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    • 2. 发明授权
    • System for automatic inspection of periodic patterns
    • 定期模式自动检查系统
    • US4771468A
    • 1988-09-13
    • US853100
    • 1986-04-17
    • John S. BatchelderRaymond E. BonnerByron E. DomRobert S. Jaffe
    • John S. BatchelderRaymond E. BonnerByron E. DomRobert S. Jaffe
    • H01L21/66G01B11/24G01B11/25G01N21/88G01N21/956G06T1/00G06T7/00G06K9/00
    • G06T7/001G03F7/7065G06T2207/30141G06T2207/30148
    • A method and apparatus for automatic inspection of periodic patterns typically found on patterned silicon wafers, printed circuit board, and the like is disclosed herein. The method comprises an inspection algorithm of two parts: a low-level algorithm and a higher level algorithm which includes, therein the operation of the low-level algorithm. The low-level algorithm utilizes the known periodicity of the pattern to find defects by comparing identical cells in the periodic array. The high-level algorithm comprises applying the low-level algorithm, some number of times (N) in succession on the image. An accumulator image is formed by adding the results of the low-level algorithm to create a separate image array where the pixels relate to the number of times that the pixel in the original image was detected as defective by the low-level algorithm.The apparatus for implementing the above method comprises a parallel/pipeline architecture for high speed processing and RAM LUT's to implement a plurality of subtract and compare functions.
    • 本文公开了用于自动检查在图案化硅晶片,印刷电路板等上通常发现的周期性图案的方法和装置。 该方法包括两部分的检查算法:低级算法和较高级算法,其中包括低级算法的操作。 低级算法利用已知的周期性模式来通过比较周期性阵列中的相同单元来找到缺陷。 高级算法包括在图像上连续应用一些次数(N)的低级算法。 通过将低级算法的结果相加以产生单独的图像阵列形成累加器图像,其中像素与原始图像中的像素被低级算法检测为缺陷的次数相关。 用于实现上述方法的装置包括用于高速处理的并行/流水线架构和RAM LUT以实现多个减法和比较功能。
    • 3. 发明授权
    • System for detecting and analyzing rounded objects
    • 用于检测和分析圆形对象的系统
    • US5018211A
    • 1991-05-21
    • US264534
    • 1988-10-31
    • Robert S. JaffeJon R. Mandeville
    • Robert S. JaffeJon R. Mandeville
    • G06K9/46G06T7/60
    • G06T7/0004G06K9/4609G06T7/602G06T2207/30141
    • A system is described which determines the characteristics of a substantially rounded feature, such as via hole in a printed circuit board. The system includes an image scanner for providing a serial flow of a raster scan image of pixels which represent the rounded feature. Tangent detecting circuits are further provided which select groups (i.e., neighborhoods) of pixels from the scan image, each group including pixels clustered about a plurality of chosen azimuths and adjacent to a tangent to a boundary of the rounded feature. Processing circuits are further provided to trim each selected group of pixels to eliminate pixels not lying on the tangent line. The pixels which remain after the trim operation are representative of the limits (e.g., diameter, radius, etc.) of the rounded feature and enable an analyzing circuit to determine the characteristics of the rounded feature by examining the relationships between the tangent line pixels.A second system is described which reduces the apparatus required for trimming the selected pixel groups. A tangent segment is fed into a plurality of parallel networks which initially identify right and left shoulders of the tangent segment. The identified shoulders are expanded and used as a mask on the original tangent segment to disconnect a central plateau thereof from its next lower and non-central plateaus. Subsequent trimming enables the central plateau to be identified.
    • 描述了确定基本上圆形特征(例如印刷电路板中的通孔)的特性的系统。 该系统包括用于提供表示圆形特征的像素的光栅扫描图像的串行流的图像扫描器。 进一步提供切线检测电路,其从扫描图像中选择像素的组(即,邻域),每个组包括围绕多个所选方位角聚集并且与圆整特征的边界的切线相邻的像素。 进一步提供处理电路以修剪每个所选择的像素组,以消除不在切线上的像素。 在修剪操作之后保留的像素代表舍入特征的限制(例如,直径,半径等),并且使得分析电路能够通过检查切线像素之间的关系来确定圆形特征的特性。 描述了减少修整所选择的像素组所需的装置的第二系统。 切线段被馈送到多个平行网络中,其初始地识别切线段的右肩和右肩部。 识别的肩膀被扩展并用作原始切线段上的掩模,以将其中心平台与其下一个下部和非中央平台断开。 随后的修剪使得能够识别中央平台。