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1. 发明授权

US07180312B2 Probe card and method for manufacturing probe card 失效
公开(公告)号：US07180312B2
公开(公告)日：2007-02-20
申请号：US10395208
申请日：2003-03-25
申请人： Yoshikazu Arisaka , Kunihiro Itagaki , Shigenobu Ishihara , Tomohiro Giga , Naoyoshi Kikuchi
发明人： Yoshikazu Arisaka , Kunihiro Itagaki , Shigenobu Ishihara , Tomohiro Giga , Naoyoshi Kikuchi
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/07342 , H01L2924/0002 , H01L2924/00
摘要： A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.

2. 发明授权

US06407572B1 System and method for testing and evaluating a device 有权
标题翻译：用于测试和评估设备的系统和方法
公开(公告)号：US06407572B1
公开(公告)日：2002-06-18
申请号：US09654525
申请日：2000-09-01
申请人： Masahiro Kanase , Takayuki Katayama , Naoyoshi Kikuchi
发明人： Masahiro Kanase , Takayuki Katayama , Naoyoshi Kikuchi
IPC分类号： G01R3126
CPC分类号： G01R31/31901 , G01R31/31707
摘要： A system for testing and evaluating a device, such as a LSI device, by searching for a factor of defect of the device is disclosed, in which terminals are classified into a plurality of terminal types based on information related to various testing conditions, and data concerning the margin of the testing conditions is obtained by altering the testing conditions for every terminal type. Further, a factor of defect of a specific terminal type is searched for in accordance with the data concerning the margin of the testing conditions, and a defective terminal is detected from the specific terminal type. A method for testing and evaluating the device is also disclosed, which is executed by operating the system described above.
摘要翻译：公开了通过搜索设备的缺陷因素来测试和评估诸如LSI设备的设备的系统，其中基于与各种测试条件相关的信息将终端分类为多种终端类型，并且数据通过改变每种终端类型的测试条件来获得测试条件的边际。此外，根据关于测试条件的余量的数据来搜索特定终端类型的缺陷因素，并且从特定终端类型检测到有缺陷的终端。还公开了一种用于测试和评估该设备的方法，其通过操作上述系统来执行。

3. 发明申请

US20070134824A1 Probe card and method for manufacturing probe card 审中-公开
标题翻译：探针卡和制造探针卡的方法
公开(公告)号：US20070134824A1
公开(公告)日：2007-06-14
申请号：US11698036
申请日：2007-01-26
申请人： Yoshikazu Arisaka , Kunihiro Itagaki , Shigenobu Ishihara , Tomohiro Giga , Naoyoshi Kikuchi
发明人： Yoshikazu Arisaka , Kunihiro Itagaki , Shigenobu Ishihara , Tomohiro Giga , Naoyoshi Kikuchi
IPC分类号： H01L21/66
CPC分类号： G01R3/00 , G01R1/07342 , H01L2924/0002 , H01L2924/00
摘要： A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.
摘要翻译：低成本制造的探针卡。探针卡包括基板，柔性基板和接触探针。接触探针是由聚酰亚胺树脂形成的柔性基底。接触探针具有多条平行的线。每根线都有一个远端作为一个触点。接触探针通过切割具有以预定间距形成的多条平行线的通用基板来制造。并联线的数量等于LSI芯片的焊盘数量。

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