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    • 1. 发明授权
    • Method for reducing dimensions between patterns on a hardmask
    • 减少硬掩模上图案之间尺寸的方法
    • US07361604B2
    • 2008-04-22
    • US10465852
    • 2003-06-20
    • Henry Wei-Ming ChungShin-Yi TsaiMing-Chung Liang
    • Henry Wei-Ming ChungShin-Yi TsaiMing-Chung Liang
    • H01L21/302H01L21/461
    • G03F7/405H01L21/0274H01L21/0332H01L21/0335H01L21/0338
    • A semiconductor manufacturing method that includes depositing a first layer over a substrate, providing a layer of hardmask over the first layer, patterning and defining the hardmask layer to form at least two hardmask structures, wherein each hardmask structure includes at least one substantially vertical sidewall and one substantially horizontal top, and wherein the hardmask structures are separated by a first space, depositing a photo-insensitive material over the at least two hardmask structures and the first layer, wherein an amount of the photo-insensitive material deposited on the top of the hardmask structures is substantially greater than an amount of the photo-insensitive material deposited on the at least one sidewall of the hardmask structures, wherein the hardmask structures with the photo-insensitive layer on the sidewalls thereof are separated by a second space, and wherein the first space is greater than the second space.
    • 一种半导体制造方法,包括在衬底上沉积第一层,在所述第一层上提供硬掩模层,图案化和限定所述硬掩模层以形成至少两个硬掩模结构,其中每个硬掩模结构包括至少一个基本垂直的侧壁和 一个基本上水平的顶部,并且其中所述硬掩模结构由第一空间分开,在所述至少两个硬掩模结构和所述第一层上沉积光敏材料,其中一定量的光敏材料沉积在 硬掩模结构基本上大于沉积在硬掩模结构的至少一个侧壁上的不敏感光材料的量,其中在其侧壁上具有光不敏感层的硬掩模结构被第二空间隔开,并且其中 第一空间大于第二空间。
    • 8. 外观设计
    • Projector equipped with functional module
    • USD888132S1
    • 2020-06-23
    • US29673225
    • 2018-12-13
    • Hsing-Yi KaoMing-Chung LiuShih-Neng Hong
    • Hsing-Yi KaoMing-Chung LiuShih-Neng Hong
    • FIG. 1 is a perspective view of a projector equipped with functional module showing our new design;
      FIG. 2 is a front view thereof;
      FIG. 3 is a rear view thereof;
      FIG. 4 is a left side view thereof;
      FIG. 5 is a right side view thereof;
      FIG. 6 is a top view thereof;
      FIG. 7 is a bottom view thereof;
      FIG. 8 is a perspective view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 9 is a front view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 10 is a rear view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 11 is a left side view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 12 is a right side view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 13 is a top view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 14 is a bottom view thereof in a state which the support, the projecting module and the functional module are moved;
      FIG. 15 is a perspective view thereof in a using state which the projecting module and the functional module are combined with each other;
      FIG. 16 is a front view thereof in a using state which the projecting module and the functional module are combined with each other;
      FIG. 17 is a rear view thereof in a using state which the projecting module and the functional module are combined with each other;
      FIG. 18 is a left side view thereof in a using state which the projecting module and the functional module are combined with each other;
      FIG. 19 is a right side view thereof in a using state which the projecting module and the functional module are combined with each other;
      FIG. 20 is a top view thereof in a using state which the projecting module and the functional module are combined with each other; and,
      FIG. 21 is a bottom view thereof in a using state which the projecting module and the functional module are combined with each other.
      The dashed broken lines depict portions of the projector equipped with functional module and form no part of the claimed design. The dot-dash broken lines define the bounds of the claimed design and form no part thereof.