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1. 发明授权

US08097071B2 Sintered fiber filter 有权
标题翻译：烧结纤维过滤器
公开(公告)号：US08097071B2
公开(公告)日：2012-01-17
申请号：US12256134
申请日：2008-10-22
申请人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
发明人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
IPC分类号： B01D46/00
CPC分类号： B22F7/002 , B01D39/2044
摘要： Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
摘要翻译：提供的烧结纤维过滤器在操作期间可以提供高的颗粒捕获效率和/或低的压降，并且在诸如半导体加工的应用中是有用的。用于制造过滤器的单个纤维（例如金属纤维）的至少一部分的形状具有三维方面，其允许低填充密度和高孔隙率的过滤介质。某些过滤器具有圆柱形或管状形状，具有较高密度的锥形末端。还描述了制造这种过滤器的方法，例如使用轴向压制。

2. 发明申请

US20120285877A1 Sintered Fiber Filter 有权
标题翻译：烧结纤维过滤器
公开(公告)号：US20120285877A1
公开(公告)日：2012-11-15
申请号：US13349401
申请日：2012-01-12
申请人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
发明人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
IPC分类号： B01D24/00 , C04B35/64 , B01D35/30
CPC分类号： B22F7/002 , B01D39/2044
摘要： Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
摘要翻译：提供的烧结纤维过滤器在操作期间可以提供高的颗粒捕获效率和/或低的压降，并且在诸如半导体加工的应用中是有用的。用于制造过滤器的单个纤维（例如金属纤维）的至少一部分的形状具有三维方面，其允许低填充密度和高孔隙率的过滤介质。某些过滤器具有圆柱形或管状形状，具有较高密度的锥形末端。还描述了制造这种过滤器的方法，例如使用轴向压制。

3. 发明授权

US5917066A Inline ultra-high efficiency filter 失效
标题翻译：在线超高效过滤器
公开(公告)号：US5917066A
公开(公告)日：1999-06-29
申请号：US895605
申请日：1997-07-16
申请人： Mark R. Eisenmann , Richard D. Balazy
发明人： Mark R. Eisenmann , Richard D. Balazy
IPC分类号： B01D39/20 , B01D46/00 , B01D46/24 , B22F5/12 , C22C1/04
CPC分类号： B01D46/0012 , B01D39/2034 , B01D46/24 , B01D2265/04
摘要： An inline ultra-high efficiency filter comprising a housing having a chamber extending the length thereof, an inlet and an outlet providing flow passages into and from the chamber. Seated in the chamber is a porous sintered metal filter element having a tubular body open at its end adjacent the inlet and an end wall at its other end adjacent the outlet, and the filter element provides an internal flow passage extending therein from the inlet to the end wall. A sealing weldment provides an air tight seal between the periphery of the filter element and the housing adjacent the inlet. The filter element is spaced from the wall of the chamber to provide a plenum space thereabout, and a gas stream entering the inlet end of the filter passes into the internal flow passage of the filter element and outwardly of the body of the filter element into the plenum space and thence outwardly of the outlet end of the filter. This filter achieves a 9LRV efficiency determined for the most penetrating particle size at the rated flow.
摘要翻译：一种在线超高效过滤器，包括具有延伸其长度的室的壳体，提供进出室的流动通道的入口和出口。在腔室中安置的是多孔烧结金属过滤器元件，其具有在其邻近入口的端部开口的管状体和在其另一端邻近出口的端壁，并且过滤元件提供从入口延伸到内部流动通道的内部流动通道端墙。密封焊件在过滤元件的周边与邻近入口的壳体之间提供气密密封。过滤器元件与腔室的壁间隔开以在其周围提供增压空间，并且进入过滤器入口端的气流进入过滤元件的内部流动通道并且过滤器元件的外部进入并且从过滤器的出口端向外。该过滤器实现了在额定流量下对最大渗透粒径确定的9LRV效率。

4. 发明授权

US06802333B2 Fluid flow controlling 有权
标题翻译：流体流量控制
公开(公告)号：US06802333B2
公开(公告)日：2004-10-12
申请号：US10002556
申请日：2001-11-01
申请人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
发明人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/0379 , Y10T137/2562 , Y10T137/7759 , Y10T137/7761
摘要： A method and system for controlling the rate of fluid flow. A flow restrictor having known pressure drop and flow rate characteristics provided in a passage through which the fluid, preferably a gas, flows. An upstream pressure sensor determines the pressure of fluid in the flow passage upstream of the flow restrictor. A downstream pressure sensor determines the pressure of fluid in the flow passage downstream of said flow restrictor. A pressure regulator adjusts the pressure of fluid upstream or downstream of the flow restrictor based on the pressure drop across the flow restrictor so that the actual pressure drop across the flow restrictor closely corresponds to the pressure drop associated with a desired rate of fluid flow.
摘要翻译：一种用于控制流体流速的方法和系统。具有已知的压降和流速特性的流量限制器，其设置在通道中，流体，优选气体通过该通道流动。上游压力传感器确定在流量限制器上游的流动通道中的流体的压力。下游压力传感器确定在所述限流器下游的流动通道中的流体的压力。压力调节器基于流量限制器上的压降来调节流量限制器上游或下游的压力，使得跨限流器的实际压降与所需流体流速相关联的压力下降。

5. 发明授权

US06422256B1 Fluid flow controlling 有权
标题翻译：流体流量控制
公开(公告)号：US06422256B1
公开(公告)日：2002-07-23
申请号：US09722937
申请日：2000-11-27
申请人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
发明人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/0379 , Y10T137/2562 , Y10T137/7759 , Y10T137/7761
摘要： A method and system for controlling the rate of fluid flow. A flow restrictor having known pressure drop and flow rate characteristics provided in a passage through which the fluid, preferably a gas, flows. An upstream pressure sensor determines the pressure of fluid in the flow passage upstream of the flow restrictor. A downstream pressure sensor determines the pressure of fluid in the flow passage downstream of said flow restrictor. A pressure regulator adjusts the pressure of fluid upstream or downstream of the flow restrictor based on the pressure drop across the flow restrictor so that the actual pressure drop across the flow restrictor closely corresponds to the pressure drop associated with a desired rate of fluid flow.
摘要翻译：一种用于控制流体流速的方法和系统。具有已知的压降和流速特性的流量限制器，其设置在通道中，流体，优选气体通过该通道流动。上游压力传感器确定在流量限制器上游的流动通道中的流体的压力。下游压力传感器确定在所述限流器下游的流动通道中的流体的压力。压力调节器基于流量限制器上的压降来调节流量限制器上游或下游的压力，使得跨限流器的实际压降与所需流体流速相关联的压力下降。

6. 发明授权

US08673065B2 Sintered fiber filter 有权
标题翻译：烧结纤维过滤器
公开(公告)号：US08673065B2
公开(公告)日：2014-03-18
申请号：US13349401
申请日：2012-01-12
申请人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
发明人： Derek Burgess , Wayne F. White , Alfred M. Romano , Todd W. Pflugbeil , Richard D. Balazy , Kenneth L. Rubow , John E. Rosenberger
IPC分类号： B01D39/20 , B01D39/14 , B01D39/06 , B01D24/00 , B01D50/00 , B01D59/50 , B01D46/00
CPC分类号： B22F7/002 , B01D39/2044
摘要： Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
摘要翻译：提供的烧结纤维过滤器在操作期间可以提供高的颗粒捕获效率和/或低的压降，并且在诸如半导体加工的应用中是有用的。用于制造过滤器的单个纤维（例如金属纤维）的至少一部分的形状具有三维方面，其允许低填充密度和高孔隙率的过滤介质。某些过滤器具有圆柱形或管状形状，具有较高密度的锥形末端。还描述了制造这种过滤器的方法，例如使用轴向压制。

7. 发明申请

US20090165651A1 Sintered fiber filter 有权
标题翻译：烧结纤维过滤器
公开(公告)号：US20090165651A1
公开(公告)日：2009-07-02
申请号：US12256134
申请日：2008-10-22
申请人： Derek BURGESS , Wayne F. WHITE , Alfred M. ROMANO , Todd W. PFLUGBEIL , Richard D. BALAZY , Kenneth L. RUBOW , John E. ROSENBERGER
发明人： Derek BURGESS , Wayne F. WHITE , Alfred M. ROMANO , Todd W. PFLUGBEIL , Richard D. BALAZY , Kenneth L. RUBOW , John E. ROSENBERGER
IPC分类号： C04B35/76 , B01D39/20 , C04B35/645 , B01D46/42 , B28B1/087 , B28B1/52
CPC分类号： B22F7/002 , B01D39/2044
摘要： Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
摘要翻译：提供的烧结纤维过滤器在操作期间可以提供高的颗粒捕获效率和/或低的压降，并且在诸如半导体加工的应用中是有用的。用于制造过滤器的单个纤维（例如金属纤维）的至少一部分的形状具有三维方面，其允许低填充密度和高孔隙率的过滤介质。某些过滤器具有圆柱形或管状形状，具有较高密度的锥形末端。还描述了制造这种过滤器的方法，例如使用轴向压制。

8. 发明授权

US6152162A Fluid flow controlling 有权
公开(公告)号：US6152162A
公开(公告)日：2000-11-28
申请号：US168697
申请日：1998-10-08
申请人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
发明人： Richard D. Balazy , Cathy L. Cowan , Mark R. Eisenmann , Kenneth E. Frink , Edward Kulha
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/0379 , Y10T137/2562 , Y10T137/7759 , Y10T137/7761
摘要： A method and system for controlling the rate of fluid flow. A flow restrictor having known pressure drop and flow rate characteristics provided in a passage through which the fluid, preferably a gas, flows. An upstream pressure sensor determines the pressure of fluid in the flow passage upstream of the flow restrictor. A downstream pressure sensor determines the pressure of fluid in the flow passage downstream of said flow restrictor. A pressure regulator adjusts the pressure of fluid upstream or downstream of the flow restrictor based on the pressure drop across the flow restrictor so that the actual pressure drop across the flow restrictor closely corresponds to the pressure drop associated with a desired rate of fluid flow.

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