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    • 4. 发明授权
    • Photoelectric type displacement detecting instrument
    • 光电式位移检测仪
    • US4840488A
    • 1989-06-20
    • US086627
    • 1987-07-24
    • Yoshihiko KabayaNaofumi YasudaToshihiro Omi
    • Yoshihiko KabayaNaofumi YasudaToshihiro Omi
    • G01D5/347G01D5/36
    • G01D5/36G01D5/34715
    • A photoelectric type displacement detecting instrument comprising: a main optical lattice formed on a first member; an auxiliary optical lattice formed on a second member; a light emitter for emitting detecting light to the both optical lattices in a direction from the outer side of the second member to the first member; a light receiver opposed to the light emitter, interposing therebetween the both optical lattices, for receiving the detecting light transmitted through the both optical lattices, transducing changes in the value of the received light through the repeat of overlappings due to relative movements between the both optical lattices into electric signals; and an electronic circuit for calculating a relative moving distance between the main optical lattice and the auxiliary optical lattice on the basis of the electric signals. The auxiliary optical lattice is formed into a plurality of parts by a phase dividing frame; the light receiver is divided into a plurality of parts corresponding in number to the parts of the auxiliary optical lattice. The light emitter is of such an arrangement that the light diffused from a light emitting element is reflected in parallel in the direction of the main optical lattice and the auxiliary optical lattice, and transmitted through a surface, where the optical lattices are formed, perpendicularly.
    • PCT No.PCT / JP87 / 00154 Sec。 371日期1987年7月24日 102(e)1987年7月24日PCT PCT 1987年3月12日PCT公布。 公开号WO87 / 05693 日期:1987年9月24日。一种光电式位移检测仪,包括:形成在第一构件上的主光栅; 形成在第二构件上的辅助光栅; 光发射器,用于在从第二构件的外侧到第一构件的方向上向两个光栅发射检测光; 与光发射器相对的光接收器,插入两个光栅之间,用于接收透过两个光栅的检测光,通过由于两个光学元件之间的相对运动而导致的重复重复而导致的接收光的值的变化 格子变成电信号 以及电子电路,用于基于电信号计算主光栅和辅助光栅之间的相对移动距离。 辅助光栅由相位分割框形成多个部分; 光接收器被分成多个对应于辅助光栅的部分的部分。 光发射器具有这样的布置:从发光元件扩散的光在主光学晶格和辅助光学晶格的方向上被平行地反射,并通过形成光栅的表面垂直地透射。