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    • 1. 发明授权
    • Electrostatically-actuated structures for fluid property measurements
and related methods
    • 用于流体性质测量的静电致动结构和相关方法
    • US5955659A
    • 1999-09-21
    • US5919
    • 1998-01-13
    • Raj K. GuptaStephen D. Senturia
    • Raj K. GuptaStephen D. Senturia
    • G01F1/28G01F1/38G01F1/50G01L21/02G01N11/00G01N27/00H01L29/84
    • G01L9/0073G01F1/28G01F1/383G01F1/50G01L21/02G01N11/00
    • A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.
    • 流体特性传感器包括其上具有第一电极的基板和邻近基板的柔性部件和第一电极,其中柔性部件包括第二电极。 信号发生器跨越第一和第二电极产生预定的电信号,使得在第一和第二电极之间产生静电力,并且使得所述柔性构件偏转预定距离。 测量电路测量产生预定电信号和柔性构件的偏转到预定距离之间的时间间隔,并且基于时间间隔确定与柔性构件相邻的流体的性质。 例如,传感器可用于确定流体的粘度。 或者,流体可以是可压缩气体,并且传感器可以用于确定气体的压力。 还讨论了相关方法。
    • 2. 发明授权
    • Insect containing test apparatus
    • 含昆虫检测仪
    • US5074247A
    • 1991-12-24
    • US652857
    • 1991-02-11
    • Raj K. GuptaLouis C. RutledgeWilliam J. Letourneau
    • Raj K. GuptaLouis C. RutledgeWilliam J. Letourneau
    • A01K1/03A01K67/033
    • A01K1/031A01K67/033
    • An insect containing test apparatus which is applied to a skin region of aest subject includes a rectangular slide and test cage made of a clear, autoclavable polycarbonate plastic. The test cage is injection molded to a generally rectangular shape and includes a peripheral flange extending outwardly from sides at an open top. A screen member covering the open top is then heat pressed onto this flange. Test holes are also punched into the bottom the test cage. During injection molding, U-shaped channels along each respective longitudinal side adjacent the bottom are also provided to receive the slide so that the slide is selectively moved to cover and uncover the test holes in the bottom.
    • 应用于受试对象的皮肤区域的含昆虫的测试装置包括由透明的耐高压灭菌的聚碳酸酯塑料制成的矩形滑块和测试笼。 测试笼注塑成一个大致矩形的形状,并且包括一个在敞开的顶部从侧面向外延伸的周边凸缘。 然后将覆盖开口顶部的筛网部件热压到该凸缘上。 测试孔也被冲压到底部。 在注射成型期间,沿着与底部相邻的每个相应纵向侧的U形通道也被设置成接收滑动件,使得滑动件被选择性地移动以覆盖和露出底部的测试孔。
    • 4. 发明授权
    • Characterization of microelectromechanical structures
    • 微机电结构的表征
    • US06542829B1
    • 2003-04-01
    • US09668013
    • 2000-09-21
    • Raj K. Gupta
    • Raj K. Gupta
    • G01B300
    • B81C99/006H03H3/0072
    • Accurate characterization of microelectromechanical systems (MEMS) geometry is critical for device design and simulation, for material property extraction, and for post-fabrication trimming. According to the present embodiment, a method for characterizing parameters describing MEMS structures resulting from the fabrication process or process variations is presented. According to the prefered embodiment, experimentally obtained natural frequencies are compared with numerical simulations to identify unknown values of structural parameters or parameter variations. Further, the prefered embodiment teaches how electrostatically-driven laterally resonant comb-drive MEMS test structures with prescribed changes in spring width are used to characterize systematic variations in process offsets and sidewall angles. The disclosed technique is both in-situ and non-destructive.
    • 微机电系统(MEMS)几何的精确表征对于器件设计和仿真,材料性质提取和后制造修剪至关重要。 根据本实施例,提出了描述由制造过程或工艺变化产生的描述MEMS结构的参数的方法。 根据优选实施例,将实验获得的固有频率与数值模拟进行比较,以识别结构参数或参数变化的未知值。 此外,优选的实施例教导了如何使用具有规定的弹簧宽度变化的静电驱动侧向谐振梳状驱动MEMS测试结构来表征过程偏移和侧壁角度的系统变化。 所公开的技术既是现场的也是非破坏性的。