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1. 发明授权

US07822567B2 Method and apparatus for implementing scaled device tests 失效
标题翻译：用于实现缩放设备测试的方法和设备
公开(公告)号：US07822567B2
公开(公告)日：2010-10-26
申请号：US11771467
申请日：2007-06-29
申请人： Kevin R. Lensing , Michael G. McIntyre
发明人： Kevin R. Lensing , Michael G. McIntyre
IPC分类号： G01N37/00 , G01R31/28
CPC分类号： G01R31/2894 , G01R31/31707
摘要： A method includes defining a hierarchy of test routines in a test program for testing integrated circuit devices. A first device is tested at a first screening level in the hierarchy. The first device is tested at a second detailed level in the hierarchy responsive to the first device failing the testing at the first screening level.
摘要翻译：一种方法包括在用于测试集成电路设备的测试程序中定义测试例程的层级。第一个设备在层次结构中的第一个筛选级别进行测试。第一个设备在层次结构中的第二个详细级别进行测试，响应于第一个设备在第一个筛选级别的测试失败。

2. 发明授权

US07583833B2 Method and apparatus for manufacturing data indexing 有权
标题翻译：用于制造数据索引的方法和装置
公开(公告)号：US07583833B2
公开(公告)日：2009-09-01
申请号：US11341701
申请日：2006-01-27
申请人： Michael G. McIntyre , Alex Bierwag , Charlie Reading , Alfredo V. Herrera
发明人： Michael G. McIntyre , Alex Bierwag , Charlie Reading , Alfredo V. Herrera
IPC分类号： G06K9/00 , G06K9/62 , G01N21/00 , G01R31/02 , G06F19/00 , G06F11/30 , G21C17/00 , G06F7/00 , G06F17/30
CPC分类号： G05B23/0229 , G05B23/0264 , Y10S707/99936 , Y10S707/99937 , Y10S707/99942
摘要： A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as to whether the pattern associated with a second set of data corresponds to the pattern associated with the first set of data. An index associated with the first set of data is correlated to the second set of data in response to determining that the pattern associated with the second set of data corresponds to the pattern associated with the first set of data.
摘要翻译：一种用于生成用于存储数据的索引的方法，装置和系统。确定与第一组数据相关联的模式。第一组数据被存储。确定与第二组数据相关联的模式是否对应于与第一组数据相关联的模式。响应于确定与第二组数据相关联的模式对应于与第一组数据相关联的模式，与第一组数据相关联的索引与第二组数据相关。

3. 发明申请

US20090058444A1 METHOD AND APPARATUS FOR RELATIVE TESTING OF INTEGRATED CIRCUIT DEVICES 有权
标题翻译：集成电路设备相对测试方法与装置
公开(公告)号：US20090058444A1
公开(公告)日：2009-03-05
申请号：US11849702
申请日：2007-09-04
申请人： MICHAEL G. MCINTYRE
发明人： MICHAEL G. MCINTYRE
IPC分类号： G01R31/28
CPC分类号： G01R31/31718
摘要： A method includes loading a plurality of integrated circuit devices into a tester. At least one parameter is determined for each of the integrated circuit devices using the tester. At least one relative acceptance criterion associated with the parameter is determined based on the determined parameters for the plurality of integrated circuit devices. A pass/fail status of each of the integrated circuit devices is determined using the relative acceptance criterion.
摘要翻译：一种方法包括将多个集成电路装置加载到测试器中。使用测试仪为每个集成电路器件确定至少一个参数。基于所确定的多个集成电路装置的参数来确定与参数相关联的至少一个相对接受标准。使用相对接受标准来确定每个集成电路器件的通过/失败状态。

4. 发明授权

US07899634B1 Method and apparatus for analysis of continuous data using binary parsing 有权
标题翻译：使用二进制解析分析连续数据的方法和装置
公开(公告)号：US07899634B1
公开(公告)日：2011-03-01
申请号：US11269418
申请日：2005-11-07
申请人： Michael G. McIntyre , Michael A. Retersdorf
发明人： Michael G. McIntyre , Michael A. Retersdorf
IPC分类号： G01N37/00
CPC分类号： H01L22/20 , H01L22/14
摘要： A method, apparatus, and a system for generating a binary mapping of wafer regions using measured value. A first measured value relating to processing a first workpiece is acquired. A second measured value relating to a second workpiece is acquired. At least a first region common to the first and second workpieces is defined. A determination is made as to whether the results associated with the first or second measured value is above a predetermined threshold. A first binary value is assigned to the first region based upon a determination that the results associated the first or second measured value data is above the threshold.
摘要翻译：一种用于使用测量值产生晶片区域的二进制映射的方法，装置和系统。获取与处理第一工件有关的第一测量值。获得与第二工件相关的第二测量值。至少限定了第一和第二工件共同的第一区域。确定与第一或第二测量值相关联的结果是否高于预定阈值。基于与第一或第二测量值数据相关联的结果高于阈值的确定，将第一二进制值分配给第一区域。

5. 发明授权

US07533313B1 Method and apparatus for identifying outlier data 失效
标题翻译：用于识别离群数据的方法和装置
公开(公告)号：US07533313B1
公开(公告)日：2009-05-12
申请号：US11371771
申请日：2006-03-09
申请人： Michael Alan Retersdorf , Michael G. McIntyre
发明人： Michael Alan Retersdorf , Michael G. McIntyre
IPC分类号： G01R31/28
CPC分类号： G01R31/2894 , G01R31/31718 , Y10S707/99942 , Y10S707/99943
摘要： A method for converting data includes generating a first data vector of data measurements related to processing of at least one workpiece. Each element of the first data vector is associated with at least one of a plurality of positions on the workpiece. A cumulative distribution of the elements in the first data vector is generated. An outlier region of the data measurements is identified based on the cumulative distribution. A binary outlier data vector is generated from the first data vector by assigning a first binary value to the data elements in the first data vector in the outlier region and assigning a second binary value to the remaining data elements in the first data vector.
摘要翻译：一种用于转换数据的方法包括生成与至少一个工件的处理相关的数据测量的第一数据矢量。第一数据矢量的每个元素与工件上的多个位置中的至少一个相关联。生成第一数据矢量中的元素的累积分布。基于累积分布来确定数据测量的异常值区域。通过向离群区域中的第一数据向量中的数据元素分配第一二进制值并将第二二进制值分配给第一数据向量中的其余数据元素，从第一数据向量生成二进制异常值数据向量。

6. 发明申请

US20080147222A1 Method and Apparatus for Implementing a Universal Coordinate System for Metrology Data 失效
标题翻译：实现计量数据通用坐标系的方法和装置
公开(公告)号：US20080147222A1
公开(公告)日：2008-06-19
申请号：US11539788
申请日：2006-10-09
申请人： Michael G. McIntyre , Zhuqing Zong , Andrew Drozda-Freeman , Vijay Sankaran
发明人： Michael G. McIntyre , Zhuqing Zong , Andrew Drozda-Freeman , Vijay Sankaran
IPC分类号： G06F19/00
CPC分类号： G03F9/7003 , G03F7/70508 , G03F7/70616
摘要： A method includes receiving a metrology report including metrology data collected by a metrology tool, position data associated with the metrology data, and context data associated with the metrology tool. A first coordinate system employed by the metrology tool is determined based on the context data. The position data is transformed from the first coordinate system to a second coordinate system to generate transformed position data. The transformed position data is associated with the metrology data.
摘要翻译：一种方法包括接收包括由计量工具收集的计量数据的度量报告，与计量数据相关联的位置数据以及与度量工具相关联的上下文数据。基于上下文数据确定计量工具使用的第一坐标系。位置数据从第一坐标系变换到第二坐标系，以产生变换位置数据。变换的位置数据与度量数据相关联。

7. 发明授权

US06362634B1 Integrated defect monitor structures for conductive features on a semiconductor topography and method of use 失效
标题翻译：用于半导体形貌和使用方法的导电特征的集成缺陷监视器结构
公开(公告)号：US06362634B1
公开(公告)日：2002-03-26
申请号：US09483556
申请日：2000-01-14
申请人： Richard W. Jarvis , Michael G. McIntyre
发明人： Richard W. Jarvis , Michael G. McIntyre
IPC分类号： G01R3128
CPC分类号： G01R31/2884
摘要： A test structure which includes a first conductive feature layer and a second conductive feature layer is described. The first conductive feature layer includes a first conductive line. The second conductive feature layer includes a second conductive line. A daisy chain conductive feature is also included in the test structure. The daisy chain conductive feature includes portions on the first and second conductive feature layers which are interconnected to each other by vias.
摘要翻译：描述了包括第一导电特征层和第二导电特征层的测试结构。第一导电特征层包括第一导电线。第二导电特征层包括第二导电线。测试结构中还包括菊花链导电特征。菊链传导特征包括通过通孔互相连接的第一和第二导电特征层上的部分。

8. 发明授权

US08041518B2 Determining die test protocols based on process health 有权
标题翻译：基于过程健康确定模具测试方案
公开(公告)号：US08041518B2
公开(公告)日：2011-10-18
申请号：US11745688
申请日：2007-05-08
申请人： Michael G. McIntyre , Kevin R. Lensing
发明人： Michael G. McIntyre , Kevin R. Lensing
IPC分类号： G01R15/00
CPC分类号： G01R31/2894
摘要： A method includes receiving a first set of parameters associated with a subset of a plurality of die on a wafer. A die health metric is determined for at least a portion of the plurality of die based on the first set of parameters. The die health metric includes at least one process component associated with the fabrication of the die and at least one performance component associated with an electrical performance characteristic of the die. At least one of the die is tested. A protocol of the testing is determined based on the associated die health metric.
摘要翻译：一种方法包括接收与晶片上的多个管芯的子集相关联的第一组参数。基于第一组参数为多个管芯的至少一部分确定管芯健康度量。模具健康度量包括与模具的制造相关联的至少一个工艺部件和与模具的电性能特性相关联的至少一个性能部件。至少有一个模具被测试。测试的协议基于相关的模具健康度量来确定。

9. 发明申请

US20110137597A1 METHOD AND APPARATUS FOR ANALYSIS OF CONTINOUS DATA USING BINARY PARSING 失效
标题翻译：使用二进制分析进行连续数据分析的方法和装置
公开(公告)号：US20110137597A1
公开(公告)日：2011-06-09
申请号：US13016528
申请日：2011-01-28
申请人： Michael G. McIntyre , Michael A. Retersdorf
发明人： Michael G. McIntyre , Michael A. Retersdorf
IPC分类号： G06F19/00 , G01N37/00
CPC分类号： H01L22/20 , H01L22/14
摘要： A method, apparatus, and a system for generating a binary mapping of wafer regions using measured value. A first measured value relating to processing a first workpiece is acquired. A second measured value relating to a second workpiece is acquired. At least a first region common to the first and second workpieces is defined. A determination is made as to whether the results associated with the first or second measured value is above a predetermined threshold. A first binary value is assigned to the first region based upon a determination that the results associated the first or second measured value data is above the threshold.
摘要翻译：一种用于使用测量值产生晶片区域的二进制映射的方法，装置和系统。获取与处理第一工件有关的第一测量值。获得与第二工件相关的第二测量值。至少限定了第一和第二工件共同的第一区域。确定与第一或第二测量值相关联的结果是否高于预定阈值。基于与第一或第二测量值数据相关联的结果高于阈值的确定，将第一二进制值分配给第一区域。

10. 发明授权

US07106897B1 Universal spatial pattern recognition system 有权
标题翻译：通用空间模式识别系统
公开(公告)号：US07106897B1
公开(公告)日：2006-09-12
申请号：US10134718
申请日：2002-04-29
申请人： Michael G. McIntyre , James E. Morris
发明人： Michael G. McIntyre , James E. Morris
IPC分类号： G06K9/00
CPC分类号： G06K9/48 , G06K9/6292 , G06T7/0006 , G06T2207/30148
摘要： A method and apparatus for analyzing patterns in semiconductor wafers wherein the patterns are compared to a plurality of patterns stored in a common pattern library. A spatial pattern recognition engine is operable to receive a first set of data corresponding to a pattern on a semiconductor wafer and to generate a normalized contour representation of said first data set. A pattern analyzer compares the normalized data set to a plurality of reference contour data sets stored in a common pattern data reference library and generates a correlation label associating the first data set with one of the plurality of reference contour data sets. The label associated with the first data set is stored in a label storage database that can be accessed to perform subsequent analysis on the data associated with a specific wafer. The system can be used to analyze multiple types of patterns, including defect data, bin data, positional parameter data and in-line site data.
摘要翻译：一种用于分析半导体晶片中的图案的方法和装置，其中将图案与存储在公共图案库中的多个图案进行比较。空间模式识别引擎可操作以接收对应于半导体晶片上的图案的第一组数据并产生所述第一数据集的归一化轮廓表示。模式分析器将归一化数据集与存储在公共模式数据参考库中的多个参考轮廓数据集进行比较，并生成将第一数据集与多个参考轮廓数据集中的一个相关联的相关标签。与第一数据集相关联的标签存储在可以被访问的标签存储数据库中，以对与特定晶片相关联的数据执行后续分析。该系统可用于分析多种类型的模式，包括缺陷数据，仓库数据，位置参数数据和在线站点数据。

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