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1. 发明公开

US20240162069A1 SUBSTRATE STORING CONTAINER 审中-公开
公开(公告)号：US20240162069A1
公开(公告)日：2024-05-16
申请号：US18551473
申请日：2021-03-29
申请人： Miraial Co. Ltd.
发明人： Tsuyoshi NAGASHIMA , Ryuuji FUKUDA
IPC分类号： H01L21/673
CPC分类号： H01L21/67393 , H01L21/67383
摘要： The present invention comprises: a container body; a lid; a lid-side substrate support capable of supporting edges of substrates when a container body opening is closed by the lid; a rear-side substrate support that is disposed as a counterpart of the lid-side substrate support in a substrate housing space, is capable of supporting the edges of the substrates, and supports the substrates in a state in which the edges of the substrates are arranged parallel to each other by the rear-side substrate support together with the lid-side substrate support while the container body opening is closed; a pair of lateral substrate supports that are disposed to face each other in a lateral direction in the substrate housing space and are configured to contact the edges of the substrates to be able to support the edges of the substrates in a state in which the adjacent substrates are arranged parallel to each other at predetermined intervals; and support constituent parts that are disposed to face the inner surfaces of side walls of a wall of the container body. The lateral substrate supports are provided in the support constituent parts, and a dehumidifying agent is placeable between the support constituent parts and the inner surfaces of the side walls of the wall of the container body.

2. 发明公开

US20230400102A1 FLUID CONTROL DEVICE 审中-公开
公开(公告)号：US20230400102A1
公开(公告)日：2023-12-14
申请号：US18033736
申请日：2020-10-29
申请人： MIRAIAL CO., LTD.
发明人： Tsuyoshi Nagashima , Seiya Tamaribuchi
IPC分类号： F16K1/12 , F16K27/02
CPC分类号： F16K1/12 , F16K27/02
摘要： A device for controlling a flow of a fluid includes a flow path having an inflow port and an outflow port; a valve body in the flow path between the inflow port and the outflow port; a valve seat on which the valve body can be seated; an elastic member for urging the valve seat or the valve body in a direction of approaching or separating the valve body to or from the valve seat; and a working fluid chamber that expands or contracts in the direction of separating or approaching the valve body from or to the valve seat by feeding or discharging a working fluid, wherein a part of the valve body is on an extension of a linear flow path central axis on the inflow port side across the valve body and the valve seat, and on an extension of a linear flow path central axis on the outflow port side, and wherein the valve seat or the valve body is displaceable in an axial direction of the linear flow path center axis on the inflow port side and the linear flow path central axis on the outflow port side.

3. 发明授权

US11501990B2 Substrate storing container 有权
公开(公告)号：US11501990B2
公开(公告)日：2022-11-15
申请号：US16475630
申请日：2018-06-12
申请人： MIRAIAL CO., LTD.
发明人： Chiaki Matsutori
IPC分类号： H01L21/67 , H01L21/673 , B65D43/02 , E05C9/04
摘要： Provided is a substrate storing container in which a latching mechanism includes an engagement latch 32, an engagement latch lifting/lowering cam 35 that causes the engagement latch 32 to advance to and retreat from an engagement concave portion and causes the engagement latch 32 in the engagement concave portion to move toward/away from the other end portion of a container main body by advancing and retreating in a direction in which the engagement latch 32 advances and retreats, and a rotating cam 31, and the engagement latch lifting/lowering cam 35 includes an engagement latch connection portion 357 that causes the engagement latch 32 to be engaged with the engagement concave portion and thereafter causes the engagement latch 32 to approach the other end portion of the container main body by moving in a direction in which the engagement latch 32 approaches the engagement concave portion.

4. 发明授权

US11309200B2 Substrate storage container 有权
公开(公告)号：US11309200B2
公开(公告)日：2022-04-19
申请号：US16488528
申请日：2017-02-27
申请人： Miraial Co., Ltd.
发明人： Satoko Kai
IPC分类号： H01L21/673
摘要： A back side substrate support portion 6 includes a lower side inclined face 622 on which an end of a back face of a substrate W slides, and a substrate support portion 632 that is located above the lower side inclined face 622 and can support an edge portion of the substrate W. When a container main body opening portion 21 is closed by a lid body 3, the edge portion of the substrate W slides on the lower side inclined face 622 and reaches the substrate support portion 632. At least a portion of the lower side inclined face 622 is configured from a second member that is different from a first member that configures the substrate support portion 632, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member.

5. 发明授权

US10134618B2 Substrates storing container 有权
公开(公告)号：US10134618B2
公开(公告)日：2018-11-20
申请号：US14895890
申请日：2013-06-03
申请人： MIRAIAL CO., LTD. , SHIN-ETSU POLYMER CO., LTD.
发明人： Yuta Kanamori
IPC分类号： H01L21/673
摘要： The bottom plate has a plate-like shape, is arranged to face an outer face of a lower wall, and has a locking portion. The groove member has: a groove-forming portion having a groove opening downward formed therein, a surrounding wall portion, which is connected to the groove-forming portion, and is arranged around the groove-forming portion; and a locked portion, which is connected to the surrounding wall portion, is elastically deformable, and is locked by way of the locking portion of the bottom plate by being elastically deformed. The groove member is supported and fixed by way of the lower wall and the bottom plate.

6. 发明授权

US09966288B2 Structure for fastening together resin members in substrate storing container 有权
公开(公告)号：US09966288B2
公开(公告)日：2018-05-08
申请号：US15028537
申请日：2013-10-16
申请人： MIRAIAL CO., LTD.
发明人： Tsuyoshi Nagashima
IPC分类号： H01L21/673 , B65D81/113 , H01L21/677
CPC分类号： H01L21/67379 , B65D81/113 , H01L21/67369 , H01L21/67386 , H01L21/67724 , H01L21/6773
摘要： The lower lid includes a bottom plate that supports the substrate storing container and a lower lid peripheral wall that extends upwards from a periphery of the bottom plate. The sleeve member has a tubular shape having an axial center that extends in the vertical direction. The upper lid has a top plate and an upper lid peripheral wall that extends downwards. The lower lid includes device positioning portions. The device positioning portions can engage the positioned portion of the lifting device that lifts, from the lower lid, the substrate storing container which is supported by the lower lid in a state of the upper lid being removed therefrom.

7. 发明授权

US09850055B2 Packaging structure for packing substrate storing container 有权
公开(公告)号：US09850055B2
公开(公告)日：2017-12-26
申请号：US15021542
申请日：2013-09-13
申请人： MIRAIAL CO., LTD.
发明人： Tsuyoshi Nagashima
IPC分类号： B65D5/58 , B65D81/05 , B65D81/113 , H01L21/673
CPC分类号： B65D81/051 , B65D81/113 , H01L21/6732 , H01L21/67369 , H01L21/67376
摘要： The first cushioning portion includes: a cushioning support portion that directly abuts the substrate storing container to support the substrate storing container; and a cushioning-portion connecting portion that is connected to the cushioning support portion, and extends downwards from the cushioning support portion. The second cushioning portion includes: a cushioning plate-like portion in which a through-hole is formed; and cushioning leg portions which are configured by a cushioning material which is softer than the cushioning-portion connecting portion of the first cushioning portion, and extend downwards from the cushioning plate-like portion. The cushioning plate-like portion supports the first cushioning portion in a state in which the cushioning-portion connecting portion penetrates through the through-hole of the cushioning plate-like portion.

8. 发明申请

US20160204011A1 SUBSTRATE STORING CONTAINER 审中-公开
标题翻译：基座储存容器
公开(公告)号：US20160204011A1
公开(公告)日：2016-07-14
申请号：US14912845
申请日：2013-08-22
申请人： MIRAIAL CO., LTD.
发明人： Sumie SHIGETA , Takayuki UENO , Shota FUKUSHIMA
IPC分类号： H01L21/673
CPC分类号： H01L21/67393 , B65D2585/86 , H01L21/67373 , H01L21/67379 , H01L21/67386
摘要： The lid body which includes a lid body main body having a lid body inner face and a lid body outer face, is detachable to the opening rim portion, and can close the container main body opening portion, wherein the lid body inner face forms the substrate storing space together with the main body inner face when the container main body opening portion is closed. The external component made from resin that is mounted to at least one of a part of the container main body other than the main body inner face, and a part of the lid body main body other than the lid body inner face. The external component is annealed.
摘要翻译：包括具有盖体内表面和盖体外表面的盖主体的盖主体可拆卸到开口边缘部分，并且可以关闭容器主体开口部分，其中盖体内表面形成基板当容器主体开口部分关闭时，与主体内表面一起存储空间。由树脂制成的外部部件，其安装在除了主体内面之外的容器主体的一部分中的至少一个上，以及盖体主体的除盖体内表面以外的部分。外部组件退火。

9. 发明申请

US20160126122A1 SUBSTRATE STORING CONTAINER 审中-公开
标题翻译：基座储存容器
公开(公告)号：US20160126122A1
公开(公告)日：2016-05-05
申请号：US14895890
申请日：2013-06-03
申请人： SHIN-ETSU POLYMER CO., LTD. , MIRAIAL CO., LTD.
发明人： Yuta KANAMORI
IPC分类号： H01L21/673
CPC分类号： H01L21/67383 , H01L21/67369 , H01L21/67379
摘要： The bottom plate has a plate-like shape, is arranged to face an outer face of a lower wall, and has a locking portion. The groove member has: a groove-forming portion having a groove opening downward formed therein, a surrounding wall portion, which is connected to the groove-forming portion, and is arranged around the groove-forming portion; and a locked portion, which is connected to the surrounding wall portion, is elastically deformable, and is locked by way of the locking portion of the bottom plate by being elastically deformed. The groove member is supported and fixed by way of the lower wall and the bottom plate.
摘要翻译：底板具有板状，配置成面向下壁的外表面，并具有锁定部。所述槽构件具有：槽形成部分，其具有向下形成的槽开口，与所述槽形成部分连接并围绕所述槽形成部分布置的围壁部; 并且连接到周围壁部的锁定部可弹性变形，并且通过弹性变形而被底板的锁定部锁定。槽构件通过下壁和底板被支撑和固定。

10. 发明申请

US20160104649A1 SUBSTRATE STORAGE CONTAINER 有权
标题翻译：基板存储容器
公开(公告)号：US20160104649A1
公开(公告)日：2016-04-14
申请号：US14893817
申请日：2013-05-29
申请人： SHIN-ETSU POLYMER CO., LTD. , MIRAIAL CO., LTD.
发明人： Yuta KANAMORI
IPC分类号： H01L23/04 , H01L23/32 , H01L23/13
CPC分类号： H01L23/04 , H01L21/67379 , H01L23/13 , H01L23/32 , H01L2924/0002 , H01L2924/00
摘要： A handling member includes: a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively; a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged; a handling member side guided portion that is engaged with the guide members and of which a movement is guided between the mounting position and the detachment position by the guide members; and a back-side guided portion that can be engaged with the back-side engaging portion by a movement of the handling member from the detachment position to the mounting position.
摘要翻译：处理构件包括：分别沿着一对侧壁布置的基本上板状的处理构件主体; 圆形位置限制通孔，其形成为沿着处理构件的厚度方向延伸穿过处理构件主体并且半圆形凸部可以与其接合; 处理构件侧引导部，其与所述引导构件接合，并且通过所述引导构件在所述安装位置和所述分离位置之间引导移动; 以及后侧引导部，其能够通过所述操作部件从所述拆卸位置向所述安装位置的移动而与所述后侧卡合部卡合。

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