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    • 2. 发明授权
    • Apparatus for plasma etching circuit boards or the like
    • 等离子体蚀刻电路板等的装置
    • US4880489A
    • 1989-11-14
    • US900446
    • 1986-08-26
    • Richard EhrenfeldnerDieter Wagner
    • Richard EhrenfeldnerDieter Wagner
    • H05K3/00H05K3/08
    • H05K3/08H05K3/0041H05K2203/095H05K3/0055
    • The circuit board plasma etching apparatus includes a preheating chamber, a plasma reaction chamber and a cooling chamber for etching circuit boards with plasma in a quasi continuous operation. The plasma reaction chamber is sealed by a gas-tight preheating sealing slide adjacent the preheating chamber and by a gas-tight cooling sealing slide adjacent the cooling chamber. A preheating door selectively closes the preheating entry end and a cooling door selectively closes the cooling chamber exit end. Boards to be etched are placed in printed circuit board cages supported by a guide rail within the chambers. The guide rail is separable into a preheating segment, a reaction chamber segment and a cooling segment contained within the respective chambers. A preheating chamber bellows allows axial movement of the preheating door, as does a cooling chamber bellows for the cooling chamber door. Axial displacement of the doors allows selective segmentation of the guide rail. A bypass conduit selectively allows gas exhausted from the cooling chamber to be fed to the preheating chamber.
    • 电路板等离子体蚀刻装置包括预热室,等离子体反应室和用于在准连续操作中蚀刻具有等离子体的电路板的冷却室。 等离子体反应室由邻近预热室的气密预热密封滑块和邻近冷却室的气密冷却密封滑块密封。 预热门选择性地关闭预热入口端,并且冷却门选择性地关闭冷却室出口端。 待蚀刻的板被放置在由腔室内的导轨支撑的印刷电路板笼中。 导轨可分离成预热段,反应室段和包含在各室内的冷却段。 预热室波纹管允许预热门的轴向运动,冷却室波纹管也适用于冷却室门。 门的轴向位移允许选择性地分割导轨。 旁路管道选择性地允许从冷却室排出的气体被供给到预热室。