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    • 2. 发明授权
    • Temperature control apparatus
    • 温度控制装置
    • US06848498B2
    • 2005-02-01
    • US09923413
    • 2001-08-08
    • Masanobu SekiMineo Tokuda
    • Masanobu SekiMineo Tokuda
    • F25B21/02F25B41/00F28D9/00F28F9/26H01L21/00F28F7/00F28D15/00
    • H01L21/67017F28F9/26H01L21/67109
    • A temperature control apparatus where it is easy to replace a heat exchange unit to enhance the maintainability and the space efficiency and which can absorb the thermal expansion/shrinkage of a heat exchanger is provided. The temperature control apparatus has a heat exchanger 11 with a passage 31 for passing a fluid; a connecting pipe 21 connected to the passage of the heat exchanger; a passage block 16 with a passage for passing the fluid to the heat exchanger; a relay block 15 for forming a passage between the passage of the passage block and the connecting pipe; and sealing means 14 for connecting the connecting pipe movably to the passage of the relay block. In the temperature control apparatus, the length of the connecting pipe 21 is made substantially equal to or slightly shorter than the spacing between the heat exchanger 11 and the passage block 16.
    • 提供了一种易于更换热交换单元以提高可维护性和空间效率并且可以吸收热交换器的热膨胀/收缩的温度控制装置。 温度控制装置具有热交换器11,其具有通过流体的通道31; 与热交换器的通路连接的连接管21; 具有用于将流体传递到热交换器的通道的通道块16; 用于在通道块的通道和连接管之间形成通道的继电器块15; 以及用于将连接管可移动地连接到继电器块的通道的密封装置14。 在温度控制装置中,连接管21的长度大致等于或略短于热交换器11和通道块16之间的间距。