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1. 发明授权

US06552806B1 Automated minimization of optical path difference and reference mirror focus in white-light interference microscope objective 失效
标题翻译：自动最小化光路差异和参考镜焦点在白光干涉显微镜物镜中
公开(公告)号：US06552806B1
公开(公告)日：2003-04-22
申请号：US09497567
申请日：2000-02-03
申请人： Richard W. Swinford , David J. Aziz , Bryan W. Guenther , Paul R. Unruh
发明人： Richard W. Swinford , David J. Aziz , Bryan W. Guenther , Paul R. Unruh
IPC分类号： G01B902
CPC分类号： G01B9/02087 , G01B9/02072 , G01B9/0209
摘要： Average fringe contrast is determined by PSI measurements at each step of relatively large translations of the reference optics and mirror of a white-light Linnik interference objective and the resulting data are used to minimize the OPD between the reference and test beam paths of the instrument. Utilizing the same algorithms used in the art to perform conventional vertical scanning interferometry, the position of minimum OPD is determined by finding the position of maximum average fringe contrast. Furthermore, by automating the system with a precise translation mechanism, operator-to-operator variations are completely eliminated and the precision of the process of OPD minimization is greatly improved. In another embodiment of the invention, the optimal focal position of the reference mirror is found at the same time by calculating the average lateral variation of fringe contrast as a function of OPD and focal position. The optimal OPD and focal position correspond to the maximum average lateral variation of fringe contrast in the resulting three-dimensional space.
摘要翻译：通过在参考光学器件和白光Linnik干涉物镜的反射镜的相对大的平移的每个步骤处的PSI测量来确定平均条纹对比度，并且使用所得数据来最小化仪器的参考和测试光束路径之间的OPD。利用本领域中使用的相同的算法来执行常规的垂直扫描干涉测量，通过找到最大平均条纹对比度的位置来确定最小OPD的位置。此外，通过使用精确平移机构自动化系统，完全消除了操作员到操作者的变化，并且大大提高了OPD最小化处理的精度。在本发明的另一个实施例中，通过计算作为OPD和焦点位置的函数的条纹对比度的平均横向变化，同时发现参考镜的最佳焦点位置。最佳OPD和焦点位置对应于所得三维空间中条纹对比度的最大平均横向变化。

2. 发明申请

US20120265487A1 Method and Apparatus of Analyzing Sample Surface Data 审中-公开
标题翻译：分析样品表面数据的方法和设备
公开(公告)号：US20120265487A1
公开(公告)日：2012-10-18
申请号：US13111789
申请日：2011-05-19
申请人： Emilio Yanine , Paul R. Unruh , Jon D. Herron, JR. , Michael B. Krell , Son H. Bui , Joseph P. Moore , Dmitriy K. Kiselev , Ross O. Smith
发明人： Emilio Yanine , Paul R. Unruh , Jon D. Herron, JR. , Michael B. Krell , Son H. Bui , Joseph P. Moore , Dmitriy K. Kiselev , Ross O. Smith
IPC分类号： G06F15/00 , G01B21/20
CPC分类号： G01Q30/04
摘要： An improved apparatus and method for the analysis of surface data collected using a sub-micron scale metrology instrument which provides a persistent user experience by allocating set portions of the display to major functional regions thereby allowing a quick to learn and easy to user interface for the setup, analysis, and display of microscopic 3D surface data measurements and resulting analytic data with a variety of 3D surface scanners.
摘要翻译：一种用于分析使用亚微米尺度计量仪器收集的表面数据的改进的装置和方法，其通过将显示器的集合部分分配给主要功能区域从而提供持久的用户体验，从而允许快速学习和容易地为使用各种3D表面扫描仪进行微观3D表面数据测量和结果分析数据的设置，分析和显示。

3. 发明授权

US07283250B2 Measurement of object deformation with optical profiler 有权
标题翻译：用光学轮廓仪测量物体变形
公开(公告)号：US07283250B2
公开(公告)日：2007-10-16
申请号：US10759686
申请日：2004-01-16
申请人： Joanna Schmit , Paul R. Unruh , Erik L. Novak
发明人： Joanna Schmit , Paul R. Unruh , Erik L. Novak
IPC分类号： G01B9/02
CPC分类号： G01B11/161
摘要： An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.
摘要翻译：干涉测量分析器用于通过修改扫描仪的运动来测量物体运动，使得每个扫描步骤的相位变化保持在用于计算相位变化的算法的可接受限度内。基于关于物体运动的性质或通过预校准获得的知识的现有知识或基于当前测量的实时反馈，扫描器运动被如此操纵。通过在扫描期间从对象位置减去扫描仪位置，从扫描信息中恢复物体运动。

4. 发明授权

US07119909B2 Film thickness and boundary characterization by interferometric profilometry 有权
标题翻译：薄膜厚度和通过干涉测量轮廓测定的边界表征
公开(公告)号：US07119909B2
公开(公告)日：2006-10-10
申请号：US10869138
申请日：2004-06-16
申请人： Paul R. Unruh , Joanna Schmit , Erik L. Novak
发明人： Paul R. Unruh , Joanna Schmit , Erik L. Novak
IPC分类号： G01B9/02 , G01B11/28
CPC分类号： G01B11/0675
摘要： Two threshold parameters are used to identify the intensity modulation peaks corresponding to the interfaces of the two sides of a thin film with the adjacent media. The first parameter is used to distinguish modulation data from noise and is set on the basis of actual background noise data measured during the interferometric scan. The second parameter is used to separate actual contrast data from signals of relatively high modulation that satisfy the first parameter but do not in fact result from interference fringes. Data that satisfy both parameters are considered valid modulation data and the peak of each modulation envelope is then calculated using conventional means. The thickness of the film at each pixel is obtained by dividing the scanning distance corresponding to the two peaks by the group index of refraction of the film material.
摘要翻译：使用两个阈值参数来识别与相邻介质的薄膜的两侧的界面相对应的强度调制峰值。第一个参数用于区分调制数据和噪声，并根据干涉扫描期间测量的实际背景噪声数据设置。第二个参数用于将实际的对比度数据与满足第一个参数的相对较高的调制信号进行分离，但实际上并不是由干扰条纹引起的。满足这两个参数的数据被认为是有效的调制数据，然后使用常规方法计算每个调制包络的峰值。通过将对应于两个峰的扫描距离除以膜材料的折射率折射率来获得每个像素处的膜的厚度。

5. 发明授权

US5726754A Variable-speed scanning for interferometric measurements 失效
标题翻译：用于干涉测量的可变速扫描
公开(公告)号：US5726754A
公开(公告)日：1998-03-10
申请号：US697865
申请日：1996-08-30
申请人： Michael P. Andrews , Paul R. Unruh
发明人： Michael P. Andrews , Paul R. Unruh
IPC分类号： G01B11/02 , G01B11/24 , G01B9/02
CPC分类号： G01B11/2441 , G01B11/026
摘要： A method of operation of a scanning mechanism that produces multiple constant-speed translations within the scanning range of operation. According to one aspect of the invention, when the instrument translates over a region where useful fringes are substantially absent, such as over the steep portion of a step discontinuity, the scanner is quickly accelerated to a higher constant speed and collection of intensity data is stopped until it reaches a new region of observable fringes. The scanner then is quickly decelerated to a slower constant speed and acquisition of intensity data resumes. According to another aspect of the invention, the position of the scanner during the nonlinear transition between regions of different constant speeds is determined by applying a transition factor based on the rate of acceleration (or deceleration) during the transition period. A practical transition factor is advantageously determined by assuming constant acceleration (or deceleration) during each transition between periods of constant-speed operation.
摘要翻译：一种在扫描操作范围内产生多个恒速平移的扫描机构的操作方法。根据本发明的一个方面，当仪器在实际上不存在有用条纹的区域（例如在台阶不连续部分的陡峭部分上）之后，将扫描仪快速加速到更高的恒定速度，并且停止收集强度数据直到它到达可观察条纹的新区域。然后，扫描仪快速减速到较慢的恒定速度，恢复强度数据的采集。根据本发明的另一方面，通过在过渡期间施加基于加速度（或减速度）的转换因子来确定扫描器在不同恒定速度的区域之间的非线性转变期间的位置。有利的是，通过在恒定速度操作的周期期间的每个转换期间假定恒定的加速度（或减速度）来有利地确定实际的转换因子。

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