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    • 1. 发明授权
    • Ultraviolet laser device
    • 紫外线激光装置
    • US06785319B1
    • 2004-08-31
    • US09926662
    • 2002-02-07
    • Tatsuya ArigaTakahito KumazakiJun AkitaNoritoshi Itoh
    • Tatsuya ArigaTakahito KumazakiJun AkitaNoritoshi Itoh
    • H01S308
    • H01S3/03H01S3/08009H01S3/134H01S3/225
    • A narrow band ultraviolet laser device which can restrict a change in temperature gradient at light transmitting sections and maintain laser light at a high grade. To this end, the ultraviolet laser device includes light shielding elements (37A to 37C) having light transmitting sections (47A to 47C) each constituted by an opening for transmitting laser light (11), and light shielding sections (49A to 49C) that surround the light transmitting sections (47A to 47C), remove an undesired laser light (11A) from an optical path and shape the laser light (11) into a predetermined form, wherein heating means (45) for heating the light transmitting sections (47A to 47C) are provided in the vicinity of the light shielding elements (37A to 37C).
    • 窄带紫外线激光装置,能够限制透光部的温度梯度的变化,将激光维持在高档。 为此,紫外线激光装置包括具有透光部(47A〜47C)的遮光元件(37A〜37C),各透光部由用于透射激光的开口(11)构成,遮光部(49A〜49C) 光传输部分(47A至47C),从光路去除不需要的激光(11A)并将激光(11)形成预定形式,其中加热装置(45)用于加热光传输部分(47A至 47C)设置在遮光元件(37A〜37C)附近。