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1. 发明授权

US07689315B2 Semiconductor equipment control system and method 失效
标题翻译：半导体设备控制系统及方法
公开(公告)号：US07689315B2
公开(公告)日：2010-03-30
申请号：US11877542
申请日：2007-10-23
申请人： Pyong-II Cho , Hyun-Sik Sim , Kyoung-Hwan Choi
发明人： Pyong-II Cho , Hyun-Sik Sim , Kyoung-Hwan Choi
IPC分类号： G06F19/00 , G05B11/01 , G06F11/30 , G21C17/00
CPC分类号： G05B19/042 , G05B2219/2602
摘要： A semiconductor equipment control system and method is provided. The semiconductor equipment control system preferably includes semiconductor equipment having a process recipe stored therein and a host connected to the semiconductor equipment through a network. The host preferably includes a database in which a reference recipe is stored and is preferably configured to receive and compare a final modification time of the process recipe with a final modification time of the reference recipe. When the final modifications times are equal, the host is preferably configured to instruct the semiconductor equipment to perform a process according to the process recipe. When the final modification times are different, the host is preferably configured to check a recipe body of the process recipe against a recipe body of the reference recipe to determine if the process recipe is within an established tolerance. If the process recipe is within tolerance, the host may instruct the semiconductor equipment to perform the process according to the process recipe. If the process recipe is not within tolerance, the host preferably interlocks the process. Using this semiconductor equipment and control method, unconditional checking of the process recipe body can be eliminated, thereby resulting in significant time savings and a more efficient manufacturing process.
摘要翻译：提供了一种半导体设备控制系统和方法。半导体设备控制系统优选地包括其中存储有工艺配方的半导体设备和通过网络连接到半导体设备的主机。主机优选地包括其中存储参考食谱的数据库，并且优选地被配置为接收和比较处理食谱的最终修改时间与参考食谱的最终修改时间。当最终修改时间相等时，主机优选地被配置为指示半导体设备执行根据处理配方的处理。当最终修改时间不同时，主机优选地被配置为根据参考食谱的配方主体检查处理配方的配方主体，以确定处理配方是否在建立的公差内。如果处理配方在公差范围内，则主机可以指示半导体设备根据处理配方进行处理。如果工艺配方不在公差范围内，则主机优选地将该过程互锁。利用这种半导体设备和控制方法，可以消除对过程配方体的无条件检查，从而节省大量的时间和更高效的制造过程。

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