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    • 8. 发明授权
    • Cathodic arc coating apparatus and method
    • 阴极电弧涂敷装置及方法
    • US5518597A
    • 1996-05-21
    • US411476
    • 1995-03-28
    • Jonathan G. StorerMartin H. BensonRobert R. Kieschke
    • Jonathan G. StorerMartin H. BensonRobert R. Kieschke
    • C23C14/08C23C14/32C23C14/56
    • C23C14/083C23C14/325C23C14/562Y02T50/67
    • A cathodic arc coating apparatus for applying a coating to an object is provided. The apparatus includes: an enclosure; means for evacuating the enclosure; an anode within the enclosure, wherein the anode comprises an open array of a metal defining a central axis and a deposition space for positioning the object; a cathode assembly positioned within the deposition space, wherein the cathode assembly comprises a first consumable cathode having a central axis and an evaporation surface; means for generating a plasma stream comprising charged particles, wherein the plasma stream is projected from the evaporation surface of the first consumable cathode toward the anode array; and a magnetic system for diverting the charged particles of the plasma stream away from the anode array and toward the object being coated; wherein the diverted charged particles are deposited on the object to form a coating thereon.
    • 提供了一种用于将涂层施加到物体上的阴极电弧涂覆装置。 该装置包括:外壳; 撤离外壳的装置; 在所述外壳内的阳极,其中所述阳极包括限定中心轴的金属开放阵列和用于定位所述物体的沉积空间; 阴极组件,其位于所述沉积空间内,其中所述阴极组件包括具有中心轴线和蒸发表面的第一消耗性阴极; 用于产生包含带电粒子的等离子体流的装置,其中所述等离子体流从所述第一可消耗阴极的蒸发表面朝向所述阳极阵列投影; 以及用于将等离子体流的带电粒子转移离开阳极阵列并朝向被涂覆的物体的磁性系统; 其中转移的带电粒子沉积在物体上以在其上形成涂层。