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    • 3. 发明申请
    • BISTABLE MICROMECHANICAL DEVICES
    • 双抗微生物装置
    • US20080036478A1
    • 2008-02-14
    • US11875024
    • 2007-10-19
    • Robert MessengerTimothy McLainJeffrey AndersonLarry Howell
    • Robert MessengerTimothy McLainJeffrey AndersonLarry Howell
    • G01V3/18G01P15/00
    • G01P15/0891G01D5/18G01P15/123G01P15/125G01P2015/0814G11C23/00H01H59/0009H01H2001/0042
    • A micromechanical device may include one or more piezoresistive elements whose electrical resistance changes in response to externally or internally induced strain. The present invention leverages the piezoresistive properties of such devices to sense the positional state of the device. A sensing circuit may be integrated into the device that senses an electrical resistance of at least a portion of the micromechanical device and provides information regarding the positional state of the micromechanical device. The micromechanical device may be a compliant device that includes relatively flexible members such as mechanical beams or ribbons. The positional states may be continuous positional states (such as the position of an actuator) or discreet positional states (such as the positional state of a bistable memory device). In certain embodiments, the micromechanical device is a threshold detector that latches to a particular stable configuration when an applied force exceeds a selected value.
    • 微机械装置可以包括一个或多个压阻元件,其电阻响应于外部或内部诱发的应变而改变。 本发明利用这种装置的压阻特性来感测装置的位置状态。 感测电路可以集成到该装置中,该装置感测微机械装置的至少一部分的电阻并且提供关于微机械装置的位置状态的信息。 微机械装置可以是包括诸如机械梁或带的相对柔性的构件的柔性装置。 位置状态可以是连续的位置状态(例如致动器的位置)或离散的位置状态(例如双稳态存储器件的位置状态)。 在某些实施例中,微机械装置是阈值检测器,当所施加的力超过选定值时,阈值检测器锁定到特定的稳定配置。