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    • 3. 发明授权
    • Super high frequency oscillator/resonator
    • 超高频振荡器/谐振器
    • US5023503A
    • 1991-06-11
    • US460454
    • 1990-01-03
    • Ronald LeggeCurtis D. Moyer
    • Ronald LeggeCurtis D. Moyer
    • H03B5/30H03H3/007H03H9/05H03H9/17H03H9/24H03H9/25H04R17/10
    • H03H9/17
    • A method of filtering an AC signal using a piezoelectric beam is provided. A piezoelectric film is formed on a mechanical support and a portion of the piezoelectric film forms a beam which extends beyond the mechanical support so that a cavity is formed underneath the beam, and the beam is free to vibrate in the cavity at a resonant frequency when an acoustic wave is propagated in the piezoelectric layer.A depletion region is formed under a Schottky contact which serves as a drive electrode. An unfiltered AC signal is coupled to the drive electrode thereby establishing an acoustic wave when the unfiltered AC signal comprises a component at the resonant frequency. Surface charge on the piezoelectric film resulting from vibration of the beam allows the resonant frequency component of the unfiltered AC signal to pass through the depletion region. Alternatively, the resonant frequency component can be passed by a tunnel current through the cavity.
    • 提供了使用压电束对AC信号进行滤波的方法。 在机械支架上形成压电薄膜,并且压电薄膜的一部分形成一个延伸超过机械支架的光束,从而在光束的下方形成空腔,并且光束以谐振频率自由地在空腔中振动, 声波在压电层中传播。 在用作驱动电极的肖特基接触下形成耗尽区。 未过滤的AC信号耦合到驱动电极,从而当未滤波的AC信号包括谐振频率处的分量时建立声波。 由光束的振动导致的压电膜上的表面电荷允许未滤波的AC信号的谐振频率分量通过耗尽区。 或者,谐振频率分量可以通过隧道电流通过空腔。