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1. 发明申请

US20120073958A1 TUBULAR TARGET AND PRODUCTION METHOD 审中-公开
标题翻译：管状目标和生产方法
公开(公告)号：US20120073958A1
公开(公告)日：2012-03-29
申请号：US13310140
申请日：2011-12-02
申请人： PETER ABENTHUNG , KARL HUBER , HARALD LACKNER , GERHARD LEICHTFRIED , PETER POLCIK , CHRISTIAN WERATSCHNIG
发明人： PETER ABENTHUNG , KARL HUBER , HARALD LACKNER , GERHARD LEICHTFRIED , PETER POLCIK , CHRISTIAN WERATSCHNIG
IPC分类号： C23C14/14 , C23C14/34
CPC分类号： C23C14/3414 , B22F3/20 , B22F5/106 , B22F7/08 , B22F2998/10 , C22C1/045 , B22F3/04 , B22F3/1007 , B22F2003/208 , B22F2003/248 , B22F3/17
摘要： A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
摘要翻译：由钼或钼合金形成的管状靶的氧含量小于50μg/ g，密度大于理论密度的99％，平均粒径小于100μm。钼或钼合金管可以通过挤压生产。在一个实施例中，钼管具有钛或钛合金的背衬管。在一个实施例中，钼管具有随其端部的增加而变化的壁厚。

2. 发明申请

US20070086909A1 Method of producing a tubular target 审中-公开
标题翻译：管状靶材的制造方法
公开(公告)号：US20070086909A1
公开(公告)日：2007-04-19
申请号：US11581698
申请日：2006-10-16
申请人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
发明人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
IPC分类号： B22F5/12
CPC分类号： C23C14/3414 , B22F3/20 , B22F5/106 , B22F7/08 , B22F2998/10 , C22C1/045 , B22F3/04 , B22F3/1007 , B22F2003/208 , B22F2003/248 , B22F3/17
摘要： A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.
摘要翻译：一种生产由钼或钼合金形成的管状靶的方法，该方法的氧含量小于50mug / g，密度大于理论密度的99％，平均粒径小于100μm，连接到支撑管。钼或钼合金管是通过挤压生产的。

3. 发明申请

US20060246320A1 Coated tool 有权
标题翻译：涂层工具
公开(公告)号：US20060246320A1
公开(公告)日：2006-11-02
申请号：US11415050
申请日：2006-05-01
申请人： Martin Kathrein , Claude Michotte , Peter Polcik
发明人： Martin Kathrein , Claude Michotte , Peter Polcik
IPC分类号： B32B9/00 , C23C14/00
CPC分类号： C22C30/00 , C22C14/00 , C23C14/0641 , C23C30/005 , Y10T428/24975
摘要： A tool consists of a base material selected from cemented carbide, tool steels, cermet, or hard materials, and a coating of two or more layers. At least one coating layer has the composition Ti—Al—Ta—N and at least one further coating layer has the composition Ti—Al—Ta—Me—N. The component Me is one more elements selected from the group consisting of Si, V, B. The tool, which is preferably a wearing part, is distinguished by a high wear resistance that improves the service life, in particular where high demands are imposed on the tool.
摘要翻译：工具包括由具有钛 - 铝 - 氮化钽和钛 - 铝 - 钽 - （硅，钒或硼）氮化物的组成的≥2个涂层形成的涂层。工具包括由硬质合金，金属陶瓷，硬质材料或工具钢组成的基材; 涂层由≥2个涂层形成，总涂层厚度为0.5-15μm，涂层厚度为0.0003-5.0μm，涂层具有组成（TiaAlbTac）N和（ TidAlcTafMg） a + b + c，d + e + f + g = 1; b = 0.3-0.75; c = 0.001-0.30，优选0.01-0.25; e =大于0.50，小于0.70; f = 0-0.25，优选0.002-0.10; M = Si，V和/或B，其中，对于Si，V和B，g为0.0005-0.10，优选为0.001-0.03; 0.001-0.25，优选0.10-0.20; 和0.00005-0.01，优选为0.0001-0.005。还包括两个独立权利要求，用于在由30-75原子％铝，0.1-30原子％钽和余量钛组成的物理气相沉积（PVD）工艺中涂覆工具的溅射靶。

4. 发明授权

US09890451B2 Tubular target and production method 有权
公开(公告)号：US09890451B2
公开(公告)日：2018-02-13
申请号：US13310140
申请日：2011-12-02
申请人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
发明人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
IPC分类号： C23C14/34 , B22F3/20 , B22F5/10 , B22F7/08 , C22C1/04
CPC分类号： C23C14/3414 , B22F3/20 , B22F5/106 , B22F7/08 , B22F2998/10 , C22C1/045 , B22F3/04 , B22F3/1007 , B22F2003/208 , B22F2003/248 , B22F3/17
摘要： A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.

5. 发明授权

US08900340B2 Tubular target and production method 有权
标题翻译：管状靶和生产方法
公开(公告)号：US08900340B2
公开(公告)日：2014-12-02
申请号：US13310147
申请日：2011-12-02
申请人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
发明人： Peter Abenthung , Karl Huber , Harald Lackner , Gerhard Leichtfried , Peter Polcik , Christian Weratschnig
IPC分类号： B22F9/00 , C22C5/00
CPC分类号： C23C14/3414 , B22F3/20 , B22F5/106 , B22F7/08 , B22F2998/10 , C22C1/045 , B22F3/04 , B22F3/1007 , B22F2003/208 , B22F2003/248 , B22F3/17
摘要： A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.
摘要翻译：管状靶由钼或钼合金形成，该钼或钼合金的氧含量小于50μg/ g，密度大于理论密度的99％，平均粒径小于100μm。钼或钼合金管可以通过挤出制造，并且其形成有壁朝向管的端部增加的壁。钼管具有钛或钛合金的背衬管，其内部具有材料接合连接。或者，背衬管由奥氏体钢或铜合金形成。

6. 发明申请

US20130199929A1 COATING SOURCE AND PROCESS FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：涂料来源及其生产工艺
公开(公告)号：US20130199929A1
公开(公告)日：2013-08-08
申请号：US13641350
申请日：2011-04-12
申请人： Peter Polcik , Conrad Polzer , Matthias Perl , Stefan Schlichtherle , Georg Strauss
发明人： Peter Polcik , Conrad Polzer , Matthias Perl , Stefan Schlichtherle , Georg Strauss
IPC分类号： C23C14/34 , C23C14/32
CPC分类号： C23C14/3414 , B22F7/06 , B22F7/08 , C23C14/325 , H01J37/34 , H01J37/3426 , H01J37/3429
摘要： A coating source for physical vapor deposition has at least one component, which has been produced from at least one pulverulent starting material in a powder metallurgy production process and at least one ferromagnetic region embedded in the component. The at least one ferromagnetic region, is introduced into the component and fixedly connected to the component during the powder metallurgy production process.
摘要翻译：用于物理气相沉积的涂料源具有至少一种组分，其在粉末冶金生产方法中由至少一种粉状起始材料和嵌入该组分中的至少一个铁磁区域制备。在粉末冶金生产过程中，将至少一个铁磁区域引入组件中并与组件固定连接。

7. 发明申请

US20120073959A1 TUBULAR TARGET AND PRODUCTION METHOD 有权
标题翻译：管状目标和生产方法
公开(公告)号：US20120073959A1
公开(公告)日：2012-03-29
申请号：US13310147
申请日：2011-12-02
申请人： PETER ABENTHUNG , KARL HUBER , HARALD LACKNER , GERHARD LEICHTFRIED , PETER POLCIK , CHRISTIAN WERATSCHNIG
发明人： PETER ABENTHUNG , KARL HUBER , HARALD LACKNER , GERHARD LEICHTFRIED , PETER POLCIK , CHRISTIAN WERATSCHNIG
IPC分类号： C23C14/18 , C23C14/34
CPC分类号： C23C14/3414 , B22F3/20 , B22F5/106 , B22F7/08 , B22F2998/10 , C22C1/045 , B22F3/04 , B22F3/1007 , B22F2003/208 , B22F2003/248 , B22F3/17
摘要： A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.
摘要翻译：管状靶由钼或钼合金形成，该钼或钼合金的氧含量小于50μg/ g，密度大于理论密度的99％，平均粒径小于100μm。钼或钼合金管可以通过挤出制造，并且其形成有壁朝向管的端部增加的壁。钼管具有钛或钛合金的背衬管，其内部具有材料接合连接。或者，背衬管由奥氏体钢或铜合金形成。

8. 发明授权

US07521132B2 Coated tool 有权
标题翻译：涂层工具
公开(公告)号：US07521132B2
公开(公告)日：2009-04-21
申请号：US11415050
申请日：2006-05-01
申请人： Martin Kathrein , Claude Michotte , Peter Polcik
发明人： Martin Kathrein , Claude Michotte , Peter Polcik
IPC分类号： B23B27/14
CPC分类号： C22C30/00 , C22C14/00 , C23C14/0641 , C23C30/005 , Y10T428/24975
摘要： A tool consists of a base material selected from cemented carbide, tool steels, cermet, or hard materials, and a coating of two or more layers. At least one coating layer has the composition Ti—Al—Ta—N and at least one further coating layer has the composition Ti—Al—Ta-Me-N. The component Me is one more elements selected from the group consisting of Si, V, B. The tool, which is preferably a wearing part, is distinguished by a high wear resistance that improves the service life, in particular where high demands are imposed on the tool.
摘要翻译：工具由选自硬质合金，工具钢，金属陶瓷或硬质材料的基材，以及两层或多层涂层组成。至少一层涂层具有Ti-Al-Ta-N组成，至少一层另外的涂层具有Ti-Al-Ta-Me-N组成。组分Me是选自Si，V，B中的一种以上的元素。该工具优选是易磨损部件，其特征在于高耐磨性，这提高了使用寿命，特别是在对高度要求工具。

9. 发明授权

US06908588B2 Process for manufacturing an evaporation source 有权
标题翻译：蒸发源的制造方法
公开(公告)号：US06908588B2
公开(公告)日：2005-06-21
申请号：US10167787
申请日：2002-06-12
申请人： Peter Wilhartitz , Stefan Schönauer , Peter Polcik
发明人： Peter Wilhartitz , Stefan Schönauer , Peter Polcik
IPC分类号： B22F3/17 , B22F3/14 , B22F3/20 , B22F7/06 , C22C14/00 , C23C14/34 , B22F7/02
CPC分类号： H01J37/3491 , B22F3/14 , B22F7/06 , B22F2999/00 , C23C14/3414 , B22F3/17 , B22F3/20
摘要： The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.
摘要翻译：本发明涉及一种用于制造用于物理气相沉积的蒸发源的方法。蒸发源由具有铝组分和一种或多种其它组分的实际溅射靶形成，以及由具有比靶更好的导热性的材料制成的背板。将由粉末原料制成的背板与溅射靶的粉末组分一起压制成夹层粉末部分，然后形成。

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