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    • 2. 发明授权
    • Method and system for surface contouring
    • 表面轮廓的方法和系统
    • US4212073A
    • 1980-07-08
    • US969241
    • 1978-12-13
    • N. Balasubramanian
    • N. Balasubramanian
    • G01B11/25G01B11/24
    • G01B11/2527
    • A method and system for surface contouring including: projecting a sinusoidal pattern on a surface to be tested; shifting the pattern in three steps at one-quarter period intervals of the sinusoidal pattern; sensing the intensity of the radiation from the test surface through a mask containing the same sinusoidal pattern at at least one position of the surface at each of the steps; storing the intensity sensed at each position at each step; for each of the positions adding the intensity of the first and third steps to produce a d.c. spatial frequency amplitude, subtracting the intensity of the third step from that of the first to obtain the cosinusoidal spatial frequency amplitude, and subtracting the intensity of the second step from the d.c. amplitude to produce the sinusoidal spatial frequency amplitude; combining the sinusoidal and cosinusoidal amplitudes to produce a trigonometric function of the phase angle of the projected sinusoidal pattern on the test surface and generating from the trigonometric function of the phase angle an output representative of the height of the surface at each position.
    • 一种用于表面轮廓的方法和系统,包括:在要测试的表面上投射正弦图案; 以正弦曲线图形的四分之一周期间隔三步移动图案; 通过在每个步骤的表面的至少一个位置处含有相同正弦图案的掩模感测来自测试表面的辐射的强度; 存储在每个步骤处在每个位置处感测的强度; 对于添加第一和第三步骤的强度的每个位置产生直流。 空间频率幅度,从第一步骤减去第三步骤的强度以获得cosinusoidal空间频率幅度,并从d.c.减去第二步骤的强度。 振幅产生正弦空间频率幅度; 组合正弦和余弦振幅以产生测试表面上的投影正弦图案的相位角的三角函数,并从相位角的三角函数产生代表每个位置处表面高度的输出。
    • 3. 发明授权
    • Optical leverage telecentric scanning apparatus
    • 光学远程扫描仪
    • US4398787A
    • 1983-08-16
    • US274602
    • 1981-06-17
    • N. Balasubramanian
    • N. Balasubramanian
    • G02B26/10G02B27/17
    • G02B26/108
    • An optical leverage telecentric scanning apparatus for scanning a large fat film transparency at a given location is disclosed, wherein the scan pattern from the transparency is detected for optical power spectrum analysis. The scanning apparatus includes a collimated laser beam supply and a refraction device for laterally translating the collimated beam across the transparency. To magnify the collimated beam, an optical leverage device is provided including a first lens arranged between the laser beam supply device and the refraction device, and a scanning concave parabolic mirror arranged between the diffraction device and the transparency. The degree of magnification afforded by the optical leverage device is equal to the ratio of the focal lengths of the mirror to the first lens, respectively. A detector arranged on the opposite side of the transparency from the refraction device detects the scan pattern produced by the laser beam passing through the transparency.
    • 公开了一种用于在给定位置扫描大幅面胶片透明度的光学杠杆远心扫描装置,其中检测来自透明度的扫描图案用于光功率谱分析。 扫描装置包括准直激光束供应和折射装置,用于横向平移准直束穿过透明体。 为了放大准直光束,提供光学杠杆装置,其包括设置在激光束供给装置和折射装置之间的第一透镜,以及布置在衍射装置和透明体之间的扫描凹面抛物面镜。 由光学杠杆装置提供的倍率分别等于反射镜的焦距与第一透镜的比例。 布置在来自折射装置的透明体的相对侧上的检测器检测由穿过透明体的激光束产生的扫描图案。
    • 5. 发明授权
    • Heterodyne optical correlator
    • 异步光学相关器
    • US4158503A
    • 1979-06-19
    • US838288
    • 1977-09-30
    • N. Balasubramanian
    • N. Balasubramanian
    • G01C11/06G06E3/00G06K9/08
    • G01C11/06G06E3/003
    • A heterodyne optical correlator allows a correlation function to be computed for plural portions of a stereo pair of transparencies which is normalized to thus reduce the possibility of false correlation peaks. To obtain the correlation function, a pair of stereo transparencies are illuminated by an intense monochromatic light source producing an image at a common image plane in which a detector array is located. The relative path length, between source and transparencies, is periodically modulated producing at plural locations of the detector array plural alternating current signals representing the correlation between the amplitude transmittances at various corresponding locations on the transparencies for a given relative displacement between the transparencies. To normalize this correlation coefficient a second signal is produced by illuminating only one transparency and a corresponding third signal is produced by illuminating only the other transparency. The ratio between the correlation coefficient and twice the square root of the product of the second and third signals is a normalized correlation coefficient. Plotting the normalized correlation coefficient at each of the plurality of points in the transparencies as the relative positioning of the transparencies is shifted allows the correlation function and its peak to be determined. The relative positioning between the transparencies at the correlation peak is a measure of parallax.
    • 外差光学相关器允许针对立体对透明胶片的多个部分计算相关函数,其被归一化以因此降低假相关峰值的可能性。 为了获得相关功能,一对立体幻灯片被强烈的单色光源照亮,在一个检测器阵列所在的共同的图像平面上产生图像。 源和透明度之间的相对路径长度在检测器阵列的多个位置产生多个交流电信号,周期性地被调制,这些交流电信号表示透明胶片之间给定的相对位移之间透镜上各个相应位置处的幅度透射率之间的相关性。 为了归一化该相关系数,仅通过仅照射一个透明度产生第二信号,并且通过仅照射另一透明度产生相应的第三信号。 相关系数与第二和第三信号的乘积的平方根的两倍之间的比率是归一化的相关系数。 在投影胶片中的多个点中的每一个点上绘制标准化相关系数,因为透明胶片的相对定位被移位,从而可以确定相关函数及其峰值。 在相关峰值处的透明胶片之间的相对定位是视差的度量。
    • 7. 发明授权
    • Optical system for surface topography measurement
    • 用于表面形貌测量的光学系统
    • US4387994A
    • 1983-06-14
    • US399520
    • 1982-07-19
    • N. Balasubramanian
    • N. Balasubramanian
    • G01B11/24G01B11/30
    • G01B11/303G01B11/2441
    • An interferometric system for characterizing the surface of a test object, such as an aspheric surface. A white light interferogram is produced wherein the principal fringe indicates zero optical path difference between a test surface and a reference surface. Wavefronts from either of the test or reference surfaces are translated by incremental amounts. A multi-point detector array is used to make multi-point contrast readings. Points of contrast maxima for each detector point are computed by a statistical determination. A centroid function is preferred.By recording the points of maximum contrast and the incremental wavefront translation, two dimensional plots showing zero optical path differences for the two surfaces are obtained, thereby comparing the test and reference surfaces.
    • 用于表征测试对象的表面的干涉测量系统,例如非球面。 产生白光干涉图,其中主条纹表示测试表面和参考表面之间的零光程差。 来自任何一个测试或参考表面的波前均以递增的数量进行翻译。 多点检测器阵列用于进行多点对比读数。 通过统计确定计算每个检测点的对比度最大值点。 重心函数是优选的。 通过记录最大对比度和增量波前平移点,可以获得两个表面零光程差的二维图,从而比较测试和参考曲面。
    • 8. 发明授权
    • Method and system for determining interferometric optical path length
difference
    • 用于确定干涉光路长度差的方法和系统
    • US4225240A
    • 1980-09-30
    • US912212
    • 1978-06-05
    • N. Balasubramanian
    • N. Balasubramanian
    • G01B9/02G01B11/02G01B11/30
    • G01B11/303G01B11/02G01B9/02
    • A method and system for determining interferometric optical path length difference including: varying the interferometric optical path length difference between a first and a second surface in three steps at one-quarter wavelength intervals; sensing the intensity of the interferogram radiation at at least one position of the interferogram at each of the steps; storing the intensity sensed at each position at each step; for each of the positions adding the intensity of the first and third steps to produce a d.c. spatial frequency amplitude, subtracting the intensity of the third step from that of the first to obtain the cosinusoidal spatial frequency amplitude, and subtracting the intensity of the second step from the d.c. amplitude to produce the sinusoidal spatial frequency amplitude; combining the sinusoidal and cosinusoidal amplitudes to produce a trigonometric function of the phase angle of the radiation reflected from each position of the first and second surfaces and generating from the trigonometric function of the phase angle an output representative of the optical path length difference at each position.
    • 一种用于确定干涉光路长度差的方法和系统,包括:以四分之一波长间隔三步改变第一和第二表面之间的干涉光程长度差; 在每个步骤的干涉图的至少一个位置处感测干涉图辐射的强度; 存储在每个步骤处在每个位置处感测的强度; 对于添加第一和第三步骤的强度的每个位置产生直流。 空间频率幅度,从第一步骤减去第三步骤的强度以获得cosinusoidal空间频率幅度,并从d.c.减去第二步骤的强度。 振幅产生正弦空间频率幅度; 组合正弦和余弦振幅以产生从第一和第二表面的每个位置反射的辐射的相位角的三角函数,并且从相位角的三角函数产生代表每个位置处的光程长度差的输出 。
    • 9. 发明授权
    • Optical measuring system
    • 光学测量系统
    • US4204772A
    • 1980-05-27
    • US945628
    • 1078-09-25
    • N. Balasubramanian
    • N. Balasubramanian
    • G01B11/02G01C3/24G01C3/00
    • G01B11/026G01C3/24
    • A non-contacting optical probe incorporates an optical system designed to measure distances between various surfaces which may be internal or external such as exists in molds and the like. A collimated light beam is passed off-center through a first lens and focused to a first point on a first surface coplanar with the focal plane of the lens. When the distance between the first surface and the optical probe carrying the collimated beam changes so that a second surface is presented, this second surface is no longer in the focal plane with the result that a laterally displaced image of the point of interception of the collimated beam with the point of the intersection of the optical axis of the system occurs. This lateral displacement is imaged back through the optical system to a sensing surface. The primary focusing lens is then physically shifted along its optical axis to bring the focal plane into coplanar relationship with the second surface, the amount of lens movement being readily determined when the laterally displaced image point on the sensor surface is brought into coincidence with the center optical axis of the lens system on the sensor surface. The distance through which the lens is physically moved then corresponds precisely to the distance between the first and second surfaces.
    • 非接触式光学探针包括设计用于测量各种表面之间的距离的光学系统,其可以是内部的或外部的,例如存在于模具等中。 准直光束通过第一透镜偏离中心并且聚焦到与透镜的焦平面共面的第一表面上的第一点。 当第一表面和携带准直光束的光学探头之间的距离改变使得呈现第二表面时,该第二表面不再处于焦平面,结果是准直的截取点的横向移位的图像 光束与系统光轴的交点发生。 该横向位移通过光学系统成像回到感测表面。 然后,主聚焦透镜沿其光轴物理移动以使焦平面与第二表面成共面关系,当传感器表面上的横向移位的图像点与中心重合时,容易确定透镜移动量 传感器表面上的透镜系统的光轴。 透镜通过其物理移动的距离然后精确地对应于第一和第二表面之间的距离。
    • 10. 发明授权
    • Optical inspection device for measuring depthwise variations from a
focal plane
    • 用于测量焦平面深度变化的光学检测装置
    • US4355904A
    • 1982-10-26
    • US140417
    • 1980-04-14
    • N. Balasubramanian
    • N. Balasubramanian
    • G01B11/02G01C3/24G01C3/00
    • G01C3/24G01B11/026
    • A scanning laser measurement system for measuring depthwise variations of surfaces relative to a focal plane of an optical system. Laser light is directed to a test surface, generally aligned with the focal plane, through focusing optics having an optical axis. Some of the light from a beam spot is retro scattered from the test surface and reimaged along a path generally parallel to the optical axis. Depthwise variations in the test surface with respect to the focal plane cause spatial displacements in the retrobeam relative to the optical axis. The retrobeam is directed to a filter which is partially reflective and partially transmissive. A pair of photodetectors is used to intercept reflected and transmitted components of the retrobeam and the intensity of these components is measured and used to compute centroid values for the retrobeam on the filter for various beam spots on the test surface. The computed centroid values are directly proportional to depthwise surface deviations from the focal plane. The beam is directed to various points on the test surface by an optical scanner. If the deviations in the test surface from the focal plane are so great that a retrobeam cannot be formed, the entire optical system is translated until beam focus can be achieved and a retrobeam formed. The extent of translation is a coarse measurement of depthwise variations in the test surface relative to the focal plane, while the previously mentioned centroid values yield a fine measurement of depthwise variations relative to the focal plane.
    • 一种用于测量表面相对于光学系统的焦平面的深度变化的扫描激光测量系统。 通过具有光轴的聚焦光学元件将激光指向通常与焦平面对准的测试表面。 来自光束点的一些光从测试表面复原散射并且沿着通常平行于光轴的路径重新成像。 测试表面相对于焦平面的深度变化导致逆光束相对于光轴的空间位移。 逆光束被引导到部分反射和部分透射的滤光器。 一对光电探测器用于拦截反射光束的反射和透射分量,并测量这些分量的强度,并用于计算滤光片上用于测试表面上各种光束点的逆光束的质心值。 计算的质心值与与焦平面的深度表面偏差成正比。 光束通过光学扫描器被引导到测试表面上的各个点。 如果测试表面与焦平面的偏差太大,使得不能形成逆光束,则整个光学系统被平移,直到可以实现光束聚焦并形成逆光束。 翻译的程度是测试表面相对于焦平面的深度变化的粗略测量,而先前提到的质心值产生相对于焦平面的深度变化的精细测量。