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    • 2. 发明授权
    • Cathodic arc coating apparatus
    • 阴极电弧涂层设备
    • US06224726B1
    • 2001-05-01
    • US09217714
    • 1998-12-21
    • Russell A. BeersRobert E. HendricksRichard D. Getz
    • Russell A. BeersRobert E. HendricksRichard D. Getz
    • C23C1432
    • H01J37/32055H01J37/3266
    • An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, a disk-shaped cathode, a platter for supporting the substrate, apparatus for maintaining a vacuum in the vessel, and apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode. The disk-shaped cathode has a first end surface, a second end surface, and an evaporative surface extending between the first and second end surfaces, and the cathode is mounted on a pedestal positioned inside the vessel. The platter has a slot for receiving the pedestal, thereby enabling the platter to be movable into and out of the vessel.
    • 提供了一种通过阴极电弧气相沉积将材料施加到基底上的装置,其包括容器,盘形阴极,用于支撑基底的盘片,用于在容器中保持真空的装置,以及用于选择性地保持弧形的装置 阴极和阳极之间的电能。 盘形阴极具有第一端面,第二端面和在第一和第二端面之间延伸的蒸发表面,并且阴极安装在位于容器内部的基座上。 盘片具有用于接收基座的槽,从而使得盘可以移入和移出容器。