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    • 1. 发明授权
    • Optical metrology of multiple patterned layers
    • 多个图案层的光学计量学
    • US07522293B2
    • 2009-04-21
    • US11394591
    • 2006-03-30
    • Li WuElina SzetoMichael Kwon
    • Li WuElina SzetoMichael Kwon
    • G01B11/14
    • G01B11/24G01N21/4788G01N21/95607G01N2021/95615
    • One or more features of multiple patterned layers formed on a semiconductor are determined by obtaining a first measured diffraction signal measured from a first patterned layer before a second patterned layer is formed on top of the first patterned layer. One or more features of the first patterned layer are determined using the first measured diffraction signal. Values of one or more profile parameters of a hypothetical profile of the second patterned layer in combination with the first patterned layer are fixed. A second measured diffraction signal measured from the second patterned layer after the second patterned layer has been formed on top of the first patterned layer is obtained. One or more features of the second patterned layer are determined based on the second measured diffraction signal and the fixed values of the one or more profile parameters.
    • 通过在第一图案化层的顶部形成第二图案化层之前,通过获得从第一图案化层测量的第一测量的衍射信号来确定在半导体上形成的多个图案化层的一个或多个特征。 使用第一测量的衍射信号确定第一图案化层的一个或多个特征。 与第一图案化层组合的第二图案化层的假想轮廓的一个或多个轮廓参数的值是固定的。 获得在第一图案化层之上形成第二图案化层之后从第二图案化层测量的第二测量衍射信号。 基于第二测量的衍射信号和一个或多个轮廓参数的固定值来确定第二图案化层的一个或多个特征。
    • 4. 发明授权
    • Biodegradable mixtures of polyphoshazene and other polymers
    • 可聚降解的聚苯乙烯和其他聚合物的混合物
    • US6077916A
    • 2000-06-20
    • US90374
    • 1998-06-04
    • Cato LaurencinHarry AllcockSobrasua IbimArchel AmbrosioMichael Kwon
    • Cato LaurencinHarry AllcockSobrasua IbimArchel AmbrosioMichael Kwon
    • A61F2/02A61F2/28A61F2/30A61K9/20A61L27/26C08G79/02C08L85/02C08F283/00
    • C08L85/02A61L27/26C08G79/025A61F2/28A61F2002/2835A61F2002/30062A61F2002/30677A61F2210/0004A61K9/2031A61K9/204Y10S525/903Y10S525/937Y10S525/938
    • Biodegradable polymeric compositions are provided, wherein biodegradable polyphosphazenes are combined with at least one other polymer, either in the form of a blend, a semi-interpenetrating network (semi-IPN), or an interpenetrating network IPN. The side groups and composition of the polyphosphazenes are used to determine the properties of the compositions, for example, the rate and extent of degradation, and mechanical properties. These are useful in biomedical applications, including controlled drug delivery and tissue regeneration, and environmental applications. In the most preferred embodiment, as demonstrated by the examples, the polyphosphazenes contain hydrophobic side groups, such as p-methylphenoxy and other aromatic groups, and groups which impart hydrolytic instability, such as amino acid alkyl esters, and degrade by surface erosion. A preferred example is ethyl glycinato-substituted polyphosphazene (PPHOS) with p-methylphenoxy as co-substituent. These are blended with other polymers, such as PLGA, which have desirable mechanical properties but which degrade by bulk erosion, so that the blend degrades by surface erosion. For the biomedical applications, FDA approved polymers, such as polymers of lactic and glycolic acids and their copolymers, are preferred. Methods for making these compositions also are provided.
    • 提供了可生物降解的聚合物组合物,其中可生物降解的聚磷腈与至少一种其它聚合物(混合物,半互穿网络(半IPN)或互穿网络IPN)的形式组合。 聚磷腈的侧基和组成用于确定组合物的性质,例如降解的速率和程度以及机械性能。 这些可用于生物医学应用,包括受控药物递送和组织再生以及环境应用。 在最优选的实施方案中,如实施例所证明的,聚磷腈含有疏水侧基如对甲基苯氧基和其它芳族基团,以及赋予水解不稳定性的基团,例如氨基酸烷基酯,并通过表面侵蚀降解。 优选的实例是具有对甲基苯氧基作为共取代基的甘氨酰胺取代的聚磷腈(PPHOS)。 这些与其它聚合物(例如PLGA)共混,其具有期望的机械性能但通过体积腐蚀而降解,使得共混物由于表面侵蚀而降解。 对于生物医学应用,FDA批准的聚合物,如乳酸和乙醇酸的聚合物及其共聚物是优选的。 还提供了制备这些组合物的方法。
    • 6. 发明申请
    • Optical metrology of multiple patterned layers
    • 多个图案层的光学计量学
    • US20070229854A1
    • 2007-10-04
    • US11394591
    • 2006-03-30
    • Li WuElina SzetoMichael Kwon
    • Li WuElina SzetoMichael Kwon
    • G01B11/14
    • G01B11/24G01N21/4788G01N21/95607G01N2021/95615
    • One or more features of multiple patterned layers formed on a semiconductor are determined by obtaining a first measured diffraction signal measured from a first patterned layer before a second patterned layer is formed on top of the first patterned layer. One or more features of the first patterned layer are determined using the first measured diffraction signal. Values of one or more profile parameters of a hypothetical profile of the second patterned layer in combination with the first patterned layer are fixed. A second measured diffraction signal measured from the second patterned layer after the second patterned layer has been formed on top of the first patterned layer is obtained. One or more features of the second patterned layer are determined based on the second measured diffraction signal and the fixed values of the one or more profile parameters.
    • 通过在第一图案化层的顶部形成第二图案化层之前,通过获得从第一图案化层测量的第一测量的衍射信号来确定在半导体上形成的多个图案化层的一个或多个特征。 使用第一测量的衍射信号确定第一图案化层的一个或多个特征。 与第一图案化层组合的第二图案化层的假想轮廓的一个或多个轮廓参数的值是固定的。 获得在第一图案化层之上形成第二图案化层之后从第二图案化层测量的第二测量衍射信号。 基于第二测量的衍射信号和一个或多个轮廓参数的固定值来确定第二图案化层的一个或多个特征。