会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Modulators
    • 调制器
    • US4716384A
    • 1987-12-29
    • US727325
    • 1985-04-25
    • Malcolm D. M. RoeMichael E. Hicks
    • Malcolm D. M. RoeMichael E. Hicks
    • G02F1/01G02F1/03H01S3/10G01D15/14H04N5/76
    • G02F1/0123G02F1/0322
    • An exposure system and method comprising a radiation generator (15'); and a modulator (4) which comprises a device for controlling the transmission of radiation passing through the modulator in accordance with an applied control function, the response characteristic of the modulator to the control function exhibiting a maximum or minimum and onto which radiation from the generator is incident. A microprocessor (19) controls the transmission condition of the modulator (4), and is responsive to predetermined control signals during an exposing stage and, during a compensation stage prior to the exposing stage, generates a test control function having a DC component and a cyclically varying component for application to the modulator. A photodiode (17) monitors radiation transmitted through the modulator, and a phase detector (18) detects the phase relationship between the cyclical component of the transmitted radiation and the cyclically varying component of the test control function and determines the position of the DC component of the test control function along the response characteristic of the modulator. The microprocessor (19) determines a correction function for application to the modulator (4) to compensate for any change in the response characteristic.
    • 一种包括辐射发生器(15')的曝光系统和方法; 以及调制器(4),其包括用于根据所施加的控制功能来控制通过调制器的辐射的传输的装置,调制器对具有最大或最小的控制功能的响应特性以及来自发生器的辐射 是事件。 微处理器(19)控制调制器(4)的传输条件,并且在曝光阶段响应于预定的控制信号,并且在曝光阶段之前的补偿阶段期间产生具有直流分量和 循环变化的组件用于调制器。 光电二极管(17)监测通过调制器传输的辐射,相位检测器(18)检测透射辐射的周期分量与测试控制功能的循环变化分量之间的相位关系,并确定直流分量的位置 沿着调制器响应特性的测试控制功能。 微处理器(19)确定用于应用于调制器(4)的校正功能以补偿响应特性的任何变化。