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1. 发明授权

US07400392B2 Apparatus for handling of a disklike member, especially for handling of a wafer 有权
标题翻译：用于处理盘状构件的装置，特别是用于处理晶片
公开(公告)号：US07400392B2
公开(公告)日：2008-07-15
申请号：US11093472
申请日：2005-03-30
申请人： Ralf Tillmann
发明人： Ralf Tillmann
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8803 , G01N21/9506 , H01L21/67742
摘要： There is provided an apparatus for handling a disklike member having a surface, especially for handling of a wafer, including a robot for carrying out at least an angular motion in a defined moving plane, an end-effector for holding the disklike member, and a wrist member operatively interconnecting said robot with said end-effector. The wrist member provides at least a motion of the end-effector about an axis in a plane of the surface of the disklike member. An inclining motion of said disklike member is achieved by combining the angular motion of the robot and the motion about the axis in the plane of the surface.
摘要翻译：提供了一种用于处理具有表面的盘形构件的装置，特别是用于处理晶片，包括用于在限定的移动平面中执行至少一个角运动的机器人，用于保持盘状构件的端部执行器，以及手腕构件将所述机器人与所述末端执行器操作地相互连接。手腕构件至少提供端部执行器围绕盘状构件的表面的平面中的轴线的运动。所述盘状构件的倾斜运动通过组合机器人的角运动和围绕表面的平面中的轴线的运动来实现。

2. 发明申请

US20080091297A2 Method and apparatus for receiving and/or transporting substrates 审中-公开
标题翻译：用于接收和/或传送基底的方法和装置
公开(公告)号：US20080091297A2
公开(公告)日：2008-04-17
申请号：US11677895
申请日：2007-02-22
申请人： Ralf Tillmann , Hans-Juergen Maas , Ingo Weiske , Martin Kraus
发明人： Ralf Tillmann , Hans-Juergen Maas , Ingo Weiske , Martin Kraus
IPC分类号： G06F7/00
CPC分类号： H01L21/67265 , H01L21/67259
摘要： The invention relates to a method for receiving and/or transporting substrates, wherein, by means of at least one sensor, a deviation of the position of a substrate, in particular of a substrate arranged in a slot of a container, is detected at least with respect to one degree of freedom and a movement course of at least one receiving device and/or transporting device is determined with the inclusion of said deviation.
摘要翻译：本发明涉及一种用于接收和/或传送衬底的方法，其中，借助于至少一个传感器，至少检测到衬底的位置，特别是布置在容器的槽中的衬底的位置的偏差相对于一个自由度，并且通过包括所述偏差来确定至少一个接收装置和/或输送装置的运动过程。

3. 发明授权

US08699208B2 Process for the production of electrolyte capacitors 有权
标题翻译：电解电容器生产工艺
公开(公告)号：US08699208B2
公开(公告)日：2014-04-15
申请号：US13267361
申请日：2011-10-06
申请人： Udo Merker , Wilfried Lövenich , Klaus Wussow , Ralf Tillmann
发明人： Udo Merker , Wilfried Lövenich , Klaus Wussow , Ralf Tillmann
IPC分类号： H01G9/145
CPC分类号： H01G9/0032 , H01G9/0036 , H01G9/042 , H01G9/15 , Y10T29/417
摘要： The invention relates to a process for the production of electrolyte capacitors having a low equivalent series resistance and low residual current, electrolyte capacitors produced by this process and the use of such electrolyte capacitors.
摘要翻译：本发明涉及生产具有低等效串联电阻和低剩余电流的电解电容器的方法，该方法由该方法生产的电解电容器和这种电解电容器的使用。

4. 发明授权

US08541911B2 Magnetic actor and a method for its installation 有权
标题翻译：磁性演员及其安装方法
公开(公告)号：US08541911B2
公开(公告)日：2013-09-24
申请号：US12959457
申请日：2010-12-03
申请人： Arndt Evers , Ralf Tillmann
发明人： Arndt Evers , Ralf Tillmann
IPC分类号： H02K41/02 , H02K41/03
CPC分类号： H01F7/066 , F16F15/023 , F16F15/03 , H01F7/0221 , H01F7/127
摘要： The invention relates to a magnetic actor in which the permanent magnets are arranged in a Halbach configuration and inserted into a slide-in frame.
摘要翻译：本发明涉及一种磁性体，其中永磁体以Halbach构型布置并插入到滑入框架中。

5. 发明申请

US20080005878A1 Process for the production of electrolyte capacitors 有权
标题翻译：电解电容器生产工艺
公开(公告)号：US20080005878A1
公开(公告)日：2008-01-10
申请号：US11520330
申请日：2006-09-13
申请人： Udo Merker , Wilfried Lovenich , Klaus Wussow , Ralf Tillmann
发明人： Udo Merker , Wilfried Lovenich , Klaus Wussow , Ralf Tillmann
IPC分类号： H01G9/15 , C25D21/12 , H01G9/022
CPC分类号： H01G9/0032 , H01G9/0036 , H01G9/042 , H01G9/15 , Y10T29/417
摘要： The invention relates to a process for the production of electrolyte capacitors having a low equivalent series resistance and low residual current, electrolyte capacitors produced by this process and the use of such electrolyte capacitors.
摘要翻译：本发明涉及生产具有低等效串联电阻和低剩余电流的电解电容器的方法，该方法由该方法生产的电解电容器和这种电解电容器的使用。

6. 发明授权

US07234913B2 Fast swapping station for wafer transport 有权
标题翻译：快速交换台用于晶圆运输
公开(公告)号：US07234913B2
公开(公告)日：2007-06-26
申请号：US10810361
申请日：2004-03-26
申请人： Peter Heiland , Ralf Tillmann
发明人： Peter Heiland , Ralf Tillmann
IPC分类号： B65H5/00
CPC分类号： H01L21/68707 , Y10S414/141
摘要： An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.
摘要翻译：提供一种用于接收和传送至少一个盘状构件的装置。该装置包括拾取和放置机构，包括夹持装置。实际上，该机构适于提供拾取和/或放置循环，其在操作期间提供所述夹持装置在上下位置之间的运动，反之亦然，由此，在向下位置，所述夹持装置从装载位置拾取盘状构件，或将盘状构件放置在装载位置上。

7. 发明申请

US20050237520A1 Apparatus for handling of a disklike member, especially for handling of a wafer 有权
标题翻译：用于处理盘状构件的装置，特别是用于处理晶片
公开(公告)号：US20050237520A1
公开(公告)日：2005-10-27
申请号：US11093472
申请日：2005-03-30
申请人： Ralf Tillmann
发明人： Ralf Tillmann
IPC分类号： B65G49/07 , B25J9/00 , G01N21/88 , G01N21/95 , H01L21/66 , H01L21/677 , H01L21/68 , G01N21/01
CPC分类号： G01N21/9501 , G01N21/8803 , G01N21/9506 , H01L21/67742
摘要： The invention is an apparatus for handling of a disklike member especially for handling of a wafer, comprising robot means adapted to carry out at least an angular motion in a defined moving plane, and end-effector means for holding the disklike member, wherein said apparatus comprises a wrist member operatively interconnecting said robot means with said end-effect means; wherein said wrist member and said robot provide an inclining motion of said disklike member by a combined movement of said end-effector about a first axis in plane with and symmetrically dividing said surface, and about a second axis perpendicular to said moving plane.
摘要翻译：本发明是用于处理特别是用于处理晶片的盘状构件的装置，包括适于在限定的移动平面中执行至少一个角运动的机器人装置，以及用于保持盘状构件的末端执行器装置，其中所述装置包括将所述机器人装置与所述端部效应装置互连的手腕部件; 其中所述腕部构件和所述机器人通过所述端部执行器围绕平面中的第一轴线和所述表面对称地分开并且围绕垂直于所述移动平面的第二轴线的组合运动来提供所述盘状构件的倾斜运动。

8. 发明授权

US07264436B2 Robot-guidance assembly for providing a precision motion of an object 有权
标题翻译：用于提供物体的精确运动的机器人引导组件
公开(公告)号：US07264436B2
公开(公告)日：2007-09-04
申请号：US11062154
申请日：2005-02-18
申请人： Ralf Tillmann
发明人： Ralf Tillmann
IPC分类号： B25J18/02
CPC分类号： B25J9/1015 , B25J15/0095 , H01L21/67766 , Y10T74/20305 , Y10T74/20317
摘要： There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.
摘要翻译：提供了一种用于提供物体的精确运动的机器人引导组件，特别是用于提供包括具有至少一个机器人手臂的机器人的诸如晶片的盘状构件的精确运动。所述至少一个机器人臂具有自由端和固定端。机器人可以在至少一个移动平面中移动至少一个机器人手臂的自由端。组件还包括用于精确地引导至少一个移动平面中的至少一个机器人臂的自由端的引导装置。还提供了用于检查物体表面的方法。

9. 发明申请

US20050129496A1 Fast swapping station for wafer transport 有权
标题翻译：快速交换台用于晶圆运输
公开(公告)号：US20050129496A1
公开(公告)日：2005-06-16
申请号：US10810361
申请日：2004-03-26
申请人： Peter Heiland , Ralf Tillmann
发明人： Peter Heiland , Ralf Tillmann
IPC分类号： B25J15/08 , B65G49/07 , H01L21/677 , H01L21/68 , H01L21/687 , B65F3/02
CPC分类号： H01L21/68707 , Y10S414/141
摘要： An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.
摘要翻译：提供一种用于接收和传送至少一个盘状构件的装置。该装置包括拾取和放置机构，包括夹持装置。实际上，该机构适于提供拾取和/或放置循环，其在操作期间提供所述夹持装置在上下位置之间的运动，反之亦然，由此，在向下位置，所述夹持装置从装载位置拾取盘状构件，或将盘状构件放置在装载位置上。

10. 发明申请

US20050183533A1 Robot-guidance assembly for providing a precision motion of an object 有权
标题翻译：用于提供物体的精确运动的机器人引导组件
公开(公告)号：US20050183533A1
公开(公告)日：2005-08-25
申请号：US11062154
申请日：2005-02-18
申请人： Ralf Tillmann
发明人： Ralf Tillmann
IPC分类号： B25J19/00 , B25J9/06 , B25J9/10 , B65G49/07 , H01L21/677 , B25J17/00
CPC分类号： B25J9/1015 , B25J15/0095 , H01L21/67766 , Y10T74/20305 , Y10T74/20317
摘要： There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.
摘要翻译：提供了一种用于提供物体的精确运动的机器人引导组件，特别是用于提供包括具有至少一个机器人手臂的机器人的诸如晶片的盘状构件的精确运动。所述至少一个机器人臂具有自由端和固定端。机器人可以在至少一个移动平面中移动至少一个机器人手臂的自由端。组件还包括用于精确地引导至少一个移动平面中的至少一个机器人臂的自由端的引导装置。还提供了用于检查物体表面的方法。

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