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    • 5. 发明授权
    • Indexing rotatable chuck for a probe station
    • 用于探针台的可转动卡盘分度
    • US06771090B2
    • 2004-08-03
    • US10179796
    • 2002-06-24
    • Daniel L. HarrisPeter R. McCann
    • Daniel L. HarrisPeter R. McCann
    • G01R3126
    • H01L21/6835G01R1/0408G01R31/2831H01L21/67271
    • The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting member's diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.
    • 在进行测试的集成电路(IC)上的测试点的布置通常需要在进行一系列测试时旋转IC或探头。 具有分度旋转的卡盘促进被测设备的快速旋转到新的测试位置,并且提高探测台的生产率。 被测装置安装在固定在旋转安装在基座中的轴上的装置安装构件上。 弹性密封件支撑装置安装构件并且在装置安装构件的该区域的大部分上形成密封室。 对密封室施加真空或压力促使装置安装构件和底座接触。 在装置安装构件的直径的大部分上由弹性密封件提供的支撑促进了装置安装构件的稳定性和一致的平面度,而不考虑轴与装置安装构件的取向。
    • 6. 发明授权
    • Indexing rotatable chuck for a probe station
    • 用于探针台的可转动卡盘分度
    • US06483336B1
    • 2002-11-19
    • US09564591
    • 2000-05-03
    • Daniel L. HarrisPeter R. McCann
    • Daniel L. HarrisPeter R. McCann
    • G01R3126
    • H01L21/6835G01R1/0408G01R31/2831H01L21/67271
    • The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting member's diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.
    • 在进行测试的集成电路(IC)上的测试点的布置通常需要在进行一系列测试时旋转IC或探头。 具有分度旋转的卡盘促进被测设备的快速旋转到新的测试位置,并且提高探测台的生产率。 被测装置安装在固定在旋转安装在基座中的轴上的装置安装构件上。 弹性密封件支撑装置安装构件并且在装置安装构件的该区域的大部分上形成密封室。 对密封室施加真空或压力促使装置安装构件和底座接触。 在装置安装构件的直径的大部分上由弹性密封件提供的支撑促进了装置安装构件的稳定性和一致的平面度,而不考虑轴与装置安装构件的取向。