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    • 7. 发明授权
    • Fault diagnosis apparatus
    • 故障诊断装置
    • US07174264B2
    • 2007-02-06
    • US10889055
    • 2004-07-13
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • G01M13/00
    • B41J29/38
    • A fault diagnosis section activates a driving component alone, measures an operation state signal and a paper passage time, and stores feature values (Vm, ov, Tqs, ots) extracted as a determination reference in a storage medium. A paper passage fault determination section determines whether or not a fault has arisen on the basis of the paper passage time when an apparatus is under normal operating conditions. A diagnosis target block determination section determines an order to operate a detail fault diagnosis when it is determined that there is a plurality of diagnosis target blocks. When the driving component is activated alone under actual operation conditions, the operation state signal Vf is obtained, and an operation state fault determination section conducts diagnosis on whether or not a fault has arisen on the driving component and a state of the fault, and whether or not a fault has arisen on other power transmission components and a nature of fault with reference to the feature values as the determination reference on the basis of a degree of deviation from a normal range.
    • 故障诊断部分单独激活驱动部件,测量操作状态信号和纸张通过时间,并将作为确定基准提取的特征值(Vm,ov,Tqs,ots)存储在存储介质中。 纸通过故障判定部根据设备处于正常工作条件下的纸张通过时间来判定故障是否发生。 当确定存在多个诊断目标块时,诊断目标块确定部分确定操作细节故障诊断的顺序。 当在实际操作条件下单独激活驱动部件时,获得操作状态信号Vf,并且操作状态故障确定部分是否对驱动部件发生故障和故障状态进行诊断,以及是否 或者不是基于与正常范围的偏离程度参照作为确定参考的特征值而在其它动力传递部件和故障的性质上产生故障。
    • 8. 发明授权
    • Information processing system that processes portions of an application program using programmable logic circuits
    • 使用可编程逻辑电路处理应用程序的部分的信息处理系统
    • US06336209B1
    • 2002-01-01
    • US09280681
    • 1999-03-29
    • Yoshio NishiharaYoshihide SatoNorikazu YamadaHiroyuki MiyakeEigo Nakagawa
    • Yoshio NishiharaYoshihide SatoNorikazu YamadaHiroyuki MiyakeEigo Nakagawa
    • G06F1750
    • G06F17/5054G06F15/7867
    • By reusing circuit information designed in the past, the amount of computation for combining circuit information for layout and wirings is significantly reduced. A memory part stores a plurality of pieces of circuit information for forming circuits in programmable logic circuits. Each of pieces of the circuit information has an identifier of its own circuit information, and in the case where part or all of the circuit information is formed with other circuit information, has the identifiers of the other circuit information as reference identifiers, as circuit data thereof. An acquisition part passes specification circuit information from an application program to an editing part, obtains circuit information of a specified circuit, sent from the editing part, and forms the specified circuit in the programmable logic circuits according to the circuit information. The editing part generates circuit information of a circuit specified by specification information from the acquisition part from circuit information of the specified circuit and other circuit information indicated by reference identifiers, obtained from the memory part.
    • 通过重用以往设计的电路信息,用于组合用于布局和布线的电路信息的计算量显着降低。 存储器部分存储用于在可编程逻辑电路中形成电路的多条电路信息。 电路信息中的每一个具有其自己的电路信息的标识符,并且在使用其他电路信息形成电路信息的一部分或全部的情况下,将其他电路信息的标识符作为参考标识符,作为电路数据 其中。 获取部件将规定电路信息从应用程序传递到编辑部分,获得从编辑部分发送的指定电路的电路信息,并根据电路信息在可编程逻辑电路中形成指定的电路。 编辑部分从存储部分获得的由指定电路的电路信息和由参考标识符指示的其他电路信息从获取部分指定的电路的电路信息生成。
    • 10. 发明授权
    • Substrate processing apparatus and substrate processing method using same
    • 基板处理装置及基板处理方法
    • US08568606B2
    • 2013-10-29
    • US12750015
    • 2010-03-30
    • Takeshi OhseShinji HimoriJun AbeNorikazu Yamada
    • Takeshi OhseShinji HimoriJun AbeNorikazu Yamada
    • C03C15/00
    • H01J37/02H01J37/32091H01J37/32146H01J37/32165
    • A substrate processing method uses a substrate processing apparatus including a chamber for accommodating a substrate, a lower electrode to mount the substrate, a first RF power applying unit for applying an RF power for plasma generation into the chamber, and a second RF power applying unit for applying an RF power for bias to the lower electrode. The RF power for plasma generation is controlled to be intermittently changed by changing an output of the first RF power applying unit at a predetermined timing. If no plasma state or an afterglow state exists in the chamber by a control of the first RF power applying unit, an output of the second RF power applying unit is controlled to be in an OFF state or decreased below an output of the second RF power applying unit when the output of the first RF power applying unit is a set output.
    • 基板处理方法使用基板处理装置,其包括用于容纳基板的室,用于安装基板的下电极,用于将用于等离子体产生的RF功率施加到室中的第一RF功率施加单元和第二RF功率施加单元 用于向下电极施加用于偏压的RF功率。 通过在预定的定时改变第一RF功率施加单元的输出来控制等离子体产生的RF功率间歇地改变。 如果通过第一RF功率施加单元的控制在腔室中不存在等离子体状态或余辉状态,则第二RF功率施加单元的输出被控制为处于OFF状态或降低到低于第二RF功率的输出 当第一RF功率施加单元的输出为设定输出时,施加单元。