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    • 1. 发明申请
    • MEMS OSCILLATOR
    • MEMS振荡器
    • US20120086514A1
    • 2012-04-12
    • US13271970
    • 2011-10-12
    • Petrus Antonius Thomas Marinus VermeerenJozef Thomas Martinus van Beek
    • Petrus Antonius Thomas Marinus VermeerenJozef Thomas Martinus van Beek
    • H03F3/04H03B5/32
    • H03H9/02259H03B5/30
    • A piezoresistive MEMS oscillator uses an output circuit to control the voltage across the resonator body. This results in a DC bias of the resonator. A current path is provided between the output of the output circuit and the resonator body such that changes in current through or voltage across the resonator body, resulting from changes in resistance of the resonator body, are coupled to the output. This arrangement uses the bias current flowing through the resonator to derive the output. In this way, the same DC current is used to provide the required DC resonator bias and to drive the output circuit to its DC operating point. The benefit of this arrangement is a reduced power-consumption.In addition, when using an arrangement where a virtual-earth for the resonator to amplifier connection is employed, a reduced sensitivity for bond pad capacitances and other stray capacitances is obtained.
    • 压阻MEMS振荡器使用输出电路来控制谐振器本体上的电压。 这导致谐振器的直流偏置。 在输出电路的输出和谐振器本体之间提供电流路径,使得由谐振器本体的电阻变化导致的谐振器本体上的电流或电压的变化与输出耦合。 这种布置使用流过谐振器的偏置电流来导出输出。 以这种方式,使用相同的直流电流来提供所需的DC谐振器偏置并将输出电路驱动到其DC工作点。 这种安排的好处是降低功耗。 此外,当使用用于谐振器的虚拟地球到放大器连接的布置时,获得了对焊盘电容和其他杂散电容的灵敏度的降低。