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    • 3. 发明申请
    • Apparatus for making crystalline composition
    • 用于制造结晶组合物的装置
    • US20070151509A1
    • 2007-07-05
    • US11313442
    • 2005-12-20
    • Dong-Sil ParkMark D'EvelynMyles PetersonJohn LemanJoell HibshmanFred Sharifi
    • Dong-Sil ParkMark D'EvelynMyles PetersonJohn LemanJoell HibshmanFred Sharifi
    • C30B11/00
    • C01B21/0632C01B21/0602C01B21/0722C01P2004/03C01P2006/80Y10T117/10
    • A composition including a polycrystalline metal nitride having a number of grains is provided. These grains have a columnar structure with one or more properties such as, an average grain size, a tilt angle, an impurity content, a porosity, a density, and an atomic fraction of the metal in the metal nitride. An apparatus for preparing a metal nitride is provided. The apparatus may include a housing having an interior surface that defines a chamber and an energy source to supply energy to the chamber. A first inlet may be provided to flow a nitrogen-containing gas into the chamber. Raw materials may be introduced into the chamber through a raw material inlet. A second inlet may be provided to flow in a halide-containing gas in the chamber. The apparatus may further include a controller, which communicates with the various components of the apparatus such as, sensors, valves, and energy source, and may optimize and control the reaction.
    • 提供了包含多个晶粒的多晶金属氮化物的组合物。 这些晶粒具有在金属氮化物中具有金属的平均晶粒尺寸,倾斜角,杂质含量,孔隙率,密度和原子分数等一个或多个特性的柱状结构。 提供了一种用于制备金属氮化物的设备。 该装置可以包括具有限定腔室的内表面和用于向腔室供应能量的能量源的壳体。 可以提供第一入口以将含氮气体流入室中。 可以通过原料入口将原料引入室中。 可以提供第二入口以在室中的含卤化物气体中流动。 该装置还可以包括控制器,其与设备的各种部件(例如传感器,阀门和能量源)进行通信,并且可以优化和控制反应。