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1. 发明授权

US5733096A Multi-stage telescoping structure 失效
标题翻译：多级伸缩结构
公开(公告)号：US5733096A
公开(公告)日：1998-03-31
申请号：US527798
申请日：1995-09-13
申请人： Matthew J. Van Doren , Alexander H. Slocum , Don Sauer
发明人： Matthew J. Van Doren , Alexander H. Slocum , Don Sauer
IPC分类号： B25J18/02 , G25J18/04
CPC分类号： B25J18/025 , Y10T74/18672
摘要： A multi-stage telescoping tube structure and a robot including a multi-stage telescoping tube structure. The multi-stage telescoping tube structure includes an outer tube, an intermediate tube, and an inner tube. The intermediate tube is slidably received in the outer tube, and the inner tube is slidably received in the intermediate tube. It further includes a multi-stage screw for arrangement translating rotary motion into linear movement of the tubes, and a drive means coupled to the screw arrangement. The robot further includes a support bracket, rotatably supporting the multi-stage telescoping tube structure, and an electric motor for rotating the arrangement. The structure further includes rail guides engagable with complimentary horizontally extending rails for horizontal movement of the robot.
摘要翻译：多级伸缩管结构和包括多级伸缩管结构的机器人。多级伸缩管结构包括外管，中间管和内管。中间管可滑动地容纳在外管中，并且内管可滑动地容纳在中间管中。它还包括用于将旋转运动转换成管的线性运动的多级螺杆，以及联接到螺杆装置的驱动装置。机器人还包括可旋转地支撑多级伸缩管结构的支撑支架和用于旋转该装置的电动马达。该结构还包括可引导机器人水平移动的互补水平延伸轨道的轨道导轨。

2. 发明授权

US5733024A Modular system 失效
标题翻译：模块化系统
公开(公告)号：US5733024A
公开(公告)日：1998-03-31
申请号：US527797
申请日：1995-09-13
申请人： Alexander H. Slocum , Matthew J. Van Doren , Rodney Scott Ziegenhagen, II , Don Sauer
发明人： Alexander H. Slocum , Matthew J. Van Doren , Rodney Scott Ziegenhagen, II , Don Sauer
IPC分类号： G03F7/00 , H01L21/00 , H01L21/677 , A47B97/00 , B65G49/07
CPC分类号： H01L21/67167 , G03F7/00 , H01L21/67173 , H01L21/67178 , H01L21/67196 , H01L21/67769 , H01L21/67778 , Y10S414/135 , Y10S414/14
摘要： A modular system and a method of creating a modular system comprising a substantially rigid frame and a plurality of modules mounted at predetermined locations on the frame by means of kinematic couplings. The frame includes a main beam in the form of a spine, and a plurality of transversely extending bulkheads. The method includes creating a model of the system using rigid bodies and thereafter providing the frame and modules and securing them kinematically. The kinematic couplings comprise three pairs of aligning elements, each in the form of a male element and a contact element. The contact elements may take the form of grooves, tetrahedral depressions, or flat surfaces.
摘要翻译：模块化系统和创建模块化系统的方法，该模块化系统包括基本上刚性的框架和通过运动耦合安装在框架上的预定位置处的多个模块。框架包括脊柱形式的主梁和多个横向延伸的舱壁。该方法包括使用刚体创建系统的模型，然后提供框架和模块并以运动方式固定它们。运动联接器包括三对对准元件，每对准元件均为阳元件和接触元件的形式。接触元件可以采用凹槽，四面体凹陷或平坦表面的形式。

3. 发明授权

US5700046A Wafer gripper 失效
标题翻译：晶圆夹
公开(公告)号：US5700046A
公开(公告)日：1997-12-23
申请号：US527796
申请日：1995-09-13
申请人： Matthew J. Van Doren , Don Sauer , Alexander H. Slocum , David Pap Rocki , Johann Tam , Larry Gerszewski
发明人： Matthew J. Van Doren , Don Sauer , Alexander H. Slocum , David Pap Rocki , Johann Tam , Larry Gerszewski
IPC分类号： B25J15/02 , H01L21/687 , B25J15/08
CPC分类号： B25J15/026 , H01L21/68707 , Y10S294/902 , Y10S414/141
摘要： A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.
摘要翻译：晶片夹持器组件包括相对于彼此可移动地支撑的第一和第二夹持构件。电动机将夹持构件线性地向彼此推动并远离彼此。优选地，两个夹持构件可移动地支撑，并且旋转到线性的平移器产生夹持构件的相等且相对的线性移动。通常，至少六个接触器元件被限定在该对夹持构件上。接触元件包括垂直延伸的部分，其具有用于接触晶片的边缘的向内的凸形表面和用于支撑晶片的下表面的向内延伸的凸缘。

4. 发明授权

US07869003B2 Lithographic apparatus and device manufacturing method with reticle gripper 有权
标题翻译：平版印刷设备及装置制造方法
公开(公告)号：US07869003B2
公开(公告)日：2011-01-11
申请号：US11484855
申请日：2006-07-12
申请人： Matthew J. Van Doren , Jonathan H. Feroce
发明人： Matthew J. Van Doren , Jonathan H. Feroce
IPC分类号： G03B27/62
CPC分类号： G03F7/70741 , G03F7/70783
摘要： A reticle gripper to hold a reticle of a lithographic apparatus is presented. The reticle gripper includes three gripper structures to contact the surface of the reticle. Each of the three gripper structures determines a position with respect to the reticle gripper of one of the points on the surface of the reticle.
摘要翻译：提出了一种用于保持光刻设备的掩模版的掩模版夹具。光罩夹持器包括三个夹具结构，以接触掩模版的表面。三个夹具结构中的每一个确定相对于掩模版的表面上的一个点的光罩夹持器的位置。

5. 发明申请

US20080014508A1 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20080014508A1
公开(公告)日：2008-01-17
申请号：US11484855
申请日：2006-07-12
申请人： Matthew J. Van Doren , Jonathan H. Feroce
发明人： Matthew J. Van Doren , Jonathan H. Feroce
IPC分类号： G03F1/00
CPC分类号： G03F7/70741 , G03F7/70783
摘要： A reticle gripper to hold a reticle of a lithographic apparatus is presented. The reticle gripper includes three gripper structures to contact the surface of the reticle. Each of the three gripper structures determines a position with respect to the reticle gripper of one of the points on the surface of the reticle.
摘要翻译：提出了一种用于保持光刻设备的掩模版的掩模版夹具。光罩夹持器包括三个夹具结构，以接触掩模版的表面。三个夹具结构中的每一个确定相对于掩模版的表面上的一个点的光罩夹持器的位置。

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