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    • 2. 发明授权
    • SPM sensor
    • SPM传感器
    • US07536901B2
    • 2009-05-26
    • US11283325
    • 2005-11-18
    • Oliver KrauseChristoph LehrerSilke Petersen
    • Oliver KrauseChristoph LehrerSilke Petersen
    • G12B21/08
    • G01Q70/12
    • An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The electron beam induced deposition (EBID or, shorter, EBD) structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.
    • 一种用于具有悬臂(3)的扫描探针显微镜的SPM传感器(1),在悬臂(3)的一端处的保持元件(2)和在悬臂(3)的另一端处的传感器尖端(4) 以及这种类型的传感器的制造方法。 电子束感应沉积(EBID或更短的EBD)结构(5)被直接锚定在传感器尖端(4)的基底中。 EBD结构(5)的锚定在正向和非正向接合在传感器尖端(4)中的孔(6)中进行,其通过在传感器尖端(4)的基底中的材料去除而产生。 该方法包括通过在传感器尖端的孔中的粒子束感应材料沉积来产生EBD结构。
    • 3. 发明申请
    • Apparatus and process for the surface coating of workpieces
    • 工件表面涂层的设备和工艺
    • US20060124768A1
    • 2006-06-15
    • US11285097
    • 2005-11-22
    • Theo HartmannThomas SulzbachChristoph RichterHans-Jurgen LudgeOliver Krause
    • Theo HartmannThomas SulzbachChristoph RichterHans-Jurgen LudgeOliver Krause
    • B05B1/28B05B7/04A62C31/00
    • B05B14/30B05B12/22B05B15/62
    • An apparatus (1) and a process for the surface coating of workpieces (3), having an applicator nozzle (2) for applying a coating agent to a surface of the workpiece (3) which is to be coated, and having a suction device for discharging the air laden with coating agent vapors and/or coating agent mists, wherein the applicator nozzle (2) and the workpiece (3) are movable relative to one another. A suction bell (4), which engages over an applicator nozzle opening (9) of the applicator nozzle (2) and is rigidly connected to an applicator nozzle wall (14) of the applicator nozzle (2), is arranged downstream of the applicator nozzle (2). The suction bell (4) is a short distance from the workpiece (3) and comprises an inner bell (5) and an outer bell (6), the inner bell (5) delimits a spraying space (7) and the outer bell (6) forms a suction space (8) with a suction intake opening (10) between itself and the inner bell (5).
    • 一种设备(1)和用于表面涂覆工件(3)的方法,具有用于将涂层剂涂覆到待涂覆的工件(3)的表面上并具有抽吸装置(3)的涂布器喷嘴(2) 用于通过涂覆剂蒸气和/或涂层剂雾来排出负载的空气,其中施加喷嘴(2)和工件(3)可相对于彼此移动。 在施涂喷嘴(2)的施用喷嘴开口(9)上接合并刚性地连接到施用喷嘴(2)的施用喷嘴壁(14)的吸入口(4)布置在施加器的下游 喷嘴(2)。 吸气钟(4)距工件(3)很短的距离,包括一个内钟(5)和一个外钟(6),内钟(5)限定一个喷洒空间(7)和外钟 6)在其与内钟(5)之间形成具有吸入口(10)的吸入空间(8)。
    • 5. 发明申请
    • SPM sensor
    • SPM传感器
    • US20060123894A1
    • 2006-06-15
    • US11283325
    • 2005-11-18
    • Oliver KrauseChristoph LehrerSilke Petersen
    • Oliver KrauseChristoph LehrerSilke Petersen
    • G01B5/28
    • G01Q70/12
    • An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.
    • 一种用于具有悬臂(3)的扫描探针显微镜的SPM传感器(1),在悬臂(3)的一端处的保持元件(2)和在悬臂(3)的另一端处的传感器尖端(4) 以及这种类型的传感器的制造方法。 EBD结构(5)直接锚定在传感器尖端(4)的基板中。 EBD结构(5)的锚定在正向和非正向接合在传感器尖端(4)中的孔(6)中进行,其通过在传感器尖端(4)的基底中的材料去除而产生。 该方法包括通过在传感器尖端的孔中的粒子束感应材料沉积来产生EBD结构。