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1. 发明授权

US5790752A Efficient in-line fluid heater 失效
标题翻译：高效的在线流体加热器
公开(公告)号：US5790752A
公开(公告)日：1998-08-04
申请号：US575408
申请日：1995-12-20
申请人： Noah L. Anglin , Roy J. Machamer , Stanley J. Hludzinski , Robert G. Garber
发明人： Noah L. Anglin , Roy J. Machamer , Stanley J. Hludzinski , Robert G. Garber
IPC分类号： F24H1/10 , H05B1/02 , H05B3/00
CPC分类号： H05B1/0244 , F24H1/102 , H05B3/0047
摘要： A highly efficient in-line fluid heater is suitable for heating ultra-pure fluids. Preferably, the heater can be used for heating various fluids, including water, as part of a "wet bench" system used in a wafer processing fabrication facility for the semi-conductor industry. Many other uses for this in-line heater can be envisioned; e.g., water industry, gas processing, and any other use requiring an ultra-clean, highly efficient, non-contact method of raising the temperature of various liquids and gases. The preferred in-line heater utilizes one or more elongated lamps that generate IR radiation as the heating elements. A vessel is provided through which the fluid to be heated is passed. Typically, the vessel is a tube. The tube is preferably a straight single diameter tube, but can be formed in any convenient shape. For ultra-pure fluids, the vessel is formed of an inert or non-reactive material such as quartz. Preferably, the vessel is transparent to the IR radiation generated by the lamps. A chamber surrounds the lamps and the vessel. The interior surface of the chamber is made of a highly efficient reflecting material, preferably gold. The chamber is configured to have an integrally formed elongated parabolic reflector, one for each lamp to reflect radiation from the lamp toward the vessel. Each lamp is located at the focal point of its respective parabolic reflector. For systems having more than one lamp, the lamps are proportionally located around the inside periphery of the chamber. Preferably, the parabolic reflectors are sufficiently deep that radiation from one lamp cannot impinge directly onto any other lamp, thereby avoiding heating the lamps.
摘要翻译：高效的在线流体加热器适用于加热超纯液体。优选地，加热器可用于加热包括水在内的各种流体，作为用于半导体工业的晶片加工制造设备中使用的“湿式台”系统的一部分。可以设想这种在线加热器的许多其他用途; 例如水工业，气体处理以及需要超清洁，高效，非接触的提高各种液体和气体的温度的方法的任何其它用途。优选的在线加热器利用一个或多个生成IR辐射的细长灯作为加热元件。提供通过待加热流体的容器。通常，容器是管。管优选为直的单直径管，但可以以任何方便的形状形成。对于超纯流体，容器由惰性或非反应性材料如石英形成。优选地，容器对于由灯产生的IR辐射是透明的。一个室围绕灯和容器。室的内表面由高效的反射材料制成，优选为金。室被配置为具有整体形成的细长抛物面反射器，每个灯用于将灯的辐射反射到容器。每个灯位于其相应抛物面反射器的焦点处。对于具有多于一个灯的系统，灯按比例地位于室的内周边周围。优选地，抛物面反射器足够深，来自一个灯的辐射不能直接撞击到任何其他灯上，从而避免加热灯。

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