专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06568346B2 Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply 失效
标题翻译：分布式电感耦合等离子体源和用于将感应线圈耦合到RF电源的电路
公开(公告)号：US06568346B2
公开(公告)日：2003-05-27
申请号：US09929902
申请日：2001-08-14
申请人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
发明人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
IPC分类号： C23C16507
CPC分类号： H01J37/321
摘要： Apparatus and method for inductively coupling electrical power to a plasma in a semiconductor process chamber. In a first aspect, an array of wedge-shaped induction coils are distributed around a circle. The sides of adjacent coils are parallel, thereby enhancing the radial uniformity of the magnetic field produced by the array. In a second aspect, electrostatic coupling between the induction coils and the plasma is minimized by connecting each induction coil to the power supply so that the turn of wire of the coil which is nearest to the plasma is near electrical ground potential. In one embodiment, the hot end of one coil is connected to the unbalanced output of an RF power supply, and the hot end of the other coil is connected to electrical ground through a capacitor which resonates with the latter coil at the frequency of the RF power supply.
摘要翻译：用于在半导体处理室中将电力感应耦合到等离子体的装置和方法。在第一方面，楔形感应线圈阵列分布在一个圆周围。相邻线圈的侧面是平行的，从而增强阵列产生的磁场的径向均匀性。在第二方面，通过将每个感应线圈连接到电源使得感应线圈和等离子体之间的静电耦合最小化，使得最接近等离子体的线圈的线的转弯接近电接地电位。在一个实施例中，一个线圈的热端连接到RF电源的不平衡输出端，另一个线圈的热端通过电容器连接到电接地，电容器以RF的频率与后一个线圈谐振电源。

2. 发明授权

US07088101B2 Aqueous sample holder for EPR and MR spectroscopy 有权
标题翻译：用于EPR和MR光谱的水样品架
公开(公告)号：US07088101B2
公开(公告)日：2006-08-08
申请号：US10898120
申请日：2004-07-23
申请人： Richard Raymond Mett , James Stewart Hyde , Jason Walter Sidabras
发明人： Richard Raymond Mett , James Stewart Hyde , Jason Walter Sidabras
IPC分类号： G01V3/00
CPC分类号： G01R33/30
摘要： A sample holder for use in an EPR spectrometer is extruded using a material having a low dielectric constant. The extruded sample holder has a plurality of channels formed in it for holding sample material for testing. The shape and orientation of these channels are such that losses due to the high dielectric constant of the sample are minimized. Sample holders for cylindrical and rectangular cavity resonators and uniform field cavity resonators are disclosed, as well as for two-gap and four-gap loop-gap resonators.
摘要翻译：使用具有低介电常数的材料挤出用于EPR光谱仪的样品架。挤出的样品保持器具有形成在其中的多个通道，用于保持用于测试的样品材料。这些通道的形状和取向使得由于样品的高介电常数引起的损耗最小化。公开了用于圆柱形和矩形腔谐振器和均匀场谐振腔的样品保持器，以及用于双间隙和四间隙环形间隙谐振器。

3. 发明授权

US06825618B2 Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply 失效
标题翻译：分布式电感耦合等离子体源和电路，用于将感应线圈耦合到RF电源
公开(公告)号：US06825618B2
公开(公告)日：2004-11-30
申请号：US10442424
申请日：2003-05-20
申请人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
发明人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
IPC分类号： H01J724
CPC分类号： H01J37/321
摘要： Apparatus and method for inductively coupling electrical power to a plasma in a semiconductor process chamber. In a first aspect, an array of wedge-shaped induction coils are distributed around a circle. The sides of adjacent coils are parallel, thereby enhancing the radial uniformity of the magnetic field produced by the array. In a second aspect, electrostatic coupling between the induction coils and the plasma is minimized by connecting each induction coil to the power supply so that the turn of wire of the coil which is nearest to the plasma is near electrical ground potential. In one embodiment, the hot end of one coil is connected to the unbalanced output of an RF power supply, and the hot end of the other coil is connected to electrical ground through a capacitor which resonates with the latter coil at the frequency of the RF power supply.
摘要翻译：用于在半导体处理室中将电力感应耦合到等离子体的装置和方法。在第一方面，楔形感应线圈阵列分布在一个圆周围。相邻线圈的侧面是平行的，从而增强阵列产生的磁场的径向均匀性。在第二方面，通过将每个感应线圈连接到电源使得感应线圈和等离子体之间的静电耦合最小化，使得最接近等离子体的线圈的线的转弯接近电接地电位。在一个实施例中，一个线圈的热端连接到RF电源的不平衡输出端，另一个线圈的热端通过电容器连接到电接地，电容器以RF的频率与后一个线圈谐振电源。

4. 发明授权

US06273022B1 Distributed inductively-coupled plasma source 失效
标题翻译：分布式电感耦合等离子体源
公开(公告)号：US06273022B1
公开(公告)日：2001-08-14
申请号：US09039216
申请日：1998-03-14
申请人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
发明人： Bryan Y. Pu , Hongching Shan , Claes Bjorkman , Kenny Doan , Mike Welch , Richard Raymond Mett
IPC分类号： C23C16507
CPC分类号： H01J37/321
摘要： Apparatus and method for inductively coupling electrical power to a plasma in a semiconductor process chamber. In a first aspect, an array of induction coils is distributed over a geometric surface having a circular transverse section. Each coil has a transverse section which is wedge-shaped so that the adjacent sides of any two adjacent coils in the array are approximately parallel to a radius of the circular transverse section of the geometric surface. The sides of adjacent coils being parallel enhances the radial uniformity of the magnetic field produced by the coil array. In a second aspect, electrostatic coupling between the induction coils and the plasma is minimized by connecting each induction coil to the power supply so that the turn of wire of the coil which is nearest to the plasma is near electrical ground potential. In one embodiment, the near end of each coil connects directly to electrical ground. In second and third embodiments, two coils are connected in series at the near end of each coil. In the second embodiment, the opposite (“RF hot”) end of each coil is connected to a respective balanced output of an RF power supply. In the third embodiment, the hot end of one coil is connected to the unbalanced output of an RF power supply, and the hot end of the other coil is connected to electrical ground through a capacitor which resonates with the latter coil at the frequency of the RF power supply.
摘要翻译：用于在半导体处理室中将电力感应耦合到等离子体的装置和方法。在第一方面，感应线圈阵列分布在具有圆形横截面的几何表面上。每个线圈具有楔形的横截面，使得阵列中任何两个相邻线圈的相邻侧面几乎平行于几何表面的圆形横截面的半径。相邻线圈的平行侧面增强了由线圈阵列产生的磁场的径向均匀性。在第二方面，通过将每个感应线圈连接到电源使得感应线圈和等离子体之间的静电耦合最小化，使得最接近等离子体的线圈的线的转弯接近电接地电位。在一个实施例中，每个线圈的近端直接连接到电气接地。在第二和第三实施例中，两个线圈在每个线圈的近端串联连接。在第二实施例中，每个线圈的相对（“RF热”）端连接到RF电源的相应的平衡输出端。在第三实施例中，一个线圈的热端连接到RF电源的不平衡输出，另一个线圈的热端通过电容器连接到电接地，该电容器以与第二线圈的频率谐振的电容器射频电源。

5. 发明授权

US5737177A Apparatus and method for actively controlling the DC potential of a cathode pedestal 失效
标题翻译：用于主动控制阴极基座的直流电位的装置和方法
公开(公告)号：US5737177A
公开(公告)日：1998-04-07
申请号：US730885
申请日：1996-10-17
申请人： Richard Raymond Mett , Mahmoud Dahimene , Paul E. Luscher , Siamak Salimian , Mark Steven Contreras
发明人： Richard Raymond Mett , Mahmoud Dahimene , Paul E. Luscher , Siamak Salimian , Mark Steven Contreras
IPC分类号： B23Q3/15 , H01L21/02 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , Y10T279/23
摘要： A method and apparatus for actively controlling the DC cathode potential of a wafer support pedestal within a semiconductor wafer processing system. The apparatus contains a variable DC power supply coupled through an RF filter to a cathode pedestal. The variable DC power supply is actively controlled by a control signal generated by a cathode bias control unit, e.g., a computer or other control circuitry. The cathode bias control unit can be as simple as an operator adjustable control signal, e.g., a rheostat. However, for more accurate control of the DC power supply, a feedback circuit is used that generates a control signal that is proportional to the peak-to-peak voltage on a cathode pedestal. The application of the DC bias to the pedestal reduces the DC potential difference between the wafer and the cathode and, thereby avoids arcing from the wafer to the pedestal.
摘要翻译：一种用于主动控制半导体晶片处理系统内的晶片支撑基座的直流阴极电位的方法和装置。该装置包含通过RF滤波器耦合到阴极基座的可变直流电源。可变直流电源由阴极偏置控制单元（例如计算机或其他控制电路）产生的控制信号主动地控制。阴极偏置控制单元可以像操作者可调整的控制信号一样简单，例如变阻器。然而，为了更准确地控制直流电源，使用产生与阴极基座上的峰 - 峰电压成比例的控制信号的反馈电路。将DC偏压应用于基座减小了晶片和阴极之间的DC电位差，从而避免了从晶片到基座的电弧。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式