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1. 发明授权

US07118778B2 Method of applying adhesive 有权
标题翻译：涂胶的方法
公开(公告)号：US07118778B2
公开(公告)日：2006-10-10
申请号：US10668436
申请日：2003-09-22
申请人： Mifong Wu , Chung-Chih Yeh
发明人： Mifong Wu , Chung-Chih Yeh
IPC分类号： B05D5/10
CPC分类号： H01L21/02304 , C23C14/12 , H01L21/02167 , H01L21/312
摘要： An applying method for an adhesive according to an embodiment includes the following steps. First, gas is exhausted from a first exhaust pipe, so as to eliminate a part of the gas in a closed container. Next, the gas continues to be exhausted from the first exhaust pipe, so as to have the adhesive in the transmission pipeline become bubbled, and also to convey the bubbled adhesive to reach the supply vent. Later, gas is exhausted from the second exhaust pipe and continues to be exhausted from the first exhaust pipe, so as to greatly exhaust the gas in the closed container, and also to increase bubbling in the adhesive. Subsequently, the gas continues to be exhausted from the second exhaust pipe and ceases to be exhausted from the first exhaust pipe, so as to cause the adhesive to reach a gasified state. Also the gasified adhesive is supplied to the closed container from the supply vent, so that the gasified adhesive can adhere to and coat above the SiO2 layer. Finally, gas may be exhausted from the first exhaust pipe and ceases to be exhausted from the second exhaust pipe, so that the remaining gasified adhesive in the closed container is pumped out.
摘要翻译：根据实施方式的粘合剂的涂布方法包括以下步骤。首先，从第一排气管排出气体，以消除密闭容器中的一部分气体。接下来，气体继续从第一排气管排出，使得输送管道中的粘合剂变得鼓泡，并且还将鼓泡的粘合剂输送到达供气口。之后，从第二排气管排出气体，继续从第一排气管排出，从而大大排出密闭容器内的气体，并增加粘合剂的起泡。随后，气体继续从第二排气管排出，并且不再从第一排气管排出，以使粘合剂达到气化状态。此外，气化的粘合剂从供气口供应到密闭容器中，使得气化的粘合剂可以粘附并涂覆在SiO 2层上。最后，气体可以从第一排气管排出，并且不再从第二排气管排出，从而将封闭容器中剩余的气化粘合剂抽出。

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