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1. 发明授权

US07204155B2 Method and apparatus for pressure control and flow measurement 有权
标题翻译：用于压力控制和流量测量的方法和装置
公开(公告)号：US07204155B2
公开(公告)日：2007-04-17
申请号：US11475805
申请日：2006-06-27
申请人： John Lane , Ralph H. M. Straube , Chris Melcer
发明人： John Lane , Ralph H. M. Straube , Chris Melcer
IPC分类号： G01F1/00
CPC分类号： H01J37/32449 , C23C16/45557 , C23C16/466 , H01J37/3244
摘要： A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.
摘要翻译：提供了一种用于气体控制的方法和装置。该装置可以用于控制输送到室的气体，控制室压力，控制衬底和衬底支撑件之间的背面气体的传送等。在一个实施例中，用于控制气体控制的装置包括至少第一流量传感器，其具有控制阀，第一压力传感器和至少第二压力传感器。第一流量传感器的入口适于联接到气体供应。控制阀联接到流量传感器的出口。第一压力传感器适于感测指示第一流量传感器上游的压力的度量。第二压力传感器适于感测指示控制阀下游的压力的量度。

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