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    • 2. 发明授权
    • Transparent measuring probe for beam scanning
    • US10508950B2
    • 2019-12-17
    • US16063261
    • 2016-11-29
    • Primes GmbH Meßtechnik für die Produktion mit laserstrahlung
    • Reinhard KramerOtto MärtenStefan WolfRoman Niedrig
    • G01J1/42G01J1/04
    • The invention relates to a measuring probe for scanning light beams (10) or laser beams. The measuring probe is suitable for scanning laser beams with very high power and for determining geometric parameters of a light beam (10) with high spatial resolution. For this purpose, a device is proposed which comprises a body (20), a probe area (30) and a detector (40). The body (20) is made of an optically transparent material and has a light beam entry surface (22), a light beam exit surface (23) and a detection light exit surface (25). The light beam entry surface (22) and the light beam exit surface (23) are for the most part smooth and polished. The body (20) includes the probe area (30) having light-deflecting structuring. The detector (40) is designed to detect at least part of the beam portion (15) deflected from the light beam (10) by the probe area (30). The body (20) and the light beam (10) are movable in two different directions of movement (51, 52) perpendicular to the direction of the axis (11) of the light beam (10) relative to each other. The probe area (30) has a shape whose two-dimensional projection on a surface perpendicular to the axis (11) of the light beam (10) approximately the same dimensions in the two different directions of movement (51, 52) perpendicular to the axis (11) of the light beam (10).