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1. 发明授权

US07374648B2 Single piece coil support assemblies, coil constructions and methods of assembling coil constructions 失效
标题翻译：单线圈支撑组件，线圈结构和组装线圈结构的方法
公开(公告)号：US07374648B2
公开(公告)日：2008-05-20
申请号：US10880172
申请日：2004-06-28
申请人： Len Hom , John D. Mize , Robert M. Prater , David K. Chan , Gilbert Amador , Peter J. Kang
发明人： Len Hom , John D. Mize , Robert M. Prater , David K. Chan , Gilbert Amador , Peter J. Kang
IPC分类号： C23C14/35 , C23C16/00
CPC分类号： H01J37/3447 , H01J37/34
摘要： The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.
摘要翻译：本发明包括线圈支撑组件，其具有与设置在处理室内的屏蔽件的表面接合的绝缘体。绝缘体具有延伸穿过护罩的延伸部。第二绝缘体设置在屏蔽和线圈之间，并接触从线圈延伸的突起。紧固件穿过第一绝缘体设置并延伸穿过第二绝缘体并进入突出部。紧固件通过第一绝缘体与屏蔽件电隔离。本发明包括包含所描述的线圈支撑构造的线圈组件。本发明还包括在处理室内支撑线圈的方法，其中设置有屏蔽件。插入绝缘体以从屏蔽件的外侧延伸穿过屏蔽层的厚度。线圈通过将紧固件穿过每个绝缘体安装在腔室内，从而从线圈体向外突出。

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