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    • 1. 发明申请
    • TUNABLE OPTICAL SYSTEM WITH HYBRID INTEGRATED LASER
    • 具有混合集成激光器的光学系统
    • US20140079082A1
    • 2014-03-20
    • US13620410
    • 2012-09-14
    • Ningning FengXiaochen SunDawei Zheng
    • Ningning FengXiaochen SunDawei Zheng
    • H01S5/06H01L33/48
    • H01S5/141H01S5/0224H01S5/0612H01S5/101H01S5/1014H01S5/142
    • A tunable optical system with hybrid integrated semiconductor laser is provided. The optical system includes a silicon-on-insulator (SOI) substrate; a first optical waveguide tunable comb filter formed at the first side of the SOI substrate; a second optical waveguide tunable comb filter with detuned filter response formed at the first side of the SOI substrate; an etched laser pit at the first side of the SOI substrate; a plurality of spacers formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; a plurality of bumping pads formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; and a laser chip flip-chip bonded at the first side of the SOI substrate supported by the spacers. Heating sections may be provided on the filters to tune the filters.
    • 提供了具有混合集成半导体激光器的可调光学系统。 光学系统包括绝缘体上硅(SOI)衬底; 形成在SOI衬底的第一侧的第一光波导可调梳状滤波器; 第二光波导可调梳状滤波器,其在SOI衬底的第一侧形成有失谐滤波器响应; 在SOI衬底的第一侧的蚀刻激光坑; 多个间隔物,形成在所述SOI衬底的所述第一侧的平面附近的所述激光坑的底面上; 多个凸起焊盘,形成在所述SOI衬底的所述第一侧的平面附近的所述激光坑的底面上; 以及在由衬垫支撑的SOI衬底的第一侧上结合的激光芯片倒装芯片。 可以在过滤器上设置加热部分以调节过滤器。
    • 7. 发明授权
    • Tunable optical system with hybrid integrated laser
    • 具有混合集成激光器的可调谐光学系统
    • US08831049B2
    • 2014-09-09
    • US13620410
    • 2012-09-14
    • Ningning FengXiaochen SunDawei Zheng
    • Ningning FengXiaochen SunDawei Zheng
    • H01S3/10H01S3/081H01L33/48
    • H01S5/141H01S5/0224H01S5/0612H01S5/101H01S5/1014H01S5/142
    • A tunable optical system with hybrid integrated semiconductor laser is provided. The optical system includes a silicon-on-insulator (SOI) substrate; a first optical waveguide tunable comb filter formed at the first side of the SOI substrate; a second optical waveguide tunable comb filter with detuned filter response formed at the first side of the SOI substrate; an etched laser pit at the first side of the SOI substrate; a plurality of spacers formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; a plurality of bumping pads formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; and a laser chip flip-chip bonded at the first side of the SOI substrate supported by the spacers. Heating sections may be provided on the filters to tune the filters.
    • 提供了具有混合集成半导体激光器的可调光学系统。 光学系统包括绝缘体上硅(SOI)衬底; 形成在SOI衬底的第一侧的第一光波导可调梳状滤波器; 第二光波导可调梳状滤波器,其在SOI衬底的第一侧形成有失谐滤波器响应; 在SOI衬底的第一侧的蚀刻激光坑; 多个间隔物,形成在所述SOI衬底的所述第一侧的平面附近的所述激光坑的底面上; 多个凸起焊盘,形成在所述SOI衬底的所述第一侧的平面附近的所述激光坑的底面上; 以及在由衬垫支撑的SOI衬底的第一侧上结合的激光芯片倒装芯片。 可以在过滤器上设置加热部分以调节过滤器。