专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20090061640A1 Alternate gas delivery and evacuation system for plasma processing apparatuses 有权
标题翻译：用于等离子体处理装置的替代气体输送和抽空系统
公开(公告)号：US20090061640A1
公开(公告)日：2009-03-05
申请号：US12230089
申请日：2008-08-22
申请人： Harry P. Wong , Vernon Wong , Christopher Charles Griffin , Mark Taskar
发明人： Harry P. Wong , Vernon Wong , Christopher Charles Griffin , Mark Taskar
IPC分类号： H01L21/3065 , C23F1/08
CPC分类号： C23C16/45523 , C23C16/4412 , C23C16/45561 , C23C16/5096 , H01J37/3244 , H01J37/32449
摘要： A gas distribution system for supplying a gas mixture to a plasma process chamber is provided. A first valve arrangement is connected to upstream ends of a first gas line and a second gas line. A second valve arrangement is connected to downstream ends of the first gas line and the second gas line. A first gas distribution outlet line is connected between a gas supply and the first valve arrangement and a first chamber inlet line connected between the second valve arrangement and the plasma process chamber. A first evacuation line is connected to the first gas line at a location between the first valve arrangement and the second valve arrangement. A second evacuation line is connected to the second gas line at a location between the first valve arrangement and the second valve arrangement. The first evacuation line and second evacuation line are in fluid communication with a vacuum line. A controller is operable to actuate the first valve arrangement and second valve arrangement to selectively flow the gas mixture from the gas supply to the plasma process chamber through the first gas line while the second gas is selectively evacuated by the vacuum line; or to selectively flow the gas mixture from the gas supply to the plasma process chamber through the second gas line while the first gas line is selectively evacuated by the vacuum line.
摘要翻译：提供了一种用于将气体混合物供应到等离子体处理室的气体分配系统。第一阀装置连接到第一气体管线和第二气体管线的上游端。第二阀装置连接到第一气体管线和第二气体管线的下游端。第一气体分配出口管线连接在气体供应源和第一阀装置之间，连接在第二阀装置和等离子体处理室之间的第一室入口管线。在第一阀装置和第二阀装置之间的位置处，第一排气管线连接到第一气体管线。在第一阀装置和第二阀装置之间的位置处，第二排气管线连接到第二气体管线。第一排气管线和第二排气管线与真空管线流体连通。控制器可操作以致动第一阀装置和第二阀装置，以选择性地将气体混合物从气体供应通过第一气体管道流动到等离子体处理室，同时第二气体被真空管线选择性地抽真空; 或者通过第二气体管线将气体混合物从气体供给选择性地流动到等离子体处理室，同时第一气体管线被真空管线选择性抽真空。

2. 发明申请

US20060278835A1 Optimized activation prevention assembly for a gas delivery system and methods therefor 有权
公开(公告)号：US20060278835A1
公开(公告)日：2006-12-14
申请号：US11165858
申请日：2005-06-24
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.

3. 发明授权

US08104503B2 Optimized activation prevention mechanism for a gas delivery system and methods therefor 有权
标题翻译：气体输送系统的优化激活预防机制及其方法
公开(公告)号：US08104503B2
公开(公告)日：2012-01-31
申请号：US12611790
申请日：2009-11-03
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.
摘要翻译：公开了一种用于气体输送系统的优化的激活预防组件。该装置包括气动阀组件。该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能机制。

4. 发明授权

US09175808B2 System and method for decreasing scrubber exhaust from gas delivery panels 有权
标题翻译：从气体输送板减少洗涤器排气的系统和方法
公开(公告)号：US09175808B2
公开(公告)日：2015-11-03
申请号：US13220890
申请日：2011-08-30
申请人： Mark Taskar , Iqbal Shareef
发明人： Mark Taskar , Iqbal Shareef
IPC分类号： B60B15/04 , F17D1/00 , B08B15/00 , B08B15/04
CPC分类号： F17D1/00 , B08B15/002 , B08B15/04 , F17C1/00 , F17C2221/031 , G01M3/22 , Y10T137/0318 , Y10T137/6851 , Y10T137/7736 , Y10T137/7761 , Y10T137/86107
摘要： A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.
摘要翻译：提供一种方法和装置，用于减少来自气体面板的洗涤器排气，降低操作成本，通过在高潜在的点火风险区域中增加空气速度来降低便利成本和功率消耗。该设备包括通过具有各个分散喷嘴的管道供应压缩干燥空气（CDA）。 CDA分散喷嘴可以安装在各种关键位置，以便提供额外的通风湍流并减少气体面板内的潜在死区。本发明的方面有助于通过降低功耗来节省能源和保护环境。另外，通过最小化潜在的点火风险，可以改善人身安全。

5. 发明授权

US09091397B2 Shared gas panels in plasma processing chambers employing multi-zone gas feeds 有权
标题翻译：采用多区气体进料的等离子处理室中的共用气体面板
公开(公告)号：US09091397B2
公开(公告)日：2015-07-28
申请号：US13549344
申请日：2012-07-13
申请人： Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
发明人： Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
IPC分类号： E03B11/00 , F17D1/00
CPC分类号： F17D1/00 , F17C1/00 , F17C2270/0518 , Y10T137/0318 , Y10T137/87249
摘要： Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.
摘要翻译：在等离子体处理室的多个多区域气体供给室中共享气体面板的装置和方法。每个多区气体进料室设置有其自己的多区气体进料装置，以将进入的气流可调节地分流到每个室中，并且将不同的气流提供给多区气体进料室的不同区域。

6. 发明授权

US08720478B2 Optimized activation prevention mechanism for a gas delivery system 有权
标题翻译：优化气体输送系统的激活预防机制
公开(公告)号：US08720478B2
公开(公告)日：2014-05-13
申请号：US13338175
申请日：2011-12-27
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： A mechanism for implementing at least one of activation and deactivation of a gas valve that is coupled to an input manifold of a processing chamber is provided. The mechanism includes a toggle arm disposed in one of a toggle activation position and a toggle deactivation position. The mechanism also includes a toggle operated switch coupled to the toggle arm and the gas valve. The toggle operated switch is disposed on top of the gas valve and the toggle arm is disposed on top of the toggle operated switch so as to minimize a footprint of an assembly that comprises the gas valve, the toggle operated switch, and the toggle arm. Thus, the process gas flow flows through the gas valve when the toggle arm is in the toggle activation position and is inhibited from flowing into the gas valve when the toggle arm is in the toggle deactivation position.
摘要翻译：提供一种用于实现联接到处理室的输入歧管的气阀的激活和去激活中的至少一个的机构。该机构包括设置在肘节启动位置和肘节失活位置之一中的肘节臂。该机构还包括联接到肘节臂和气阀的拨动操作开关。拨动操作的开关设置在气阀的顶部，并且肘节臂设置在肘节操作的开关的顶部上，以便最小化包括气阀，肘节操作的开关和肘节臂的组件的占地面积。因此，当肘节臂处于肘节启动位置时，处理气体流动通过气体阀，并且当肘节臂处于肘节失活位置时，该气体流被阻止流入气体阀。

7. 发明申请

US20130255883A1 METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESSING SYSTEM 有权
标题翻译：在等离子体处理系统中提供工艺气体的方法和装置
公开(公告)号：US20130255883A1
公开(公告)日：2013-10-03
申请号：US13431950
申请日：2012-03-27
申请人： Iqbal A. Shareef , Evangelos Spyropoulos , Mark Taskar
发明人： Iqbal A. Shareef , Evangelos Spyropoulos , Mark Taskar
IPC分类号： F16L55/04 , B05C11/00
CPC分类号： H01J37/3244 , C23C16/455 , C23C16/52 , H01J37/32899
摘要： Methods and apparatus for supplying gas in a plasma processing system that employs the single line drop approach wherein a regulator is shared among multiple mass flow controllers. In one or more embodiments, an accumulator is provided and coupled in gaseous communication with a shared manifold to reduce pressure spikes and dips. A filter, which may be replaceable or non-replaceable separate from the accumulator, is integrated with the accumulator in one or more embodiments.
摘要翻译：在采用单线滴落方法的等离子体处理系统中供应气体的方法和装置，其中调节器在多个质量流量控制器之间共享。在一个或多个实施例中，提供蓄能器并且与共用歧管气体连通地联接以减少压力尖峰和下降。在一个或多个实施例中，可以与蓄能器分离的可替代或不可更换的过滤器与蓄能器集成。

8. 发明授权

US08322380B2 Universal fluid flow adaptor 有权
标题翻译：通用流体流量适配器
公开(公告)号：US08322380B2
公开(公告)日：2012-12-04
申请号：US12245671
申请日：2008-10-03
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K11/20
CPC分类号： F16L41/03 , Y10T137/0402 , Y10T137/85938 , Y10T137/87885
摘要： A universal fluid flow adaptor may be formed of a single structure having a plurality of vertical conduits to receive a gas flow, the plurality of vertical conduits extending through the single structure from the top surface to the bottom surface, a plurality of horizontal conduits to receive a gas flow, the plurality of horizontal conduits extending through the first side, the second side, the first end, and the second end at an interior of the single structure, wherein one or more of the plurality of vertical conduits converge with at least one of the plurality of horizontal conduits at the interior of the single structure, and wherein one or more of the plurality of horizontal conduits converge to form at least one cross-shaped conduit at the interior of the single structure.
摘要翻译：通用流体流动适配器可以由具有多个垂直导管以接收气流的单个结构形成，所述多个垂直导管从顶表面延伸到底表面，多个垂直导管从多个水平导管接收气流，所述多个水平管道在单个结构的内部延伸穿过第一侧，第二侧，第一端和第二端，其中多个垂直导管中的一个或多个与至少一个所述多个水平管道在所述单个结构的内部，并且其中所述多个水平管道中的一个或多个会聚以在所述单个结构的内部形成至少一个十字形导管。

9. 发明申请

US20100043889A1 OPTIMIZED ACTIVATION PREVENTION MECHANISM FOR A GAS DELIVERY SYSTEM AND METHODS THEREFOR 有权
标题翻译：气体输送系统的优化预防机制及其方法
公开(公告)号：US20100043889A1
公开(公告)日：2010-02-25
申请号：US12611790
申请日：2009-11-03
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.
摘要翻译：公开了一种用于气体输送系统的优化的激活预防组件。该装置包括气动阀组件。该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能机制。

10. 发明申请

US20080302433A1 TRIPLE VALVE INLET ASSEMBLY 有权
标题翻译：三通阀入口总成
公开(公告)号：US20080302433A1
公开(公告)日：2008-12-11
申请号：US11761244
申请日：2007-06-11
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K11/00
CPC分类号： F16K27/003 , Y10T137/877 , Y10T137/87885
摘要： A gas delivery apparatus having a manifold block configured to create a fluid flow path, a horizontal inlet port coupled to the manifold block at a first side in fluid communication with the fluid flow path and configured to receive a supply gas, a pneumatic valve coupled to the manifold block at a first end configured to prevent unauthorized activation of fluid flow, the pneumatic valve in fluid communication with the fluid flow path and horizontal inlet port, a purge valve coupled to the manifold block in fluid communication with the fluid flow path positioned adjacent the pneumatic valve, and a vertical purge port coupled to the manifold block at a first end, the vertical purge port positioned between the purge valve and the pneumatic valve and having a purge gas input/output connection at a second end, wherein the horizontal inlet port is positioned perpendicular to the vertical purge port.
摘要翻译：一种气体输送装置，其具有被配置为产生流体流动路径的歧管块，在第一侧与流体连通的第一侧连接到歧管块的水平入口端口，并且被配置为接收供应气体，气动阀连接到所述歧管块在第一端被构造成防止流体流动的未经授权的激活，所述气动阀与所述流体流动路径和水平入口端口流体连通;联接到所述歧管块的净化阀，其与邻近的流体流动路径流体连通所述气动阀和在第一端处联接到所述歧管块的垂直吹扫端口，所述垂直吹扫端口位于所述吹扫阀和所述气动阀之间，并且在第二端具有吹扫气体输入/输出连接，其中所述水平入口端口垂直于垂直吹扫口定位。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式