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1. 发明授权

US06812055B2 MEMS devices and methods of manufacture 失效
标题翻译： MEMS器件和制造方法
公开(公告)号：US06812055B2
公开(公告)日：2004-11-02
申请号：US10739711
申请日：2003-12-18
申请人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
发明人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
IPC分类号： H01L2100
CPC分类号： H02K33/16 , B81B3/0051 , F04B19/006 , F04B43/043 , G02B6/3564 , G02B6/3566 , G02B6/3572 , G02B6/3584 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.
摘要翻译：本文公开了使用MEMS电磁致动器来选择性地产生位移力的微机电（MEMS）装置。根据本文公开的一个示例性实施例，MEMS器件可以包括具有表面的基板，至少部分地由基板形成的可致动元件，以及设置在基板上的电磁致动器，用于选择性地向可致动元件施加第一力以移位沿着路径的可致动元件。致动元件可以具有联接到基座的基部和臂。底座可以包括由磁性材料构成的部分。电磁致动器可以包括导电线圈，并且可致动元件的路径可以通过线圈中的线圈间隙。电磁致动器还可以包括磁芯，导电线圈可围绕其缠绕。

2. 发明授权

US06717227B2 MEMS devices and methods of manufacture 失效
公开(公告)号：US06717227B2
公开(公告)日：2004-04-06
申请号：US10079985
申请日：2002-02-21
申请人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
发明人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
IPC分类号： H01L2982
CPC分类号： H02K33/16 , B81B3/0051 , F04B19/006 , F04B43/043 , G02B6/3564 , G02B6/3566 , G02B6/3572 , G02B6/3584 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.

3. 发明授权

US06900510B2 MEMS devices and methods for inhibiting errant motion of MEMS components 失效
标题翻译：用于抑制MEMS组件错误运动的MEMS器件和方法
公开(公告)号：US06900510B2
公开(公告)日：2005-05-31
申请号：US10309964
申请日：2002-12-04
申请人： Hirokazu Tamura , Matthew J. Neal , Alan L. Sidman , Jiang Zhe
发明人： Hirokazu Tamura , Matthew J. Neal , Alan L. Sidman , Jiang Zhe
IPC分类号： B81B3/00 , B81B5/00 , F04B19/00 , F04B43/04 , G02B6/35 , H01F7/06 , H01F7/08 , H02K33/16 , H02N1/00 , H01L29/82
CPC分类号： F04B19/006 , B81B3/0051 , F04B43/043 , G02B6/3564 , G02B6/3566 , G02B6/3572 , G02B6/3584 , H01F7/06 , H01F7/08 , H01F2007/068 , H02K33/16 , H02N1/006
摘要： A Microelectromechanical (MEMS) device and method of fabrication that can minimize derailing of an actuable element of the MEMS device during fabrication can include a MEMS actuator to selectively generate displacement forces to displace an actuable element along a path between sidewalls of a channel. The sidewalls can have stops formed therein that can interact with surfaces on the actuable element to limit displacement of the actuable element during fabrication. One of the sidewalls can be indented to form the stops and the actuable element can have an arm portion that extends between the stops. The sidewalls can be offset to form the stops on spaced apart faces on opposite sides of the channel and the actuable element can be offset between the spaced apart faces to form offset faces in an opposing relationship with the spaced apart faces on the sidewalls. In addition, the actuable element and the sidewalls may be so shaped as to maintain a generally constant width between them.
摘要翻译：可以在制造期间最小化MEMS装置的致动元件的脱轨的微机电（MEMS）装置和制造方法可以包括MEMS致动器，以选择性地产生位移力以沿通道的侧壁之间的路径移动可致动元件。侧壁可以具有形成在其中的止动件，其可以与致动元件上的表面相互作用以限制制造过程中可致动元件的位移。侧壁中的一个可以缩进以形成止挡件，并且致动元件可以具有在止挡件之间延伸的臂部分。侧壁可以偏移以在通道的相对侧上的间隔开的面上形成止动件，并且可致动元件可以在间隔开的面之间偏移以形成与侧壁上的间隔开的面相对的相对关系的偏移面。此外，致动元件和侧壁可以被成形为在它们之间保持大致恒定的宽度。

4. 发明授权

US06858911B2 MEMS actuators 失效
标题翻译： MEMS致动器
公开(公告)号：US06858911B2
公开(公告)日：2005-02-22
申请号：US10309951
申请日：2002-12-04
申请人： Hirokazu Tamura , Matthew J. Neal , Justin C. Borski , Alan L. Sidman
发明人： Hirokazu Tamura , Matthew J. Neal , Justin C. Borski , Alan L. Sidman
IPC分类号： B81B5/00 , F04B19/00 , F04B43/04 , G02B6/35 , H01F7/06 , H01F7/08 , H02K33/16 , H02N1/00 , H01L29/82
CPC分类号： H02K33/16 , B81B5/00 , F04B19/006 , F04B43/043 , G02B6/3566 , G02B6/3572 , G02B6/3584 , G02B6/3586 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： A Microelectromechanical (MEMS) device that can minimize the effects of fabrication tolerances on the operation of the device can include a MEMS electromagnetic actuator to selectively generate displacement forces to displace an actuable element along a path. A cantilever can apply an opposing force to the actuable element to control the amount of displacement. Coil ends of the actuator can be shaped to vary a gap distance between the coil ends, and/or the magnetic portion of the actuable element may be shaped, so as to vary the force applied to the actuable element along the displacement axis. One or more pins located in the deflection path of the cantilever can contact the cantilever at one or more points so as to change the bending resistance of the cantilever. The cross-section of the cantilever can also be varied along its length so as to change the bending resistance of the cantilever.
摘要翻译：可以最小化制造公差对器件操作的影响的微机电（MEMS）器件可以包括MEMS电磁致动器，其选择性地产生位移力以沿着路径移位可致动元件。悬臂可以向可致动元件施加相反的力以控制位移量。可以将致动器的线圈端部成形为改变线圈端部之间的间隙距离，和/或可致动元件的磁性部分可以成形，以便沿着位移轴线改变施加到致动元件的力。位于悬臂的偏转路径中的一个或多个销可以在一个或多个点处接触悬臂，以便改变悬臂的抗弯曲性。悬臂的横截面也可以沿其长度变化，以便改变悬臂的抗弯曲性。

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