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1. 发明授权

US08925505B2 Finger follower lever of a valve train and method for producing the same 有权
标题翻译：气门机构的手指随动杠杆及其制造方法
公开(公告)号：US08925505B2
公开(公告)日：2015-01-06
申请号：US13446214
申请日：2012-04-13
申请人： Stephan Moeck , Michael Kress , Martin Lambert
发明人： Stephan Moeck , Michael Kress , Martin Lambert
IPC分类号： F01L1/34 , F01L1/18
CPC分类号： F01L1/185 , F01L2103/00 , F01L2105/00 , Y10T29/49247
摘要： A finger follower lever of a valve train, which has a lever body that is a pressed and punched component made of sheet metal and has a U-shaped cross-section with two largely parallel side walls. A roller rotatably mounted between the side walls on a pin. The pin is uniformly hardened and inserted at each end into a hole punched out of the side wall and is staked or caulked at the ends. To enable the holes to be punched out simultaneously in opposite directions of a relatively narrow lever body, at least one of the two side walls has, at least on the outside thereof, a flat recess in the region of the hole.
摘要翻译：一种气门机构的手指随动杠杆，其具有作为由金属板制成的冲压冲压部件的杠杆体，并且具有具有两个大致平行的侧壁的U形横截面。一个可旋转地安装在销上的侧壁之间的滚筒。销被均匀地硬化，并在每一端插入从侧壁冲出的孔，并在端部被铆接或铆接。为了使孔能够在相对较窄的杠杆体的相反方向上同时冲孔，至少在两个侧壁中的至少一个在其外侧上具有在孔的区域中的平坦凹部。

2. 发明授权

US07741579B2 Flushing lines or cavities of a laser processing machine 有权
标题翻译：激光加工机的冲洗线或腔
公开(公告)号：US07741579B2
公开(公告)日：2010-06-22
申请号：US11363541
申请日：2006-02-24
申请人： Martin Lambert , Uwe Mienhardt
发明人： Martin Lambert , Uwe Mienhardt
IPC分类号： B23K26/00
CPC分类号： B23K26/123 , B23K26/142
摘要： Flushing gas lines of a laser processing machine, by supplying a flushing gas to the system in a series of pressure impulses greater than a residual processing gas pressure after completion of a processing sequence, and allowing the supplied flushing gas to expand and mix with any residual gas between successive pressure impulses, to substantially clear the processing gas from the system.
摘要翻译：通过在完成处理顺序之后，以大于残余处理气体压力的一系列压力脉冲向系统提供冲洗气体，并且使所提供的冲洗气体与任何残留物膨胀和混合，从而冲洗气体管线连续压力脉冲之间的气体，以基本上清除来自系统的处理气体。

3. 发明授权

US06538232B2 Laser processor with scavenging of optical element 有权
公开(公告)号：US06538232B2
公开(公告)日：2003-03-25
申请号：US09921735
申请日：2001-08-03
申请人： Martin Lambert
发明人： Martin Lambert
IPC分类号： B23K2614
CPC分类号： B23K26/1435 , B23K26/1438 , B23K26/1476
摘要： A laser based processing machine incorporates in the path of a laser beam (7) at least one optical element (1) which has a surface (5) situated in the path of the laser beam (7) and a scavenging medium delivery device which flushes its surface in an essentially counterflow-free fashion. The device includes a delivery element with flow nozzles about a portion of the periphery of the optional element and through which the scavenging medium flows onto the surface of the element and thereacross.

4. 发明授权

US09097601B2 Method and system for assessment of pipeline condition 有权
标题翻译：管道状况评估方法与系统
公开(公告)号：US09097601B2
公开(公告)日：2015-08-04
申请号：US13058915
申请日：2009-08-13
申请人： Mark Stephens , Martin Lambert , Angus Simpson , Young-il Kim , John Vitkovsky
发明人： Mark Stephens , Martin Lambert , Angus Simpson , Young-il Kim , John Vitkovsky
IPC分类号： G01N11/00 , G01M5/00 , G01B17/02 , G01M3/28
CPC分类号： G01M5/0025 , G01B17/02 , G01M3/2815 , G01M5/0033
摘要： A method and system for assessing the condition of a pipe carrying a fluid is disclosed. The method includes the steps of generating a pressure wave in the fluid being carried along the pipe and detecting a pressure wave interaction signal resulting from an interaction of the pressure wave with a localized variation in pipe condition. The method then involves determining from the timing of the pressure wave interaction signal the location of the localized variation in pipe condition and the extent of the localized variation in pipe condition based on a characteristic of the pressure wave interaction signal.
摘要翻译：公开了一种用于评估携带流体的管道的状况的方法和系统。该方法包括以下步骤：在沿着管道运送的流体中产生压力波，并且检测由压力波与管道状态的局部变化相互作用而产生的压力波相互作用信号。该方法然后包括根据压力波相互作用信号的特性，根据压力波相互作用信号的定时确定管状态的局部变化的位置和管状态的局部变化的程度。

5. 发明授权

US08905369B2 Vibration isolation module and substrate processing system 有权
标题翻译：振动隔离模块和基板处理系统
公开(公告)号：US08905369B2
公开(公告)日：2014-12-09
申请号：US14241109
申请日：2012-09-10
申请人： Jerry Johannes Martinus Peijster , Rogier Martin Lambert Ellenbroek , Guido De Boer
发明人： Jerry Johannes Martinus Peijster , Rogier Martin Lambert Ellenbroek , Guido De Boer
IPC分类号： H01J37/20 , F16F15/04 , F16F15/10 , H01J37/317 , H01J37/02 , G03F7/20 , F16F15/08
CPC分类号： H01J37/20 , B82Y10/00 , B82Y40/00 , F16F15/04 , F16F15/085 , G03F7/70833 , G03F7/709 , H01J37/02 , H01J37/3177 , H01J2237/0216
摘要： The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.
摘要翻译：本发明涉及一种用于光刻设备或检查设备的隔振模块（101）。模块包括用于容纳光刻设备的支撑框架（102），中间体（103）和支撑体（104）。中间体通过至少一个弹簧元件连接到支撑框架，使得中间体是悬挂体。支撑体通过至少一个摆杆（108）连接到中间体，使得支撑体是悬挂体。本发明还涉及包括这种隔振模块的基板处理系统。

6. 发明授权

US07947923B2 Encoded optical element of a laser processing head 有权
标题翻译：激光加工头的编码光学元件
公开(公告)号：US07947923B2
公开(公告)日：2011-05-24
申请号：US11255072
申请日：2005-10-20
申请人： Martin Lambert , Philipp Herwerth
发明人： Martin Lambert , Philipp Herwerth
IPC分类号： B23K26/06
CPC分类号： B23K26/702
摘要： A device for a laser processing head includes an optical element configured for attachment to the laser processing head, a housing for the laser processing head configured to receive the optical element, and a mechanical encoding disposed on at least one of the optical element and the housing to permit installation of a predetermined optical element at a predetermined orientation into the housing.
摘要翻译：一种用于激光加工头的装置，包括被配置为附接到激光加工头的光学元件，用于激光加工头的外壳，用于接收光学元件，以及机械编码，设置在光学元件和壳体中的至少一个上以允许以预定取向将预定光学元件安装到壳体中。

7. 发明授权

US07605342B2 Laser processing head 有权
标题翻译：激光加工头
公开(公告)号：US07605342B2
公开(公告)日：2009-10-20
申请号：US11197540
申请日：2005-08-05
申请人： Martin Lambert , Jürgen-Michael Welck
发明人： Martin Lambert , Jürgen-Michael Welck
IPC分类号： B23K26/12 , B23K26/14
CPC分类号： B23K26/0884 , B23K26/0643 , B23K26/0665 , B23K26/12 , B23K26/123 , B23K26/128
摘要： A laser processing head includes a first housing region associated with a beam guidance of a laser processing machine, a second housing region associated with the laser processing head, and an aperture in a wall separating the first and second housing regions. The head is configured such that a laser beam may pass sequentially through the beam guidance, the first housing region, the aperture, and the second housing, and the first housing region includes a first gas atmosphere associated with the beam guidance and maintained at a higher pressure than a second gas atmosphere in the second housing region.
摘要翻译：激光加工头包括与激光加工机的光束引导相关联的第一壳体区域，与激光加工头相关联的第二壳体区域和分隔第一和第二壳体区域的壁中的孔。头部构造成使得激光束可以顺序地通过光束引导，第一壳体区域，孔径和第二壳体，并且第一壳体区域包括与光束引导相关联的第一气体气氛并保持在较高压力高于第二壳体区域中的第二气体气氛。

8. 发明申请

US20120260875A1 FINGER FOLLOWER LEVER OF A VALVE TRAIN AND METHOD FOR PRODUCING THE SAME 有权
标题翻译：一种阀门的指示杆及其制造方法
公开(公告)号：US20120260875A1
公开(公告)日：2012-10-18
申请号：US13446214
申请日：2012-04-13
申请人： Stephan MOECK , Michael KRESS , Martin LAMBERT
发明人： Stephan MOECK , Michael KRESS , Martin LAMBERT
IPC分类号： F01L1/18 , B23P15/00
CPC分类号： F01L1/185 , F01L2103/00 , F01L2105/00 , Y10T29/49247
摘要： A finger follower lever of a valve train, which has a lever body that is a pressed and punched component made of sheet metal and has a U-shaped cross-section with two largely parallel side walls. A roller rotatably mounted between the side walls on a pin. The pin is uniformly hardened and inserted at each end into a hole punched out of the side wall and is staked or caulked at the ends. To enable the holes to be punched out simultaneously in opposite directions of a relatively narrow lever body, at least one of the two side walls has, at least on the outside thereof, a flat recess in the region of the hole.
摘要翻译：一种气门机构的手指随动杠杆，其具有作为由金属板制成的冲压冲压部件的杠杆体，并且具有具有两个大致平行的侧壁的U形横截面。一个可旋转地安装在销上的侧壁之间的滚筒。销被均匀地硬化，并且在每一端插入从侧壁冲出的孔，并在端部被铆接或铆接。为了使孔能够在相对较窄的杠杆体的相反方向上同时冲孔，至少在两个侧壁中的至少一个在其外侧上具有在孔的区域中的平坦凹部。

9. 发明申请

US20110100968A1 LASER MACHINE MONITORING 有权
标题翻译：激光机监控
公开(公告)号：US20110100968A1
公开(公告)日：2011-05-05
申请号：US12987234
申请日：2011-01-10
申请人： Martin Lambert , Juergen-Michael Weick
发明人： Martin Lambert , Juergen-Michael Weick
IPC分类号： B23K26/08 , B23K26/00
CPC分类号： B23K26/702
摘要： A laser processing machine head, a laser processing machine head monitoring system, and a method of monitoring an optical element of a laser processing machine feature a light-transmissive optical element and an optical element holder defining a cavity in which the optical element is retained against rotation. A light source mounted to the holder directs a beam of light into the optical element through a peripheral surface of the optical element. A light receiver is responsive to light from the light source reflected through the optical element. Monitoring a signal from the light receiver allows a status of the optical element to be assessed.
摘要翻译：激光加工机头，激光加工机头监测系统和监测激光加工机的光学元件的方法，其特征在于透光光学元件和光学元件保持器，其限定光学元件保持抵抗的空腔回转。安装到保持器的光源通过光学元件的外围表面将光束引导到光学元件中。光接收器响应来自通过光学元件反射的光源的光。监视来自光接收器的信号允许评估光学元件的状态。

10. 发明授权

US07875830B2 Laser machine monitoring 有权
标题翻译：激光机监控
公开(公告)号：US07875830B2
公开(公告)日：2011-01-25
申请号：US11695312
申请日：2007-04-02
申请人： Martin Lambert , Juergen-Michael Weick
发明人： Martin Lambert , Juergen-Michael Weick
IPC分类号： B23K26/02
CPC分类号： B23K26/702
摘要： A laser processing machine head, a laser processing machine head monitoring system, and a method of monitoring an optical element of a laser processing machine feature a light-transmissive optical element and an optical element holder defining a cavity in which the optical element is retained against rotation. A light source mounted to the holder directs a beam of light into the optical element through a peripheral surface of the optical element. A light receiver is responsive to light from the light source reflected through the optical element. Monitoring a signal from the light receiver allows a status of the optical element to be assessed.
摘要翻译：激光加工机头，激光加工机头监测系统和监测激光加工机的光学元件的方法，其特征在于透光光学元件和光学元件保持器，其限定光学元件保持抵抗的空腔回转。安装到保持器的光源通过光学元件的外围表面将光束引导到光学元件中。光接收器响应来自通过光学元件反射的光源的光。监视来自光接收器的信号允许评估光学元件的状态。

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