台可以在水平和垂直方向上移动。第一成像装置拾取与形成在基板的表面上的装置的电极接触的探针的图像。第一和第二成像光学单元包括分别通过使用第一和第二成像装置执行图像拾取的光学系统。第二成像装置拾取保持在舞台上的电极的图像。投影光学单元包括在第一和第二成像装置的位置对准中使用的光学对象标记同时投影到第一和第二成像装置的每个图像形成单元上的光学系统。

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