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1. 发明授权

US08912031B2 Electronic device, electronic apparatus, and method of manufacturing electronic device 有权
标题翻译：电子设备，电子设备和制造电子设备的方法
公开(公告)号：US08912031B2
公开(公告)日：2014-12-16
申请号：US13306493
申请日：2011-11-29
申请人： Yoko Kanemoto , Ryuji Kihara
发明人： Yoko Kanemoto , Ryuji Kihara
IPC分类号： H01L21/00 , B81C1/00
CPC分类号： B81C1/00801 , B81B2201/0271 , B81B2207/07 , B81C2201/053 , Y10T29/49165
摘要： An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.
摘要翻译：电子设备包括：振动器，设置在基板上的空腔内并电驱动; 封闭壁，其具有导电性，并且将空腔从围绕空腔圆周的绝缘层分开; 与振动器连接并穿透封闭壁的第一布线和第二布线; 以及设置在所述第一布线和所述第二布线穿过所述封闭壁的位置处的液体流动防止部，以防止将所述绝缘层从所述空腔朝向所述绝缘层溶解的蚀刻剂流动，并且将所述第一布线和所述第二布线与所述封装壁。

2. 发明授权

US08305152B2 MEMS oscillator and method of manufacturing thereof 有权
标题翻译： MEMS振荡器及其制造方法
公开(公告)号：US08305152B2
公开(公告)日：2012-11-06
申请号：US12974258
申请日：2010-12-21
申请人： Toru Watanabe , Shogo Inaba , Ryuji Kihara
发明人： Toru Watanabe , Shogo Inaba , Ryuji Kihara
IPC分类号： H03B5/30 , H03H9/205
CPC分类号： H03B5/30 , H03H3/0072 , H03H9/2457
摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.
摘要翻译：振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

3. 发明申请

US20120256692A1 OSCILLATOR 审中-公开
标题翻译：振荡器
公开(公告)号：US20120256692A1
公开(公告)日：2012-10-11
申请号：US13439362
申请日：2012-04-04
申请人： Aritsugu YAJIMA , Shogo INABA , Ryuji KIHARA
发明人： Aritsugu YAJIMA , Shogo INABA , Ryuji KIHARA
IPC分类号： H03L7/083
CPC分类号： H03B5/30 , H03B2200/0022 , H03L7/099 , H03L7/183
摘要： An oscillator includes: a substrate; a reference oscillation circuit including a first MEMS oscillator disposed above the substrate, the reference oscillation circuit outputting a first oscillation signal; at least one voltage-controlled oscillation circuit including a second MEMS oscillator disposed above the substrate, the oscillation frequency of the at least one voltage-controlled oscillation circuit being controlled based on a control signal, the at least one voltage-controlled oscillation circuit outputting a second oscillation signal; a frequency division circuit dividing the frequency of the second oscillation signal and outputting a frequency division signal; and a phase-comparison circuit outputting the control signal based on a phase difference between the frequency division signal and the first oscillation signal, wherein the first MEMS oscillator and the second MEMS oscillator each have a first electrode and a second electrode, the second electrode has a movable part disposed so as to face the first electrode.
摘要翻译：振荡器包括：基板; 参考振荡电路，包括设置在所述衬底上方的第一MEMS振荡器，所述参考振荡电路输出第一振荡信号; 至少一个压控振荡电路，其包括设置在所述衬底上方的第二MEMS振荡器，所述至少一个压控振荡电路的振荡频率基于控制信号进行控制，所述至少一个压控振荡电路输出第二振荡信号; 分频电路，分频第二振荡信号的频率并输出分频信号; 以及相位比较电路，其基于所述分频信号和所述第一振荡信号之间的相位差输出所述控制信号，其中，所述第一MEMS振荡器和所述第二MEMS振荡器各自具有第一电极和第二电极，所述第二电极具有以与第一电极相对的方式设置的可动部。

4. 发明授权

US08847708B2 MEMS vibrator and oscillator 有权
标题翻译： MEMS振动器和振荡器
公开(公告)号：US08847708B2
公开(公告)日：2014-09-30
申请号：US13431354
申请日：2012-03-27
申请人： Ryuji Kihara
发明人： Ryuji Kihara
IPC分类号： H03H9/24 , H03H9/125 , H03H9/52 , H03H3/007
CPC分类号： H03H3/0072 , H03H9/2457
摘要： A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.
摘要翻译：根据本发明的MEMS振动器包括：固定到基板表面的第一电极; 以及第二电极，其具有包括面对第一电极的第一面的第二面的光束部分和支撑光束部分并固定到基板的表面的支撑部分。梁部分具有第一部分，其在梁部分的第一面的法线方向上的长度朝向梁部分的末端单调减小。

5. 发明申请

US20120146736A1 MEMS VIBRATOR, OSCILLATOR, AND METHOD FOR MANUFACTURING MEMS VIBRATOR 有权
标题翻译： MEMS振动器，振荡器和制造MEMS振动器的方法
公开(公告)号：US20120146736A1
公开(公告)日：2012-06-14
申请号：US13307336
申请日：2011-11-30
申请人： Ryuji KIHARA
发明人： Ryuji KIHARA
IPC分类号： H03B5/30 , H01L21/28 , H02N11/00
CPC分类号： H03H9/2457 , B81B2201/0271 , B81B2203/019 , B81C1/0015 , H03H3/0076 , H03H2009/02291 , H03H2009/02511
摘要： A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.
摘要翻译：根据本发明的MEMS谐振器包括：基板; 形成在所述衬底上的第一电极; 以及第二电极，其具有形成在所述基板上方的支撑部分和梁部分，所述梁部分由所述支撑部分支撑并且布置在所述第一电极之上，其中所述梁部分在平面图中具有所述宽度单调减小的形状在与第一电极重叠的区域中从支撑部朝向梁部的尖端的方向。

6. 发明申请

US20120134121A1 ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE 有权
标题翻译：电子设备，电子设备和制造电子设备的方法
公开(公告)号：US20120134121A1
公开(公告)日：2012-05-31
申请号：US13306493
申请日：2011-11-29
申请人： Yoko KANEMOTO , Ryuji KIHARA
发明人： Yoko KANEMOTO , Ryuji KIHARA
IPC分类号： H05K1/18 , H05K3/10 , H05K1/16
CPC分类号： B81C1/00801 , B81B2201/0271 , B81B2207/07 , B81C2201/053 , Y10T29/49165
摘要： An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.
摘要翻译：电子设备包括：振动器，设置在基板上的空腔内并电驱动; 封闭壁，其具有导电性，并且将空腔从围绕空腔圆周的绝缘层分开; 与振动器连接并穿透封闭壁的第一布线和第二布线; 以及设置在所述第一布线和所述第二布线穿过所述封闭壁的位置处的液体流动防止部，以防止将所述绝缘层从所述空腔朝向所述绝缘层溶解的蚀刻剂流动，并且将所述第一布线和所述第二布线与所述封装壁。

7. 发明申请

US20110148537A1 MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF 有权
标题翻译： MEMS振荡器及其制造方法
公开(公告)号：US20110148537A1
公开(公告)日：2011-06-23
申请号：US12974258
申请日：2010-12-21
申请人： Toru WATANABE , Shogo INABA , Ryuji KIHARA
发明人： Toru WATANABE , Shogo INABA , Ryuji KIHARA
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H3/0072 , H03H9/2457
摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.
摘要翻译：振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

8. 发明申请

US20050151442A1 Micromechanical electrostatic resonator 有权
标题翻译：微机静电谐振器
公开(公告)号：US20050151442A1
公开(公告)日：2005-07-14
申请号：US10990411
申请日：2004-11-18
申请人： Ryuji Kihara , Takuya Nakajima , Makoto Furuhata
发明人： Ryuji Kihara , Takuya Nakajima , Makoto Furuhata
IPC分类号： B81B3/00 , B81C1/00 , B81C3/00 , H02N1/00 , H02N2/00 , H03H3/007 , H03H9/00 , H03H9/02 , H03H9/10 , H03H9/24
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/1057 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02503 , H03H2009/02519
摘要： Exemplary embodiments of the invention provide a micromechanical electrostatic resonator which designs high frequency, increases a ratio of output voltage to input voltage, and designs low drive voltage or reduced power consumption. A micromechanical electrostatic resonator of exemplary embodiments includes a plate-shaped vibration body, a pair of electrodes arranged oppositely to each other at both sides of the vibration body with a gap from an outer circumferential portion of the vibration body, a feeding device to apply in-phase alternating-current power to the pair of electrodes, and a detecting device to obtain an output corresponding to a change in capacitance between the vibration body and the electrodes. The planar shape of the vibration body takes a shape having a curved outline which comprises a neck portion.
摘要翻译：本发明的示例性实施例提供一种微机械静电谐振器，其设计高频率，增加输出电压与输入电压的比率，并且设计低驱动电压或降低功耗。示例性实施例的微机械静电谐振器包括板状振动体，在振动体两侧彼此相对布置的一对电极，与振动体的外周部分具有间隙，施加在相对于该对电极的相位交流电力，以及检测装置，以获得与振动体和电极之间的电容变化相对应的输出。振动体的平面形状具有包括颈部的弯曲轮廓的形状。

9. 发明申请

US20120249253A1 MEMS VIBRATOR AND OSCILLATOR 有权
标题翻译： MEMS振动器和振荡器
公开(公告)号：US20120249253A1
公开(公告)日：2012-10-04
申请号：US13431354
申请日：2012-03-27
申请人： Ryuji KIHARA
发明人： Ryuji KIHARA
IPC分类号： H03B5/30
CPC分类号： H03H3/0072 , H03H9/2457
摘要： A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.
摘要翻译：根据本发明的MEMS振动器包括：固定到基板表面的第一电极; 以及第二电极，其具有包括面对第一电极的第一面的第二面的光束部分和支撑光束部分并固定到基板的表面的支撑部分。梁部分具有第一部分，其在梁部分的第一面的法线方向上的长度朝向梁部分的尖端单调减小。

10. 发明申请

US20110306153A1 METHOD OF MANUFACTURING MEMS DEVICE 审中-公开
标题翻译：制造MEMS器件的方法
公开(公告)号：US20110306153A1
公开(公告)日：2011-12-15
申请号：US13215468
申请日：2011-08-23
申请人： Ryuji KIHARA , Shogo INABA
发明人： Ryuji KIHARA , Shogo INABA
IPC分类号： H01L21/66 , H01L21/00
CPC分类号： H03H3/0077 , H03H9/2457 , H03H2009/02496 , H03H2009/02511
摘要： A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.
摘要翻译：一种制造MEMS器件的方法包括：在基板上形成具有MEMS结构的覆盖结构和位于MEMS结构的外围并向外部敞开的中空部分; 并且通过从外部向MEMS结构的外围提供蚀刻气体，在气相中对MEMS结构进行表面蚀刻。

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