专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20130215672A1 MAGNETORESISTIVE LOGIC CELL AND METHOD OF USE 有权
标题翻译：磁性逻辑单元及其使用方法
公开(公告)号：US20130215672A1
公开(公告)日：2013-08-22
申请号：US13402123
申请日：2012-02-22
申请人： Yuchen Zhou , Zihui Wang , Yiming Huai , Yadav Ranjan , Roger K. Malmhall
发明人： Yuchen Zhou , Zihui Wang , Yiming Huai , Yadav Ranjan , Roger K. Malmhall
IPC分类号： G11C11/16
CPC分类号： G11C11/00 , G11C11/161 , G11C11/1673 , H01L27/222 , H01L43/08
摘要： A magnetoresistive logic cell (MRLC) is described that includes two MTJs in series that share a common free layer (CFL). The relative magnetization orientations of the CFL and the switchable reference layer (SRL) in MTJ-1 dominate the overall resistance of the MRLC without regard to the fixed magnetization orientation of the nonswitchable reference layer in MTJ-2. The high resistance state of the MRLC occurs when the switchable reference and common free layers have opposite magnetization orientations. The low resistance state occurs when the orientations are the same. This behavior allows the MRLC to be used as a logical comparator. The CFL is switched by STT effect by application of selected relatively short voltage pulses that do not switch the SRL. The SRL is switched with reference to the CFL by a voltage effect generated by a selected longer voltage pulse that does not switch the CFL.
摘要翻译：描述了包含共享共同自由层（CFL）的两个串联MTJ的磁阻逻辑单元（MRLC）。 MTJ-1中CFL和可切换参考层（SRL）的相对磁化取向主导了MRLC的总体电阻，而不考虑MTJ-2中不可切换参考层的固定磁化方向。当可切换参考和公共自由层具有相反的磁化方向时，MRLC的高电阻状态发生。当取向相同时，发生低电阻状态。此行为允许将MRLC用作逻辑比较器。通过施加不切换SRL的选定的相对较短的电压脉冲，通过STT效应来切换CFL。通过由不会切换CFL的选定的较长电压脉冲产生的电压效应，SRL将根据CFL进行切换。

2. 发明授权

US07069569B2 Near-field optical head system with integrated slider and laser 失效
标题翻译：具有集成滑块和激光器的近场光学头系统
公开(公告)号：US07069569B2
公开(公告)日：2006-06-27
申请号：US10131531
申请日：2002-04-23
申请人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
发明人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
IPC分类号： G11B7/00 , G11B15/64 , G11B17/32
CPC分类号： H01S5/18311 , G11B7/122 , G11B7/22 , H01S5/02276 , H01S5/02284 , H01S5/0261 , H01S5/0425 , H01S2301/176
摘要： A near-field optical system having one or more solid state lasers and an aerodynamically shaped slider which comprise a single integrated, monolithic device fabricated from the same base semiconductor material. The monolithic optical head can be quickly and easily attached to the read arm of an optical read/write device without requiring attachment of separate laser elements, and without micropositioning or use of optical microscopy for positioning the lasers. The optical head comprising a single semiconductor substrate including a first region which defines a slider having an air bearing surface, and at least one second, laser region which defines a diode laser, with the diode laser having an emission face which is substantially co-planar with the air bearing surface. The semiconductor substrate preferably includes an active layer, a p-clad layer or reflective layer adjacent a first side of the active region, an n-clad layer or reflective layer adjacent a second side of the active layer, and an n-semiconductor layer adjacent the n-clad layer. A slider region of the semiconductor substrate includes an air bearing surface, adjacent the p-clad layer, which is aerodynamically structured and configured to define a slider. The integral lasers include a p-electrical contact adjacent to the p-clad layer and proximate to the laser emission face, and an n-electrical contact adjacent to the n-clad layer or an n-semiconductor layer. The laser mode is defined by oxidized or ion-diffusion regions associated with the p-clad layer or n-clad layer of the laser. A conductive via through the substrate allows electrical connection with the p-side contact to be achieved from the n-side of the substrate. The optical head is used in a near-field optical system with an optical medium having a phase change layer.
摘要翻译：具有一个或多个固态激光器和空气动力学形状的滑块的近场光学系统，其包括由相同的基底半导体材料制造的单个集成的单片器件。单片光学头可以快速且容易地附接到光学读/写设备的读取臂，而不需要附加单独的激光元件，并且不需要定位微距定位或使用光学显微镜来定位激光器。该光学头包括单个半导体衬底，该半导体衬底包括限定具有空气支承表面的滑块的第一区域和限定二极管激光器的至少一个第二激光区域，二极管激光器具有基本共面的发射面与空气轴承表面。半导体衬底优选地包括有源层，邻近有源区的第一侧的p覆盖层或反射层，邻近有源层的第二侧的n包层或反射层以及邻近的n半导体层 n覆层。半导体衬底的滑块区域包括邻近p覆盖层的空气支承表面，其空气动力学构造并构造成限定滑块。整体激光器包括邻近p覆盖层并且靠近激光发射面的p电接触以及与n包覆层或n半导体层相邻的n电接触。激光模式由与激光的p包覆层或n包覆层相关联的氧化或离子扩散区域限定。通过基板的导电通孔允许从基板的n侧实现与p侧接触的电连接。光头用于具有相变层的光学介质的近场光学系统中。

3. 发明申请

US20130052752A1 Mram etching processes 有权
标题翻译：摩擦蚀刻工艺
公开(公告)号：US20130052752A1
公开(公告)日：2013-02-28
申请号：US13199490
申请日：2011-08-30
申请人： Kimihiro Satoh , Yiming Huai , Jing Zhang , Rajiv Yadav Ranjan , Parviz Keshtbod , Roger K. Malmhall
发明人： Kimihiro Satoh , Yiming Huai , Jing Zhang , Rajiv Yadav Ranjan , Parviz Keshtbod , Roger K. Malmhall
IPC分类号： H01L21/8246
CPC分类号： H01L43/12 , H01L29/00
摘要： Various embodiments of the invention relate to etching processes used in fabrication of MTJ cells in an MRAM device. The various embodiments can be used in combination with each other. The first embodiment adds a hard mask buffer layer between a hard mask and a top electrode. The second embodiment uses a multilayered etching hard mask. The third embodiment uses a multilayered top electrode structure including a first Cu layer under a second layer such as Ta. The fourth embodiment is a two-phase etching process used for the bottom electrode to remove re-deposited material while maintaining a more vertical sidewall etching profile. In the first phase the bottom electrode layer is removed using carbonaceous reactive ion etching until the endpoint. In the second phase an inert gas and/or oxygen plasma is used to remove the polymer that was deposited during the previous etching processes.
摘要翻译：本发明的各种实施例涉及用于制造MRAM装置中的MTJ电池的蚀刻工艺。各种实施例可以彼此组合使用。第一实施例在硬掩模和顶电极之间添加硬掩模缓冲层。第二实施例使用多层蚀刻硬掩模。第三实施例使用包括第二层如Ta之下的第一Cu层的多层顶电极结构。第四实施例是用于底部电极去除再沉积材料同时保持更垂直侧壁蚀刻轮廓的两相蚀刻工艺。在第一阶段中，使用碳质反应离子蚀刻去除底部电极层直到端点。在第二阶段中，使用惰性气体和/或氧等离子体去除在先前蚀刻工艺期间沉积的聚合物。

4. 发明授权

US07158470B2 Near-field optical head system with integrated slider and laser 有权
标题翻译：具有集成滑块和激光器的近场光学头系统
公开(公告)号：US07158470B2
公开(公告)日：2007-01-02
申请号：US11211034
申请日：2005-08-23
申请人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
发明人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
IPC分类号： G11B7/00
CPC分类号： G11B7/127 , G11B7/122 , G11B7/123 , G11B7/1387 , G11B7/22
摘要： A near-field optical apparatus having one or more solid state lasers and an aerodynamically shaped slider which comprise a single integrated, monolithic device fabricated from the same base semiconductor material. The monolithic optical head can be quickly and easily attached to the read arm of an optical read/write device without requiring attachment of separate laser elements, and without micropositioning or use of optical microscopy for positioning the lasers. The optical head comprising a single semiconductor substrate including a first region which defines a slider having an air bearing surface, and at least one second, laser region which defines a diode laser, with the diode laser having an emission face which is substantially co-planar with the air bearing surface. The semiconductor substrate preferably includes an active layer, a p-clad layer or reflective layer adjacent a first side of the active region, an n-clad layer or reflective layer adjacent a second side of the active layer, and an n-semiconductor layer adjacent the n-clad layer. A slider region of the semiconductor substrate includes an air bearing surface, adjacent the p-clad layer, which is aerodynamically structured and configured to define a slider. The integral lasers include a p-electrical contact adjacent to the p-clad layer and proximate to the laser emission face, and an n-electrical contact adjacent to the n-clad layer or an n-semiconductor layer. The laser mode is defined by oxidized or ion-diffusion regions associated with the p-clad layer or n-clad layer of the laser. A conductive via through the substrate allows electrical connection with the p-side contact to be achieved from the n-side of the substrate. The optical head is used in a near-field optical system with an optical medium having a phase change layer.
摘要翻译：具有一个或多个固态激光器和空气动力学形状的滑块的近场光学装置包括由相同的基底半导体材料制造的单个集成的单片器件。单片光学头可以快速且容易地附接到光学读/写设备的读取臂，而不需要附加单独的激光元件，并且不需要定位微距定位或使用光学显微镜来定位激光器。该光学头包括单个半导体衬底，该半导体衬底包括限定具有空气支承表面的滑块的第一区域和限定二极管激光器的至少一个第二激光区域，二极管激光器具有基本共面的发射面与空气轴承表面。半导体衬底优选地包括有源层，邻近有源区的第一侧的p覆盖层或反射层，邻近有源层的第二侧的n包层或反射层以及邻近的n半导体层 n覆层。半导体衬底的滑块区域包括邻近p覆盖层的空气支承表面，其空气动力学构造并构造成限定滑块。整体激光器包括邻近p覆盖层并且靠近激光发射面的p电接触以及与n包覆层或n半导体层相邻的n电接触。激光模式由与激光的p包覆层或n包覆层相关联的氧化或离子扩散区域限定。通过基板的导电通孔允许从基板的n侧实现与p侧接触的电连接。光头用于具有相变层的光学介质的近场光学系统中。

5. 发明授权

US5930434A Optical disc data storage system using optical waveguide 失效
标题翻译：光盘数据存储系统采用光波导
公开(公告)号：US5930434A
公开(公告)日：1999-07-27
申请号：US973089
申请日：1997-10-16
申请人： Gregory S. Mowry , Roger K. Malmhall
发明人： Gregory S. Mowry , Roger K. Malmhall
IPC分类号： G01Q60/18 , G02B3/00 , G02B6/12 , G02B6/24 , G02B6/42 , G11B7/12 , G11B7/135 , G11B9/00 , G02B6/02
CPC分类号： G02B3/0087 , G02B6/241 , G11B7/122 , G11B7/1384 , G11B7/1387 , G02B2006/12095 , G02B6/4206 , G11B9/1409
摘要： An optical disc data storage system includes an optical disc for storing information in an optically readable format on a data surface. The slider is positioned proximate the data surface of the optical disc. An actuator coupled to the slider selectively positions the slider relative to the data surface. An optical waveguide having a radially graded index of refraction extends between a first end positioned proximate the light source and a second end coupled to the slider and positioned proximate the data surface. The optical fiber carries light therebetween.
摘要翻译： PCT No.PCT / US97 / 15361 Sec。 371日期：1997年10月16日 102（e）1997年10月16日PCT PCT 1997年8月29日PCT公布。 WO98 / 52193 PCT出版物日期1998年11月19日光盘数据存储系统包括用于以数据表面上的光学可读格式存储信息的光盘。滑块位于光盘的数据表面附近。耦合到滑块的致动器选择性地相对于数据表面定位滑块。具有径向渐变折射率的光波导在靠近光源定位的第一端和耦合到滑动器并位于数据表面附近的第二端之间延伸。光纤在其间携带光。

6. 发明授权

US08885395B2 Magnetoresistive logic cell and method of use 有权
标题翻译：磁阻逻辑单元及其使用方法
公开(公告)号：US08885395B2
公开(公告)日：2014-11-11
申请号：US13402123
申请日：2012-02-22
申请人： Yuchen Zhou , Zihui Wang , Yiming Huai , Rajiv Yadav Ranjan , Roger K. Malmhall
发明人： Yuchen Zhou , Zihui Wang , Yiming Huai , Rajiv Yadav Ranjan , Roger K. Malmhall
IPC分类号： G11C11/00
CPC分类号： G11C11/00 , G11C11/161 , G11C11/1673 , H01L27/222 , H01L43/08
摘要： A magnetoresistive logic cell (MRLC) is described that includes two MTJs in series that share a common free layer (CFL). The relative magnetization orientations of the CFL and the switchable reference layer (SRL) in MTJ-1 dominate the overall resistance of the MRLC without regard to the fixed magnetization orientation of the nonswitchable reference layer in MTJ-2. The high resistance state of the MRLC occurs when the switchable reference and common free layers have opposite magnetization orientations. The low resistance state occurs when the orientations are the same. This behavior allows the MRLC to be used as a logical comparator. The CFL is switched by STT effect by application of selected relatively short voltage pulses that do not switch the SRL. The SRL is switched with reference to the CFL by a voltage effect generated by a selected longer voltage pulse that does not switch the CFL.
摘要翻译：描述了包含共享共同自由层（CFL）的两个串联MTJ的磁阻逻辑单元（MRLC）。 MTJ-1中CFL和可切换参考层（SRL）的相对磁化取向主导了MRLC的总体电阻，而不考虑MTJ-2中不可切换参考层的固定磁化方向。当可切换参考和公共自由层具有相反的磁化方向时，MRLC的高电阻状态发生。当取向相同时，发生低电阻状态。此行为允许将MRLC用作逻辑比较器。通过施加不切换SRL的选定的相对较短的电压脉冲，通过STT效应来切换CFL。通过由不会切换CFL的选定的较长电压脉冲产生的电压效应，SRL将根据CFL进行切换。

7. 发明授权

US08536063B2 MRAM etching processes 有权
公开(公告)号：US08536063B2
公开(公告)日：2013-09-17
申请号：US13199490
申请日：2011-08-30
申请人： Kimihiro Satoh , Yiming Huai , Jing Zhang , Rajiv Yadav Ranjan , Parviz Keshtbod , Roger K. Malmhall
发明人： Kimihiro Satoh , Yiming Huai , Jing Zhang , Rajiv Yadav Ranjan , Parviz Keshtbod , Roger K. Malmhall
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01L43/12 , H01L29/00
摘要： Various embodiments of the invention relate to etching processes used in fabrication of MTJ cells in an MRAM device. The various embodiments can be used in combination with each other. The first embodiment adds a hard mask buffer layer between a hard mask and a top electrode. The second embodiment uses a multilayered etching hard mask. The third embodiment uses a multilayered top electrode structure including a first Cu layer under a second layer such as Ta. The fourth embodiment is a two-phase etching process used for the bottom electrode to remove re-deposited material while maintaining a more vertical sidewall etching profile. In the first phase the bottom electrode layer is removed using carbonaceous reactive ion etching until the endpoint. In the second phase an inert gas and/or oxygen plasma is used to remove the polymer that was deposited during the previous etching processes.

8. 发明授权

US07327667B2 Semiconductor laser and associated drive circuit substrate 失效
标题翻译：半导体激光器及相关驱动电路基板
公开(公告)号：US07327667B2
公开(公告)日：2008-02-05
申请号：US10711527
申请日：2004-09-23
申请人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Matthew C. Bashaw
发明人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Matthew C. Bashaw
IPC分类号： G11B7/125
CPC分类号： H01S5/18391 , G11B7/122 , G11B7/22 , H01S5/02276 , H01S5/02284 , H01S5/0261 , H01S5/0425 , H01S5/18311 , H01S5/18369 , H01S5/18375 , H01S5/18377 , H01S2301/166
摘要： A single monolithic semiconductor substrate comprises a first side and a second side. The first side includes an air bearing surface. A laser integrates with the first side. The laser has an emission facet substantially co-planer with the air bearing surface. A contact pad on the second side electronically bridges to the laser.
摘要翻译：单个单片半导体衬底包括第一侧和第二侧。第一侧包括空气轴承表面。激光与第一面相结合。激光器具有与空气轴承表面基本上共同平面的发射面。第二侧的接触垫电子地连接到激光器。

9. 发明授权

US06963530B1 Near-field optical head system with integrated slider and laser 有权
公开(公告)号：US06963530B1
公开(公告)日：2005-11-08
申请号：US09495552
申请日：2000-02-01
申请人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
发明人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Mathew C. Bashaw
IPC分类号： G11B7/00 , G11B7/12 , G11B7/125 , G11B7/135 , G11B7/22
CPC分类号： G11B7/127 , G11B7/122 , G11B7/123 , G11B7/1387 , G11B7/22
摘要： A near-field optical apparatus having one or more solid state lasers and an aerodynamically shaped slider which comprise a single integrated, monolithic device fabricated from the same base semiconductor material. The monolithic optical head can be quickly and easily attached to the read arm of an optical read/write device without requiring attachment of separate laser elements, and without micropositioning or use of optical microscopy for positioning the lasers. The optical head comprising a single semiconductor substrate including a first region which defines a slider having an air bearing surface, and at least one second, laser region which defines a diode laser, with the diode laser having an emission face which is substantially co-planar with the air bearing surface. The semiconductor substrate preferably includes an active layer, a p-clad layer or reflective layer adjacent a first side of the active region, an n-clad layer or reflective layer adjacent a second side of the active layer, and an n-semiconductor layer adjacent the n-clad layer. A slider region of the semiconductor substrate includes an air bearing surface, adjacent the p-clad layer, which is aerodynamically structured and configured to define a slider. The integral lasers include a p-electrical contact adjacent to the p-clad layer and proximate to the laser emission face, and an n-electrical contact adjacent to the n-clad layer or an n-semiconductor layer. The laser mode is defined by oxidized or ion-diffusion regions associated with the p-clad layer or n-clad layer of the laser. A conductive via through the substrate allows electrical connection with the p-side contact to be achieved from the n-side of the substrate. The optical head is used in a near-field optical system with an optical medium having a phase change layer.

10. 发明授权

US06937637B1 Semiconductor laser and associated drive circuit substrate 失效
标题翻译：半导体激光器及相关驱动电路基板
公开(公告)号：US06937637B1
公开(公告)日：2005-08-30
申请号：US10441429
申请日：2003-05-19
申请人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Matthew C. Bashaw
发明人： Robert L. Thornton , Douglas G. Stinson , Roger K. Malmhall , Matthew C. Bashaw
IPC分类号： G11B7/12 , G11B7/22 , H01S5/02 , H01S5/026 , H01S5/042 , H01S5/183 , H01S3/081
CPC分类号： H01S5/18391 , G11B7/122 , G11B7/22 , H01S5/02276 , H01S5/02284 , H01S5/0261 , H01S5/0425 , H01S5/18311 , H01S5/18369 , H01S5/18375 , H01S5/18377 , H01S2301/166
摘要： A near-field optical system having one or more solid state lasers and an aerodynamically shaped slider which comprise a single integrated, monolithic device fabricated from the same base semiconductor material. The monolithic optical head can be quickly and easily attached to the read arm of an optical read/write device without requiring attachment of separate laser elements, and without micropositioning or use of optical microscopy for positioning the lasers. The optical head comprising a single semiconductor substrate including a first region which defines a slider having an air bearing surface, and at least one second, laser region which defines a diode laser, with the diode laser having an emission face which is substantially co-planar with the air bearing surface. A slider region of the semiconductor substrate includes an air bearing surface, adjacent the p-clad layer, which is aerodynamically structured and configured to define a slider. The integral lasers include a p-electrical contact and an n-electrical contact which are electrically accessible from one side of the laser, which allows the laser to be used directly with a drive circuit substrate.
摘要翻译：具有一个或多个固态激光器和空气动力学形状的滑块的近场光学系统，其包括由相同的基底半导体材料制造的单个集成的单片器件。单片光学头可以快速且容易地附接到光学读/写设备的读取臂，而不需要附加单独的激光元件，并且不需要定位微距定位或使用光学显微镜来定位激光器。该光学头包括单个半导体衬底，该半导体衬底包括限定具有空气支承表面的滑块的第一区域和限定二极管激光器的至少一个第二激光区域，二极管激光器具有基本共面的发射面与空气轴承表面。半导体衬底的滑块区域包括邻近p覆盖层的空气支承表面，其空气动力学构造并构造成限定滑块。整体激光器包括可从激光器的一侧电接触的p电接触和n电接触，这允许激光器直接与驱动电路基板一起使用。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式