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    • 3. 发明授权
    • Positive acting photoresist comprising a photoacid, a photobase and a
film forming acid-hardening resin system
    • 正性光致抗蚀剂,其包含光酸,光碱和成膜酸硬化树脂体系
    • US5650261A
    • 1997-07-22
    • US428820
    • 1989-10-27
    • Mark Robert Winkle
    • Mark Robert Winkle
    • G03F7/004G03F7/012G03F7/023G03F7/38
    • G03F7/0045
    • A positive-acting photoresist composition which produces crosslinked images and processes for using the photoresist composition are disclosed. The photoresist composition is prepared from a mixture containing a film forming, polymer-containing, acid hardening resin system, an acid or acid generating material (preferably in the form of a thermal acid generator) for crosslinking the acid hardening resin system, and a photobase generating compound. The photoresist composition is applied as a film onto a substrate surface and selectively imagewise exposed through a photomask to actinic radiation. The actinic radiation causes the photobase generator to produce a base in the imagewise exposed portions of the photoresist film. The photochemically generated base neutralizes the acid in the imagewise exposed areas of the photoresist film. The non-imagewise exposed portions of the photoresist film, not containing the photochemically generated base, are crosslinked by the catalytic action of the acid upon heating the film, and the imagewise exposed portions of the photoresist film are removed from the substrate by the action of a developer solution leaving a crosslinked positive image on the substrate. In an alternate embodiment the photoresist composition may be applied to conductive substrate surfaces by electrodeposition.
    • 公开了产生交联图像的正性光致抗蚀剂组合物和使用光致抗蚀剂组合物的方法。 光致抗蚀剂组合物由含有成膜剂,含聚合物的酸固化树脂体系,酸或产酸材料(优选以热酸发生剂形式)交联的混合物制备,用于交联酸固化树脂体系,以及光基 产生化合物。 将光致抗蚀剂组合物作为膜施加到基底表面上,并通过光掩模选择性地成像曝光至光化辐射。 光化辐射导致光致产生器在光致抗蚀剂膜的成像曝光部分中产生基底。 光化学产生的碱中和光致抗蚀剂膜的成像曝光区域中的酸。 光致抗蚀剂膜的非成像曝光部分,不含光化学产生的基底,通过在加热膜时酸的催化作用而交联,并且光刻胶膜的成像曝光部分通过 显影剂溶液在基底上留下交联的正像。 在替代实施例中,光致抗蚀剂组合物可以通过电沉积施加到导电基底表面。